半导体制造良率提升(Lite)

PMOSTransistor(PullUpTransistor)NMOSTransistor(PullDownTransistor)Legend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccVssIBL#BLWLWLTransferGatesWordLineLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccVssIBL#BLWLWLTransferGatesTransferGatesWordLineLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2Bit-LinesVccVssIBL#BLWLWLLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2Bit-LinesVccVssIBL#BLWLWLVccT2T4T1T3T5T6BL#BLWLWLVssNode0LOW(Vss)Node1HIGH(Vcc)OFFOFFONONCellshownhasstored“0”Stored1if:Node0(BLside)=HIGHNode1(BL#side)=LOWVccT2T4T1T3T5T6BL#BLWLWLVssNode0LOW(Vss)Node1HIGH(Vcc)OFFOFFONONVccT2T4T1T3T5T6BL#BLWLWLVssVccT2T4T1T3T5T6BL#BLWLWLVssNode0LOW(Vss)Node1HIGH(Vcc)OFFOFFONONCellshownhasstored“0”Stored1if:Node0(BLside)=HIGHNode1(BL#side)=LOWLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMVccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMVccT2T4T1T3T5T6VssABL#BLWLWLBCDEFGHIKLJMVccT2T4T1T3T5T6VssABLWLWLBCDEFGHIKLJM1cellp-diffusion(PMOS)n-diffusion(NMOS)PolynodesPolyBL/BL#Metal1ContacttoSi/polyVia1T2T4T3T5T1T6VccT2T4T1T3T5T6VssABLWLWLBCDEFGHIKLJMVccT2T4T1T3T5T6VssABLWLWLBCDEFGHIKLJM1cellp-diffusion(PMOS)p-diffusion(PMOS)n-diffusion(NMOS)n-diffusion(NMOS)PolynodesPolyBL/BL#PolynodesPolyBL/BL#Metal1Metal1ContacttoSi/polyContacttoSi/polyVia1Via1T2T4T2T4T3T5T3T5T3T5T1T6T1T6T1T6p-diffusion(PMOS)n-diffusion(NMOS)PolynodesPolyBL/BL#ContacttoSi/polyMetal1Via11cellp-diffusion(PMOS)p-diffusion(PMOS)n-diffusion(NMOS)n-diffusion(NMOS)PolynodesPolyBL/BL#PolynodesPolyBL/BL#ContacttoSi/polyContacttoSi/polyMetal1Metal1Via1Via11cellOneBitPolyWordLineOneBitOneBitPolyWordLineOneBitOneBitVssBLBL#VssWordlineVccOneBitVssBLBL#VssWordlineVccVssGlobalBitlineReadlinesVccVccGlobalWordlinesVssVssGlobalBitlineReadlinesVccVccGlobalWordlinesVssVssGlobalBitLineWriteVccGlobalwritebitlinesGlobalwordlinesGlobalreadbitlinesLocalwordlinesLocalbitlinesInterleavedArchitecture(crosssection)VssGlobalBitLineWriteVccGlobalwritebitlinesGlobalwordlinesGlobalreadbitlinesLocalwordlinesLocalbitlinesGlobalwritebitlinesGlobalwordlinesGlobalreadbitlinesLocalwordlinesLocalbitlinesInterleavedArchitecture(crosssection)VccM2M4M1M3M5M6VssHIFGBEDCALKD_BVOVccOpenM2-M3GateopenM4-M5GateopenS_BVssOpenD_BVEBL#OpenBL#BLS_BBL#OpenS_BBLOpenD_BVEBLOpenD_BVEVssOpenWLWLLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2VccM2M4M1M3M5M6VssHIFGBEDCALKD_BVOVccOpenM2-M3GateopenM4-M5GateopenS_BVssOpenD_BVEBL#OpenBL#BLS_BBL#OpenS_BBLOpenD_BVEBLOpenD_BVEVssOpenWLWLVccM2M4M1M3M5M6VssHIFGBEDCALKD_BVOVccOpenM2-M3GateopenM4-M5GateopenS_BVssOpenD_BVEBL#OpenBL#BLS_BBL#OpenS_BBLOpenD_BVEBLOpenD_BVEVssOpenWLWLLegend(Schematic)NdiffusionPdiffusionContactPolyMetal1Via1Metal2