CVD金刚石薄膜的微机械加工技术研究进展

200311CVDPROGRESSOFTHERESEARCHONTHEMICRO-MECHANICALMACHININGTECHNIQUEFORCVDDIAMONDFILM(200030)MEMSMEMS[HTSS]TG163AAbstractCVDdiamondfilmisapromisingfunctionalelectronicmaterialandhasattractedinereasinginterest,butitissoextrahardandchemicallystablethatitisdifficulttobeetchedandfabricated.Thus,thetechniqueofmicromechanicalmachiningofCVDdiamondfilmisoneofthekeytechniqueinMEMSapplications.Inthispaper,thelatestdevelopmentsaboutthistechnique,suchasselectivedeposition,replicationprocesses,laserablationandoxygenplasmaetchingandsoonwereintroduced,andthetechniqueofoxygenreactiveionetchingusedforCVDdiamondfilmwasdiscussedindetail.Andthenewconceptofsidewallpassivationwasputforward.Inthismechanismmetalmaskplaysanimportantroleinimprovingthecharacteristicsoffabricateddiamondstructure.ThisprocessisrecommendedtobeamorepowerfultechniqueforthediamondmicrostructurefabricationinMEMS.KeywordsCVDdiamondfilm;micromachining;patterningbyRIE1MEMS2080MEMSMEMSMEMSMEMSMEMSMEMSMEMS200312MEMSMEMSMEMSMEMSCVDXXMEMSCVD201000MEMSMEMS2CVD1050mSiO210/m2CVDSiO210-410-3RameshamMEMS8m111200313MPCVDSiSiO22m1-2mCVD3ParkCVDShirkMichaelCVDPark4V200314VSOISOI15,,,,,,BelloRIESandhuO2H26.5Pa80ml/min560A/min350A/min-ARIERIEBello200315Efremow2keVXe+100500A/min02000A/min20Timothy0.5keV1keVKaufman2630nm/min10RIE25321622200316P68Pa80sccm(2)3050nm/min400600V2SEMFig.2SEMmicrographofdiamondstructurefabricatedatoptimizedconditions34RIERIE6MEMS200317MEMSRIEMEMS1963221320