超声技术的基石-超声换能器的原理及设计-林书玉

　·38(2009)3　　　　　　　　　　　　　http:———＊林书玉(　　710062)　　　,,.,,.,,,.　　,,,,,Foundationsofultrasonictechnology———thetheoryanddesignofultrasonictransducersLINShu-Yu(CollegeofPhysicsandInformationTechnology,ShaanxiNormalUniversity,Xi′an710062,China)Abstract　　Ultrasonictransducersconvertelectricsignalsintoacousticsignalsintheultrasonicfrequencyrange,orviceversa.Theyarekeydevicesinultrasonictechnologyandtheirperformancedeterminestheeffectivenessandusesofultrasonictechnology.Becauseoftheirdiverseapplications,therearemanytypesofultrasonictransduc-ers.Inthispaper,varioustransducersfordifferentapplicationsaredescribed,andtheirtheory,designandper-formancerequirementsareanalyzed.Theircharacterizationisalsooutlined,anddevelopmenttrendsareanalyzed.Keywords　　ultrasonictransducers,powertransducers,detectiontransducers,electro-acousticalefficiency,sensitivity,powercapacity＊　(:10674090)(:20050718003)2008-09-11　Email:[e-mail]1　概述1.1　20.,、、、、、、.,,,、、.、、、..,.、.、,、、、,、、、.·141·http:　　　　　　　　　　　　　　　　　　·38(2009)3,,.1.2　.,、、()、、.,()、、、、--.,、.,、.,、、、.,、、、.,,、、、.1.3　,.、、、、、、、、.,,,;,.,,,.1.4　、,,.、、,--,,.,.(),,().,,,、.,.,;,,,;,..,,.,,ANSYS.、、-,、.ANSYS,.,,、,.2　功率超声换能器,,、[1—9]..,,.,.·142·　·38(2009)3　　　　　　　　　　　　　http:().(),,.,0.3351.5—2.5W/cm2.(),.,,.、、、、、、、、.、,(1),.1　.,,(2).,,、、--..,,,.,ANSYS,,,.,(20kHz),(),.,.,..2　,.,(PMN-PTPZN-PT),(),.,,.,,,,,.(3).、、、.,,,.·143·http:　　　　　　　　　　　　　　　　　　·38(2009)3,.,.3　3　检测超声换能器.,,.、.,.4.4　.,,.:,、;、、;;;、、、;、、.、、.、、、、、、.,、..,.,,.,,.,,.、.,(、、)(、、),,().,,..,,,,,,.,..(),.,.、,,,,.,,·144·　·38(2009)3　　　　　　　　　　　　　http:、,,.,,,、.4　超声换能器的性能测试,,[10—15].:,,、,,;,,.,,.,,.,,.,,,,.,,.,,,,,,,,.70..,,.,,,.,,.,.,..,,.:(,、)().,、;,;.,,,,,,,,,.,,.(5).,,,10%.,,.5　新型超声换能器5.1　[16,17]Frei———(Tuberesonators),6(a).,.,·145·http:　　　　　　　　　　　　　　　　　　·38(2009)35　.,,,.,Walter,,,(Push-Pulltransducers),6(b),6(a),,,.,;,,.,TELSONIC、CREST,20kHz、25kHz、30kHz、40kHz,2000W,1.5m..6　5.2　[18—22],.,,.,,:(1);(2);(3);(4);(5),,7.7　5.3　[23—28]()(8),,500W,75%.1m.、.5.4　[29—32],·146·　·38(2009)3　　　　　　　　　　　　　http:　.-(9);-;-、--.,,:、,,.9　,、、.,,,.,,[33—35],R-LL-L.10,(R-L),,(L),.10　R-L6　结语.,.,.,.、、.,,、、,.,·147·http:　　　　　　　　　　　　　　　　　　·38(2009)3,--,.,.,、.,,.,,,,.