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1X2XXX-ray3XXWDSEDSTEMSEM4¾XEEEh∆=−=ν5XMoseley19132)()(bZcbZa−=−=λνabc6¾σjX)2.1ln(004jjjjjIEIEbZeπσ=7“”X0110±=∆±=∆≠∆jlnn=1,2,3,4,···,nl=0,1,···,(n-1)21±=lj08Kn=1n=2LKαKα1Kα2Kα3Mn=3KKβKβ1∼Kβ5L1KL2L3M1M2M3M4M5Kβ4Kβ5Kβ3Kβ2Kβ1Kα2Kα3Kα1n=1n=2n=39X9ZKL1050100ZMZKXZKLZKLMXKZ≥30LZ62M109XXX1keVXZXZ≥11Z1980XBNZ≥5119ZZZ22100ppm10Z221000ppm5Z1010000ppm1%9FWHMXFWHMFWHM12¾1∼30µm35∼30keV1∼5µm10-15g13Z≥11NaBNXX14¾XXX(WavelengthDispersionSpectroscopy)(EnergyDispersionSpectroscopy)15¾XXArArhνXAre’-h·eArArh+⎯→⎯+νhν16XhνAr+-e’XArAr+-e’XX17XArFWHMFWHM100200300400Ar+-e’hνCuKαFeKα∆λFWHM18¾19¾MoseleyλνZXσjX2)()(bZcbZa−=−=λν)2.1ln(004jjjjjIEIEbZeπσ=20σj21AAACAAAAAGAAspIAstIAstAspAAIIKC==AAstAspAGKIIGC==229θEpZ9σZZ9ZAFZAFEpZe2=θρσρµρµ+=µ23¾ZAFAAdxxABθeX-rayAAdI'AAdIAxdxAXθ:AAdIABAAdI'])(exp[)exp('ABdIABdIdIAAAAAAAAρρµµ•−•=−•=θθcscsin/xxAB==24ρρxmassthicknessL.S.Birks“”“”ϕ(ρx)ϕ(ρx)ρxAXXd(ρx)AX)](exp[]csc)()(exp['xXdIxdIdIAAAAAAAAAρθρρµ•−•=••−•=θρµcsc)(•=AAAXAAdIAAdI)()(xdxdIAAρρϕ•=AAdI)()](exp[)('xdxXxdIAAAρρρϕ••−•=25AXAXFA(XA)ϕ(ρx)“”“F”XA=0XXXfA(XA)AAI')()()](exp[)('0AAAAAXFxdxXxI=••−•=∫∞ρρρϕ0)(=AAρµ)0()()(0AAAFxdxI=•=∫∞ρρϕ)()0()('AAAAAAAAAXfFXFII==26AnCAAXXnAdI'nAdI)()()](exp[)('0nAnAnAAnAXFCxdxXxCI=••−•=∫∞ρρρϕ)0()()(0nAAnAFCxdxCI=•=∫∞ρρϕ)()0()('nAnnnAnnAnAXfFXFII==27AA)0()()0()()()(''AAAnnAnAAAnAnAAAnAAFXfFXfCXFXFCIIK•••===)0()0()()()0()()0()(nAnAnAAAnnAnAAAAAFFXfXfKFXfFXfKC••=•••=FFϕ(ρx)AABnAnAAAAKGXfXfKC=•=)()()(AAXf)(nAnXfρµGAB28ZE(T)E(R)E(A)E0999AZZ29aE0EEKEKKaAKKXEEKKKXabxE0nACAσKKad(ρx)dnK’σKdxdxMNCdnAKAK•••=ρσ0'N0ρMAA30aAKanK’Sn=-dE/d(ρx)SnAσKSnnK’∫∫∞∞•=•••=0000')(xdMNCdxMNCnKAAAKAKρσρσ∫•=KEEKAAKEdxddEMNCn0)()(0'ρσ∫•=00'EEnKAAKKdESMNCnσ31abAKXZE01RnRn1RnPnZE0nnAAEEnKnAAKPRMNCdESRMNCnK••=••=∫00'0σ∫•=0EEnKnKdESPσ32AAKXnK’nKGZRPGZAAAEEAKAAKPRMNdESRMNnK••=••=∫000σnAIAAI'KnAnI∝KAAnI∝)/()(00'AAAnnAAKKAAnAAPRMNPRMNCnnIIK••••===AnAnAAPPRRCK••=AAnAZnAnAAAnAnAnAAAIIGPPRRIIPPRRKC•=••=••=nAnAZPPRRG•=Z33FX9AX9XAKX9XAKXnAIprnIsenIflnIflnsenprnnAIIII++=34XγseIflIprIprseseII=γprflflII=γ1==prprprIIγ)1(flnsenprnnAIIγγ++=)1(flAseAprAAAIIγγ++=flAseAflnsenAflAseAflnsenprAprnAAnAACIIIIKγγγγγγγγ++++•=++++•==111135AXKXGFXXGFAFflnsenflAseAAAKGKC•=++++•=γγγγ110=flAγflnsenseAFGγγγ+++=11GFflnFGγ+=1136GFZABGGGG••=AFZABAKGGGC•••=37XKXMoseleyKαXELEK2)()(bZcbZa−=−=λνKLEEh−=ν38WDSEDS¾MLLK¾¾FWHM39ElectronProbeMicroanalysisEPMAXWavelength-DispersiveSpectrometersWDSXEnergy-DispersiveSpectrometersEDSSX50ElectronMicroprobe40EPMASEMTEMJEOLJXA-8900ElectronMicroprobeEquippedwithBothEnergyDispersiveSpectroscopy(EDS)andWavelengthDispersiveSpectroscopy(WDS)41¾42¾XYZ¾¾¾43¾XY¾44WDS45¾XBraggλXθdnXXWDSθλsin2dn=46¾XXMaxvonLaue(1879-1960)XMaxvonLaue1912UniversityofMunichVonLaue1914Nobel47MaxvonLaueBraggBraggX1913XNaClXBragg1915NobelWilliamHenryBragg(1862-1942)WilliamLawrenceBragg(1890-1971)48d(hkl)R=2rr=R/2hklRR=2rrr=R/2XRowland49XhklF∠θ1=∠θ2SO=OFSM=MFMSFOθ1θ2O’rLθRowland50xBraggMSFOθ1θ2O’rLθxSM=MF=Lθθπsin2)2cos(2•=−•==rrLSMrSMrL22sin==θθλsin2•=drLd22=λ51XλSM∆λλKLrdL•=•=λKRowlandLK∆•=∆λ52RowlandLXS999SFOLM53XX54X¾hνXhνXEjhνXnhνEnergyDispersionSpectroscopy,EDSjEhnν=55∼10-8sec∼103V/cmp-npnBpnAp-nnppnAp-np-nnppnpn56¾SiLiSiLiSiLiLiSi0.033eVLi0.033eVKBT=0.025eVLi++e-LiBLi+0.68ÅSia=5.2ÅLi+“”Si“”SiLi57SiB“p”LiBILiILinLipIpn-500VAuXLiSiSiLi“”“”SiLiSi3∼5cmI58SiLi59XX“”PulseHeightAnalyzersXE=hνEjjjjEhEEQν==∆60IICQCIE=Q/CtEhtQIj∆=∆∆=νhνλEUELEUEL61Analog-to-digitalconversionCCEhνT0n20eVX0∼20.48KeV20480/20=1024Xhνλ0/TTn=νhn∝)(νhEET∝∝62XEDSWDS0.2%EDS2%WDSWDS~2µmEDS~50Å(0.05µm)WDS~5eVEDS~150eVWDSEDS63645µm3¾µm65⎯“”G“”“”“”+“”“”πσ2/Gm=66Ni80Cr20AlTi“”Ni80Cr20AlTiNi3AlNi3AlCrCrAlTiNi3Al67Al2O3“”“”681000OC1000OC99%Al2O3400nmAl2O369Al2O3MgOMgO+Y2O3MgOAl2O3MgO+Al2O3→MgAl2O4SEM7071OH—PtPtPt722SrO•3Al2O3:Eu2+Eu2+73SrOAl2O3SrO•Al2O31:14SrO•7Al2O34:7SrO•6Al2O31:6Al/Sr--2SrO•3Al2O3:Eu2+460nm2:3XRD1:14:71:125%4:775%74SEMEDSAAl67.12%at%Sr32.88%Al2O3/SrO=1.021:1BAl76.86%at%Sr23.14%Al2O3/SrO=1.664:71:1510.2nm4:7488nm450500550λ(nm)I1:14:72SrO•3Al2O3:Eu2+4:71:175¾µm76EPMACT77ZnZn1+XOZnOnZn1+XOZnEPMAZnOOZn⇔+221ZnOeOZneZngZnii⇔+++⇔••'21')(2Zn78ZnZnO∆C∆µO2ZnOOZn⇔+221Zn/(O2)ZnOO2ZnO/(O2)ZnOZnO/ZnZnO/ZnZnO∆µ∆C∆µ∆CZnO79')(eZngZni+⇔•ZnOeOZni⇔++•'212ZnZnOO2C(Zni·)ZnOZnO/ZnZnOZnO/(O2)ZnO/(O2)ZnOZnO•iZnZnOeOZni⇔++•'212•iZn8081FickFick22xCDtC∂∂=∂∂82FickZEPMASEMC(x,t)xDTDEB)2(0),(DtxerfCCtx=)()2(ZerfDtxerf=)exp(0RTEDD−=83FickQxx=0C=CmaxtDtxtxeDtQC4/),(22−=πDtxe4/2−14/2=−Dtxett84Na2O-CaO-Al2O3-SiO2K+(Na+)TgK+)/()(423SOKKNOKglassNagT++⎯→←85K+σεαβtCK+K+tCt∂∂+−=∂∂βαεσ8650∼60µmK+TgK+R2O-Al2O3-SiO2R2O/Al2O3≈1DD8770SiO22Al2O316B2O312Na2OAgBrSiO2B2O3AgBrB2O3Ag+Br-AgBrAgAgAgBrh⎯⎯⎯→⎯⎯⎯⎯→⎯⎯⎯→⎯ν88Ag-Br9Br-Ag+9Ag+Ag+Ag+9Br-Ag+Br-Ag+891966GoldstenABTABCAαβα+βABT1T2CACBCBT1T290¾B→B2O3→BNBB2O3B3+XB→B3+Kα3eVBNBBB3+BB2O3B2O3BNB6570753eVBKα91Cu→CuO→Cu2OCuOCuCu2OCuCuOCu2O92A/BABCKαA/B[⎯CH2-CH2⎯]n1.224[⎯CH2-CHCl⎯]n0.979[⎯CH2-CCl2⎯]n0.833[⎯CF2-CHF⎯]n0.643[⎯CF2-CF2⎯]n0.565χHχClχFA/B93Fe2O3FeOFe3O4Fe2O3Fe3O4FeO94Fe2O3Fe3O4FeOFeFeLαFeLβO/Fe()FeLβ/FeLαFe00.123FeO10.541Fe3O41.330.451Fe2O31.50.36695