德国Centrotherm PECVD设备E2000中文说明书pdf

TechnicalDescriptionSystemDescription17.6.20091PECVDE2000HT410-4040.140.1.1CentrothermPECVD40.240.360.3.1160.471()81.1PECVD–()81.1.181.1.291.1.2.192102.1102.2102.3(CAN)112.4122.5CMS132.5.1132.5.2133CCC153.1CESAR-153.2CCC-RM163.2.1163.2.2ProtGraf-CESAR173.2.3173.2.4173.3CCC-PC173.3.1173.3.2183.4(USV10)18TechnicalDescriptionSystemDescription17.6.200923.5183.5.1193.5.2213.5.3213.5.4214224.1REG97224.2224.3235Error!Bookmarknotdefined.6256.1256.1.1()256.2()266.2.1266.2.2()266.2.3266.2.4276.3(PECVD)276.3.1(H-LPE-V-150-900)276.3.2306.3.3306.3.4317327.1327.2327.3327.4338348.1()348.1.1PECVD348.2348.2.1(PECVD)349GVS359.1()36TechnicalDescriptionSystemDescription17.6.2009310/3710.1/3710.1.1PECVD–3710.2/3810.2.1()3810.2.2()39114011.140kHz40124112.14112.1.14112.24112.2.1PECVD4112.34112.3.141134213.14213.24213.34214//4314.14314.24414.345TechnicalDescriptionSystemDescription17.6.200940.10.1.1CentrothermPECVDCentrothermPECVD40kHzPECVD0.2Ø•••••ØØ125x125mm156x156mmØØ125x125:252Ø156x156:216Ø4:TechnicalDescriptionSystemDescription17.6.20095•125x125:1440/•156x156:1230/Ø•:•:•:ØØ4TechnicalDescriptionSystemDescription17.6.200960.3PECVDFurnaceE2000HT410-4(4)0.3.11()::PECVD::100-600°C:100-550°C::centrotherm(SiC):(PECVD)::PECVD::100-600°C:100-550°C::centrotherm(SiC):(PECVD)::PECVD::100-600°C:100-550°C::centrotherm(SiC):(PECVD)::PECVD::100-600°C:100-550°C::centrotherm(SiC):(PECVD)TechnicalDescriptionSystemDescription17.6.200970.4L0,H0180TechnicalDescriptionSystemDescription17.6.200981()CentrothermCentrothermCentrotherm0,6-2,0Ωcm50Ωcm31.1PECVD–()1.1.1Ø•:70nm•:2.0to2,1Ø40-45min.TechnicalDescriptionSystemDescription17.6.200991.1.2125mmx125mm192P1Ohm*cmØ•±5%•:2,1±0,0551441cmØ•±5%•:2,1±0,055Ø•±5%•:2,1±0,051.1.2.1TechnicalDescriptionSystemDescription17.6.2009102Ø•••••2.1Ø•350-600°C:±1,0°CØ••••2.2ØØ“”.•-CAN-•()Ø(CAN)•(Pt100)•TechnicalDescriptionSystemDescription17.6.2009112.3(CAN)CANØ:••/MFC•Ø••••TechnicalDescriptionSystemDescription17.6.2009122.4410mminoutH2OØ:•••••TechnicalDescriptionSystemDescription17.6.2009132.5CMSCentrothermCMSCMSPCCentrothermCMI2.5.1ؖؖØ-Ø2.5.2ØØ()Ø()TechnicalDescriptionSystemDescription17.6.200914Ø2.5mbarØ5mbarØMFCØØ150mbar150mbarTechnicalDescriptionSystemDescription17.6.2009153CCCCentrothermPECVDCentrothermPECVD3.1CESAR–CESARPCCANCESARTechnicalDescriptionSystemDescription17.6.200916Ø•PASCAL•••••(9)Ø•-10.000-•----••••().