五、先进制造与自动化技术领域

100100nm8nm8130130--100100nmnm6614714713513566103103545499454577100100nm8nm8ICIC5560604040350035005516001600mmmmX/Y/ZX/Y/Z2200/400/4002200/400/400mmmm1515m/minm/min1000010000r/minr/minEPAEPA————zzEPAEPAIECIECIEC61784IEC61784--22zzEPAEPAzz68068016164004006.36.3::::11CADCAD22ERPERP3344MESMES5566ASPASP11CADCAD22ERPERPERPPDMCRMPDMERPSCMCRMSCMERPERPERPCRM““””3344MESMESMESMES50005000MESMES41%41%55202022863ASP700066ASPASP112233445566114.54.51.61.61.21.2mm1000010000//0.010.01mmmm222000200040004000mmmm1000010000rpmrpm0.0450.045mmmm0.0150.015mmmm331.551.556363323210KV220KV44B55••••66200420044418187.97.9kmkm10101919101077MEMSMEMS11MEMSMEMS————MEMSMEMS22MEMSMEMS————MEMSMEMSMEMSMEMS33MEMSMEMS————MEMSMEMS44MEMSMEMS————MEMSMEMSDBMSDBMS••••••••••11““””661122““””