[1]　..:,1999[FengRetal.UltrasonicsHandBook.Nanjing:NanjingUniversityPress,1999(inChinese)][2]　..:,1984[ZhouFH.UnderwaterSoundTransducersandArrays.Beijing:NationalDefenseIndustryPress,1984(inChinese)][3]　..:,1984[ChenGS.DesignofUltrasonicTransducers.Beijing:OceanPress,1984(inChinese)][4]　,,..:,1990[LuanGD,ZhangJD,WangRQ.Piezoe-lectricTransducersandArrays.Beijing:PekingUniversityPress,1990(inChinese)][5]　..:,1993[YingCF.Ultrason-ics.Beijing:SciencePress,1993(inChinese)][6]　..:,2004[LinSY.TheoryandDesignofUltrasonicTransducers.Bei-jing:SciencePress,2004(inChinese)][7]　MasonWP.PhysicalAcoustics:Principlesandmethods,Vol-ume1,PartA.NewYorkandLondon:AcedamicPress,1964[8]　RozenbergLD.SourcesofHigh-intensityUltrasound.NewYork:PlenumPress,1969[9]　MattiatOE.UltrasonicTransducerMaterials.NewYorkandLondon:PlenumPress,1971[10]　MoriE,ItoK.Measurementoftheacousticaloutputpoweroful-trasonichighpowertransducerusingelectricalhighfrequencywattmeter.In:Proc.Ultras.Inter.Brightton,1981,307[11]　LinSY,ZhangFC.Ultrasonics,2000,37:549[12]　.,2000,19:31[LinSY.AppliedAcoustics,2000,19:31(inChinese)][13]　,,.,2004,23:61[LiangZF,ZhouGP,LinSY.TechnicalAcoustics,2004,23:61(inChi-nese)][14]　.,1992,21:234[LinSY.Wuli(Physics),1992,21:234(inChinese)][15]　,,.,1990,9:29[LinSY,ZhangFC,ZhouGPetal.ApplicalAcoustics,1990,9:29(inChinese)][16]　,,.,2007,52:626[ZhouGP,LiangZF,LiZZetal.ChineseScienceBulletin,2007,52:626(inChinese)][17]　,.,2006,22:25[LiangZF,ZhouGP.Clean,2006,22:25(inChinese)][18]　,,.,1994,13:164[LinSY,ZhangFC,GuoXW.TechnicalAcoustics,1994,13:164(inChinese)][19]　LinSY.Ultrasonics,1995,33:445[20]　.,1995,1:9[LinSY.AcousticsandElectronicsEngineering,1995,1:9(inChinese)][21]　.,1995,17:19[LinSY.PiezoelectriceAcoustooptics,1995,17:19(inChinese)][22]　,,.,2004,32:47[HeT,LinSY,LiangZF.JournalofShanxiNormalUnversity,2004,32:47(inChinese)][23]　Gallego-JuarezJA,Rodrlguez-CorralGetal.Ultrasonics,2000,38:331[24]　Gallego-JuarezJA,Rodrlguez-CorralGetal.Ultrasonics,1978,16:267[25]　Gallego-JuarezJA,Rodrlguez-CorralGetal.USPatentNo.5299175,1994[26]　SarabiaERF,Gallego-JuarezJAetal.Ultrasonics,2000,38:642[27]　MonteroF,Gallego-JuarezJA.Ultrasonics,1986,24:100[28]　Gallego-JuarezJA,Rodrlguez-CorralGetal.Ultrasonics,2002,40:889[29]　LinSY.Ultrasonics,2006,44:109[30]　LinSY.Compositemodeultrasonictransducers.Xi′an:ShaanxiNormalUniversityPress,2003[31]　LinSY.J.Acoust.Soc.Am.,2002,112:511[32]　LinSY.Acustica,2000,86:992[33]　TsujinoJ,UeokaT.Ultrasonics,2004,42:93[34]　TsujinoJ,UeokaTetal.Ultrasonics,2000,38:67[35]　,.:,1985[LinZM,TheoryandDesignofUltrasenicHorns.Beijing:Sci-encePress,1985(inChinese)]·148·