•283.2CCC-RM3.2.1ØØØØASCII/CESARØTechnicalDescriptionSystemDescription17.6.2009173.2.2ProtGraf-CESARProtGrafProtGrafØExcelØExcelØ3.2.33.2.4ØØØ3.3CCC-PCCCC(CentrothermCellControl)PCCCC3.3.1CCCTechnicalDescriptionSystemDescription17.6.200918Ø15“TFTØ250GBØDVD/•(1:1).••ØØØWindowsXPØNFS()3.3.2ModemADSLModemCCC3.4USV10PECVD10USV10ØØØ3.5TechnicalDescriptionSystemDescription17.6.2009193.5.1SEMIS2(1999)TechnicalDescriptionSystemDescription17.6.200920Nr./1/;;;21;3//..45/657.8,..TechnicalDescriptionSystemDescription17.6.2009213.5.2a.b.c.d.3.5.33.5.4TechnicalDescriptionSystemDescription17.6.20092244.1REG97Ø(PID)ØØØØ•±0,1°C•±0,1°C•±0,25°C4.25“”.TechnicalDescriptionSystemDescription17.6.2009234.3PIDØØØØØTechnicalDescriptionSystemDescription17.6.2009245TechnicalDescriptionSystemDescription17.6.20092566.1furnacescavengerexternalwaferhandlinghandlingstationliftoperatingpanelboatsliderpowersupplyPECVDCentrotherm:ØØØ6.1.1()oSiCoSiCooSiCoTechnicalDescriptionSystemDescription17.6.200926oo6.2()waferloading/unloadingstationscoolingstationsboattrolleyprocessboatsfurnacescavengerhandlingstationoperatingpanelpowersupplyliftCentrothermØØØ6.2.1PECVD6.2.2()ØØ//6.2.3TechnicalDescriptionSystemDescription17.6.2009276.2.46.3(PECVD)6.3.1(H-LPE-V-150-900)PECVDLSCBlistersPECVD15°1004.76mmTechnicalDescriptionSystemDescription17.6.200928SchematicLoading/UnloadingSchemePos.1Pos.2Pos.3Pos.4Pos.5Pos.6Pos.7WaferSet1WaferSet2PosSet1Pos.11Pos.1Pos.2Pos.2Pos.2TechnicalDescriptionSystemDescription17.6.20092912walkingbeamLSCTechnicalDescriptionSystemDescription17.6.2009306.3.2()(HxLxW):2380x4640x1740mm:1800kg:100x100mm155x155mm:400VAC/50HzCDA:.8barCDA:6bar+/-1barCDA:.480l/min.:8min./168(125x125mm)()6.3.3InputBufferfullLSC'supperStageOutputBufferemptyLSC'slowerStageIntermediatCassetteInputwithlateralAdjustmentTransferPositionofLSC'sRobotSlidingPathofPlasmaBoatLoadingBoxofPlasmaFurnaceInputBufferemptyBlisterPacks,lowerStageOutputBufferfullBlisterPacks,upperStageIntermediateCassetteOutputWalkingBeamSystemlateraladjustmentSwitchBoardTechnicalDescriptionSystemDescription17.6.2009316.3.4PECVDLSCTechnicalDescriptionSystemDescription17.6.20093277.17.2Ø•(CAN)•SiC•Ø•••Ø•Ø••Ø7.3SiCTechnicalDescriptionSystemDescription17.6.2009337.4SiCTechnicalDescriptionSystemDescription17.6.20093488.1()8.1.1PECVD8.28.2.1(PECVD)12mm±0,35mm(1x,1x)TechnicalDescriptionSystemDescription17.6.2009359GVSØ•••ØØ316LØVCRØØØØ3x10-8lmbar/secØ100ØTechnicalDescriptionSystemDescription17.6.2009369.1()()N2()()FI:AV:RV:DR:TechnicalDescriptionSystemDescription17.6.20093710/10.1/10.1.1PECVD–ØØØMFC((DeviceNet),):SiH41,8slmNH310,8slmN215slmØØ:N2ØØ••-:0-10Torr,•--()DN63•DN63•DN63TechnicalDescrip