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PROCESSAUDITGUIDELINES制程稽核准则SUGGESTEDCONTENT包含的内容WORKINSTRUCTIONS作业指导书Availableateachprocessstep每个步骤是否被执行WorkInstructionunderrevisioncontrolandatcurrentrevisionlevel作业指导书是否有版本管制及当前版本。Callsoutcurrentproductionpartnumberandrevisionlevel有没有注明产品编号及版本。CallsoutdirectmaterialsP/N,description,usage,anddesignator有无直接罗列所用材料料号，规格，用量，点位。Callsoutoperationmachinename&stationnumber,machineprogramname&revision,fixturesname/partnumber&revision有无机器名称/编号，机器程序名/版本，治具名/编号/版本。Callouttools/gageswithpartnumberorname,indirectmaterialswithdetaileddescription,andtheirworkingconditions有无罗列所用工具及计量器名称或编号，以及用到的间接材料（如胶，锡丝）有无具体说明，包括他们工作条件。Callsoutworkprocess/instructionforthestation每一站有无罗列作业步骤及作业指导。Callouthighlights/specialnotesfortheoperation在作业指导书中有没有对相关注意事项做重点标识。OPERATOR作业员Isoperatorcertifiedforoperation作业员是否有受过相关作业资格培训Ifoperatorisintraining,verifyadequatesupervision在训新员工上线是否有人做足够的监督检查Ongoingprogramforre-certificationofoperators对作业员是否有再认证计划.IsoperationstaffedperWorkInstructions作业指导书是否规定各操作负责人员.IsoperationbeingperformedperWorkInstructions作业指导书上规定的操作是否都被执行.Istheoperatormonitoredforhis/herperformance作业员的绩效是否被考核MATERIALS材料ProductionmaterialsforeachoperationspecifiedinWorkInstructionsandunderAVLcontrol作业指导书是否有罗列出每站所需用到的生产材料,并列入管制.Verifyproductionmaterialsarerevisioncontrolled¤t检查生产材料是否有版本管制及目前版本状况Handling&storageguidelinescalledoutinWorkInstruction作业指导书中是否定义材料处理&存储办法.Compliancewithhandling&storageguidelinesdocumented材料处理&存储办法是否被有效执行Scrapandnonconformingmaterialisisolatedfromnormalproduction废料和不良品是否与良品隔离Materialpreparationoperationsdocumentedandcontrolled备料动作有无文件说明并被控制ControlledbyaneffectiveFIFOsystem是否有一个有效的先进先出的系统,并被执行Verifytraceabilityofmaterials验证材料的可追溯性Selfauditsystemtoensurecorrectmaterialusage有无自检系统以确保材料的正确使用Materialsareclearlymarked/identifiedonlineandstoragearea在产线上及存储区的材料是否有清楚的鉴别标识EQUIPMENT/TOOLING/FIXTURES仪器/工具/治具Calibration校准Preventivemaintenance(PM)recordsandschedules,maintenancelog预防保养履历记录,时间表,保养日志HourlogmaintainedbetweenPM’s,replacement,etc.预防保养，更换等有无做时间记录，按小时数实施Tooling&fixturesidentifiedbypartnumberandrevision工治具编号与版本Operatingprocedureavailableateachoperation是否有对应于每一操作的作业程序Cyclecountmanagement/hourlogfortooling对工具模具有无做周期循环/小时数管理ECO/ECNtracking工程变更单/工程变更通知跟踪Machine&toolcapabilitystudiesperformedandonfile是否完成仪器工具性能研究并保存相关文件ESDCONTROL(IFAPPLICABLE)静电管制(如可适用)Trainingrecordsforallpersonnel对所有相关人员的培训记录Dailytestlogsinplace现场测试日报AllESDsystemsingoodworkingorderandareproperlyinstalledandmaintained所有正常控制的静电系统是否被恰当地安装并保养维护ESDearthgroundrodischeckedforgroundingimpedanceandrecordedonannualbasis是否每年检查ESD接地棒对地阻抗并记录ESDgroundingmainsystemischeckedforgroundingimpedanceandrecordedonmonthlybasis是否每月检测ESD接地系统对地阻抗并记录Instrument/fixtures/benchesarecheckedforgroundingimpedanceandrecordedonweeklybasis是否每周检测并记录仪器设备/治具/椅子等对地阻抗Wrist/heelstrip,and/orconductiveshoesarecheckedandrecordedbyshift是否每班检测并记录静电手环或传导鞋。