【工程方案】基于人工神经网络的SPM自动标定

33120071OPTICALTECHNIQUEVol.33No.1Jan.2007:100221582(2007)0120031203SPMX,,,(,200072):,,,x,y,x-y7.2%2.44%:;;;:TH822;TN16:AAutomaticcalibrationofSPMscanimagebyartificialneuralnetworkZHOUBing,SUNXin,HUANGMin-rui,WANGFeng(SchoolofMechatronicsEngineeringandAutomation,ShanghaiUniversity,Shanghai200072,China)Abstract:AimingatbigdiscrepancybetweenSPMscanimagedisplaysizeanditsactualsize,anautomaticcalibrationmethodbasedondigitalimageprocessingandartificialneuralnetworkwasproposed.Thecharacteristicmatrixofstandardgrat2ingwasobtainedbydigitalimageprocessing,characteristicmatrixandactualmatrixweretrainedbyartificialneuralnetworktopredictvoltageswhichappliedtoxandyaxisofthescanner.Theexperimentofcalibrationofanatomforcemicroscope(AFM)showsthatx-yplanedistortiondegreedecreasefrom7.2%to2.44%.Keywords:SPM;ANN;SPM;calibration;digitalimageprocessing0(ScanningProbeMicroscope,SPM)(ScanningTunnelingMicroscope,STM),,,SPM:()(Scan,ScanWL,:(|ScanWL-Scan|/Scan)100%[1],,(),SPM1SPM,SPM,,DI,SPMSPM[2],,HOPG,,,SPM,,,,VB6.013X:2005209227;:2005211207E2mail:[e-mail]:(0452nm074):(1979-),,,,©1994-2007ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.,SPM,SPM,AJ-ISTMAJ-IIISPM500nm,,,2SPM,,,,,,,SPM,,,,,,,SPM,,,,(backpropaga2tion),BP,,BP[3],1,Q,q(q=1,2,,Q)nq,qiw(q)ij(i=1,2,,nq;j=1,2,,nq-1)s(q)i=nq-1j=0(q)ijx(q-1)j(1)(x(q-1)0=(q)i,(q)i0=-1)xqi=f(s(q)i)=11+e-s(q)i(2)i=1,2,,nq;j=1,2,,nq-1;q=1,2,,QPx(0)p=[x(0)p1x(0)p2x(0)p3]Tdp=[dp1dp2dp,nq]T(p=1,2,,P)BP,,BP,,BP,E=12pp=1nQi=1(dpi-x(Q)pi)2=Pp=1Ep(3)Ep=12nQi=1(dpi-xQpi)2(4)E,,,BP3,500nm,(1000nm8000nm),40,,,6000nm,,14BP2333©1994-2007ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:nm,x0nm,y0nm,0,2.0Hz,256(500nm),a=arctan0.5,,:=(x)cosa,=(y)cosa,,()yj,SPM,()xi-,,,()SPM,Scan()ScanWL,=Scan/ScanWL[1],SPM=1:,3000nm,3000nm3000nm(,xy);,7.5,500nm,7.5500nm=3.75m;,1,;,,2(3000nm,x160V,y150V);,3000nm29903010nm(x,y)25AJIII,40BP,,20,5000,a=0.3,=0.1533,BPSPM,x-y7.2%2.44%,SPM,,,,,(1h)SPM,,,3:[1],[D].,2004.110.[2],,,SPM[J].,2001,7(3):202206.[3],.[J].:,1992.165.331,:SPM©1994-2007ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.