ITOXXX(,233018):ITO,:ITO;;;:TQ171.73+6:B:1000-2871(2001)02-0053-07ProductionandApplicationofITOTransparentConductiveFilmGlassXUMeiOjun1ITOITO()70(LCD)LCD,:,10-4cm;;;,85%;,85%;,80%;,85%ITO,,,300mm400mm850mm1250mm7,,350mm900mm830mm1500mm,LCD1.1ITOLCDITOLCD,LCDTN-LCDSTN-LCDTFT-LCD,TN-LCD,STN-LCD,TFT-LCD,LCD352001292XXX(1942-),,,,:2000-09-20©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,PDPELD,PDP,ELD,LCDTN-LCD,TN-LCD(),()LCD,LCDLCD80,ITO400m2ITO,150200m2,,,TN-LCD,LCDCRT()STN-LCD,,2STN-LCD,STN-LCD10,LCD1.2ITOITO,,,,,,ITO,,,(ITO)ITO-nipITO-pin,,ITO,ITO,85%,,ITO,,ITO1GHz3050dB(1/1000),,80dm,ITOITO,,,,,,ITO,40%,,ITO,,,ITO60m2,,ITO,,40%,ITO,,21,,ITO2ITO452001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.2.1ITOITO,:ITO(0.41.3mm)ITO,,()()5,ITO,,ITO,,(0.41.3mm),,,SiO2,ITOITO,ITOAr()O2(),,,ITO,Sn/In,ITO,,,InO,ITO2.2ITOITOITO,,1993,180,3m2ITO1994,12m2TD-75019953ITO,40m219961STN-ITO,10m2,,10,150300m2ITO,SDP,199363ARIS2TO1200-6ITO,2.2.1GCS-16,,80,,,TN-LCDSTN-LCD,6080,10m214140.41.1mm,14120.41.1mm,14160.41.1mm,ITOR150/Ö,T85%,25030!NEWARISTO1200-6NEWARISTO1200-6,ITO70():13.2m4.5m,3m,,;ITOV,,ITO,SiO2()SiO2(),ITO552001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,SiO2,ITO,TNSTN,PDPELD,,,,,,,SiO2,ITO,,,,1200-6,RFSiO,ITO,,50%,25%35%,ITO,810-5Pa,,,,PLC,PC,,PCPCTNSTNTFTITO,(ITOSiO2)2.2.2ITO,ITO,:TD-750TD-7501994,,90%ITO,,,ITO:710-4Pa,850mm750mm,1/34min(1414)8(1416)8,300400,1006000mm/min,12m2/,1520!/sTD-750:(),,,()(),,,,,,,ITOTD-7502,SiO2,ITOSV1-680SV1-680()ITOSV1-680:;,SiO2;,10%20%,ITO;4,4;,;PLC,,:2.010-3Pa,ITO141414161418,350,1006000mm/min,12.5/min,,8652001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,DC,RF,DC+Pulse,:TNITO25m2/,STNITO20m2/,100/,,SiO3Al2O3/SV1-680ITO4,TD-750SV1-680,ITO,90,ITO,ITOSJ-1600SJ-1600250,,2500,2.2.3ITOITO,ITO(TN-LCDSTN-LCDTFT-LCD)TNSTNTFT-LCD0.41.3mm,ITOITO90,,500t/d,2mm,,0.41.1mm2mm,()1400TFT-LCD,2001,ITO,2mm0.41.3mm40%,0.41.1mm,100,1200,510,,0.41.1mmITO1996200m2,1997300m2,1998400m2,1999450m2,20002001500m2,LCDITO,,,,3.62000,,ITO2.2.4ITOITO()ITO,752001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,ITO,,,ITOITO,ITO()10t,2,10ITOITO4,,ITO,:ITO,ITO,ITO2000,2001,10t,ITOITO3ITO3.1ITO,(TN-LCDSTN-LCDTFT-LCD),199799.61998169.8,2000LCD60,207,25%,LCD,11(%)1978198819892000LCD()11212838CRT()68574535LED()1111109VFD()6787PDP()3333ELD()11661,LCD()2000LCD850,19983.52005LCD13%LCD(),LCDLCD,LCD80%LCDSTN-LCDTFT-LCDLCD25TFT-LCD,13PDP,PDPCRTPDP,ITO,,21,LCD:LCD1999470,20001274,63.11%,ITOLCDLCD,20,TFT-LCD,3.2LCDLCDLCDSTN-LCDTFT-LCD,TNLCD852001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,TN-LCD,STNTFT-LCD,LCDTN-LCDLCD,LCD50%,LCD30%LCD,ITO300400m2,ITO150200m2,2000ITO400m2,2001500m2,,STN-LCD,120m2,STN-LCDITO,60,,2000,TNSTNTFT-LCD,,ITO[1],.[M].:,1985.[2],.ITO[J].,1995,(6):1-8.[3],.[J].,2000,(1):1-5.[4],.[M].:,1999.952001292©1995-2004TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.