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©70——50EBSDEBSDEDSEBSD——EBSD——LEOSupra55VPEBSD—HKLChannel5NordlysII—20KV—12nA1NordlysII—IIIEBSDIAlNIICr23C61.IIICHANNEL5EBSD3HKLEBSD©2.1AlN2Cr23C62200nm4AlNCr23C6EBSD(Fe,Cr)(N,C)M7C3(Fe,Cr)7C3(0001)(111)4.EBSD250umAlNCr23C6EBSD(Fe,Cr)7C33.1AlNCr23C650um5.;EBSD(Fe,Cr)7C30.5um80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)83649996HKLEBSD©45HKLDavePriorPaisleySimonCuthbertTonyCarswell4.CHANNEL5Tango/2º3.80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499962.ghhh©(DRAMs)(SRAMs)“”FRAMs“”/FRAMsPZTFRAMFRAMPZTFRAM——EBSD—HKLChannel5NordlysII—30KV—5nA1.PZT2.EBSDCHANNEL5FlamencoEBSD13EBSPs24EBSDPZT11160HKLEBSD©EBSDPZT•8m•100250mEBSDEBSDEBSDPZTHKL4.EBSD4aEBSP1050m4b4c7.5m80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499963.EBSP1021011160©100—EBSD—HKLChannel5NordlysII—30KV—5nA1.1(a)=200m1(b),(3)()HKLEBSD©:1.,[100]-]-2.3(42%)9277.5%3.[100]-[110]-HKL3.3(a)[100]-([100]||-52.5%)-([111]||-23.7%)[110]-([100]||-8.2%)3(b)31.580014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499962.2(a).33(11160),9(11038.9)27(21035.4)2(b)(10)2(c)39272(c)4.[100]-(3a)-[110]-10,34[100]-()-[110]-()10.3m4.8m©EBSD——EBSD—HKLChannel5NordlysII—20KV—5nA11.12CHANNEL5323283133.211.422.63.328.4HKLEBSD©EBSD100EBSDHKLCHANNEL580014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499962.EBSDa=300m(b)300m1033.(a)bcd(a)(b)2EBSD3100100EBSDK-S111fcc||(110)bcc©EBSDEBSD——EBSD—HKLChannel5NordlysII—20kV2.(a)12a(b)2a3a1.abHKLEBSD©3.(a2EBSD45º3abcxyba)3a{100}c3a3b2-142-143b{100}{100}3a{100}0104.235(a)(b)(a)(b)(c)HKLEBSD©(a)(b)5.4EBSDa282105a)bcXYb5a{111}c2-14{111}5b65d(a)(b)(c)(d)HKLEBSD©EBSDHKLStevenReddyCurtinRobHoughCSIRO80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499966.123(a)(b)©EBSDODFs1800127756045012077560380011.7/s70010/s4504501048006045012080060—EBSD—HKLChannel5NordlysII—25KV—10nA1.11a1bHKLEBSD©EBSDEBSD-30--.14HKLBasicMetalProcessingInstitute3.-3120-54.1-80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499962.2-110-111ODF4.24a-10245{112}110{111}1104b-54.7245--2530©EBSD55EBSDEBSDFIB()EBSDFIB5-30keVpAnAFIBNi0.3um3/nC15um8um30kv3nA25200nmEBSDEBSDEBSD3DEBSDFIBEBSD5mmEBSD7012EBSD201.3D-EBSDFIB/FEG-SEMEBSDHKLEBSD©-EBSD200HKLFEIJ.J.L.Mulders80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499962EBSD3141517-1911160sigma3CSL3“”XYZ{111}EBSD2.1umEBSD51*32*2420nm3.210-3umum201850.10.89266.241.3,28.01718.90.901.4,25.4,84.71526.90.93265.2,39.9,28.31217.80.62358.4,25.6,87.7195.30.25264.8,40.9,28.535©EBSDYBCOa-b-c-1004.2kTcTc23kTc38k138k,YBa2Cu3O7YBCOTc92k1YBCOabc,abc/3EBSPYBCOc35ºcYBCOabcabbcYBCOa=b1.EBSDEBSDbcabc+SEMFEG-SEMEBSDHKLCHANNEL5,Nordlys20KV~2nAHKLEBSD©1EBSPEBSPEBSPbcEBSPEBSPEBSPbc34Nordlys4*4bining0.2310nm2ABBBSP2.FSD3.EBSDaLaAlO3,2caABABHKLEBSD©b)EBSDEBSDabcNordlysCHANNEL55.EBSD4.CHANNEL5bc5EBSDcbcaHKLEBSD©EBSPHKLCHANNEL5EBSDYBCOacabHKLForschungszentrumKarlsruheIFPThomasWolfYBCOTelavivZahavaBarkayNoamEliazGuyLeibovitchGuyDeutscherBernhardObst80014F:200001:(021)61329686/8:(021)63608535183714100005(010)65188160/1/2ext16(010)65188155150129201109(021)54462035:(021)649040421932112:510030:(020)83649990/1:(020)836499966.YBCOEBSD(001)1-10(010)-301(001)1106YBCOEBSP6HKLCHANNEL5EBSDacabab2%6bccb3©EBSDEBSDEBSDEBSD1nANordlys500nm——LEOSupra55VPEBSD—HKLChannel5NordlysII—20kV—1nA—5mm1.1031116020nm1078.6%5HKLEBSD©10100nmEBSDEBSDHKLFraunhofer-institutWerkstoffmechanik,InstitutsteilHalleJ.SchischkaF.Altmann80014F:200001:(021)61329686/8:(021)63