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:1999206221;:1999210225:025322239(2001)0120064204(,230027):,,,2,,:;;;2;:O43613:A,,[1],33[(PZT)],[2],(Ronchi),,,,[3,4],;[5][2],,11,Ex=aej1Ey=bej2,2-1=,1/4x/4,x1/4ExEy,1/4121ii1cos2sin(2)/2sin(2)/2sin2,ExEy=cos2sin(2)/2sin(2)/2sin2121ii1ExEy,(1)I(x,y)=a2(x,y)+b2(x,y)-2a(x,y)b(x,y)sin[(x,y)-2].(2),0/4/23/4,I1=(a2+b2)-2absin(1=0),I2=(a2+b2)+2abcos(2=/4),I3=(a2+b2)+2absin(2=/2),I4=(a2+b2)-2abcos(2=3/4),=arctan[(I3-I1)/(I2-I4)].(3)Fig.1Thepolarizationphaseshiftingmethod2,Ei(x,y),E0(x,y)=Ei(x,y)t(x,y),t(x,y)(2),21120011ACTAOPTICASINICAVol.21,No.1January,2001©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(x)=exp[jk(n0h+n0h0)]np-p4xnp+p4,exp[jk(h+n0h0)]np+p4xnp+3p4,(4)n0,p,k,nt(x),,E0(x,y)=+m=-amEi(x,y)ej2mx/p,(5)amt(x),am=12[ejk(n0-1)h+1]ejk(h+n0h0)m=0,sin(m/2)m[ejk(n0-1)h-1]ejk(h+n0h0)m0.(6)Fig.2TheRonchiphasegrating(5)(6),,hejk(n0-1)h=-1,am=0m=2q,-2ejk(h+n0h)/mm=4q+1,2ejk(h+n0h)/mm=4q-1,(7)q(7):1)0;2):I1I3I5=119125;(8)3)80%,4,64%,[6]323,,,,1/44(P1P4),x0/4/23/444,1,2CCDCCDCCD4,(3),2mm,3mm4(a)4(c)3,44,4CCD4(d)4(f)4,,Fig.3AnopticalschematicofaMach2Zehnderinterferometerwithpolarizationphaseshifting561:©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.=Ii-I0i(i=1,2,3,4),Fi,,Fi=I0[1+cos(+i)](i=1,2,3,4),(9),i)/23/2,=arctan[(F4-F2)/(F1-F3)],(10),6(a),6(b),6(c),6(c)Fig.5Anopticalschematicofaspeckleinterferometerwithpolarizationphaseshifting6621©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.[3],4,,4,,[1]BruningJH,HerriottDR,GallagherJEetal..Digitalwavefrontmeasuringinterferometerfortestingopticalsurfacesandlenses.Appl.Opt.,1974,13(11):26932703[2],,..(),1998.445448[3]vanHaasterenAJP,FrankenaHJ.Real2timedisplacementmeasurementusingamulticameraphase2steppingspeckleinterferometer.Appl.Opt.,1994,33(19):41374142[4]WeijersAL,vanBrugH,FrankenaHJ.Realtimedeformationmeasurementusingatransportableshearoghaphysystem.Proc.SPIE,1996,2921:7681[5]KranzJ,LamprechtJ,HettwerAetal..Fiberopticalsingleframespeckleinterferometerformeasuringindustrialsurface.Proc.SPIE,1998,3407:328331[6],,1Ronchi.,1995,12(2):146149AReal2TimePolarizationPhaseShiftingTechniqueforDynamicMeasurementQianKemaoMiaoHongWuXiaoping(DepartmentofMeachanicsandMechanicalEngineering,UniversityofScienceandTechnologyofChina,Hefei230027)(Received21June1999;revised25October1999)Abstract:ByusingaspecialRonchiphasegratingandpolarizationphaseshiftingmethod,fourphaseshiftedpatternscanbecapturedsimultaneously,andthusthedynamicphenomenacanbemeasured.ThistechniqueisusedinaMach2Zehnderinterferometerandaspeckleinterferometer,therefractiveindexchangesandtheoff2planedisplacementsaremeasuredrespectively,theexperimentalresultsaregiven.Keywrods:dynamicphenomenameasurement;polarizationphaseshifting;Ronchiphasegrating;Mach2Zehnderinterferometry;speckleinterferometry761:©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.