Wirelesswriststripisnotallowedunlessusedwithionicblowerandconductivefloor无线手环是不被允许的，除非在离子吹风机和传导地板环境中使用AllsemiconductormaterialsareinESDfreecontainer,packageorbinwhen/duringstorage,transfer,andhandling所有半导体材料在存储，运输及搬运中必须用防静电容器，防静电袋等进行静电防护。People,semiconductormaterials,machines,instrument,tools,fixtures,andworkingbenchesatESDsensitiveoperationstationsaregrounded在静电敏感站的人员，半导体材料，机器，工具，治具及工作桌椅必须接地。QUALITYCONTROL品质控制EffectiveSPCinplaceandclosedloopcorrectiveactionistakenwhenout-of-controloccurs现场是否有做有效的SPC管制，当超出管制点时是否做CLCA。Controllimitsofcontrolchartarereviewedonmonthlybasis是否每月审查管制图之上下限EffectiveContinuousImprovementProcess(CIP)inplace现场是否实施有效持续改进过程Qualityacceptance/rejectioncriteriaestablishedforeachprocessstep每段制程是否建立允收/拒收标准Effectivequalityinspectionandmeasurementcapabilityinplaceateachinspectionstation在每一个检验站是否有进行有效的品质检验与测量Evidencethatoperatorsreceivequalityfeedbackandareresponsibleforthequalityoftheirwork是否保证作业员可收到品质反馈并改进他们作业品质。Selfauditsysteminplaceandeffective是否有自我稽核系统并有效实施PRODUCTIONPROCESS/FLOW生产制程/流程Doeslayoutpreventmisroutingofproductandminimizehandling线体设置是否能保证制程顺畅（产品不滞流）以达成最少的人工处理。Evaluatephysicallayoutforproperlinebalanceandpotentialbottlenecks线体规划有无对其平衡及潜在瓶颈进行评估Isflowofdefectiveproductdocumented是否有文件定义不良品的处理流程Islinestopcriteriadocumentedandenforcedtopreventexcessivebuildupofdefectiveproduct是否有文件定义停线标准以强迫防止生产额外不良品Iscustomer’sprocessflowdocumented是否文件化客户制程流程TESTPROCESS测试过程Verifythattestprocessisdocumented检查测试步骤方法是否文件化Istestequipmentandsoftwareunderrevisioncontrol是否有对测试仪器与软件进行版本管制Testyieldanddefectdatacollectionsystemexists,isautomatedandcollectsalldata现有的测试单元及不良数据收集系统是否是自动化以及是否能够收集到所有数据Feedbacktothedefectsourcefromtestyieldsanddefectdataforimprovement测试区域是否能及时反馈不良以加以改善Testprocessandproductionflowpreventstestescapesormisroutingofproduct测试过程以及生产流程是否可以防止测试漏失及保证生产顺畅FAILUREANALYSISPROCESS不良分析过程Isprocessdocumented该制程是否文件化Areproductionmaterialsandrepairmaterialseffectivelycontrolledtopreventmisroutingorwrongpartsbeingused对生产及维修材料进行有效地控制以防止用错料。Arethereproperskills,training,andequipmenttosupportfailureanalysis是否有适当的技巧，培训及设备支持不良分析AgeandquantityofdebugWIPiscontrolled是否对调试工具的使用年限及数量进行控制。Effectivemethodtoprioritizedebugactivities使用有效的方法对调试动作优先顺序进行区分Failu