现代超精密加工技术的概况及应用

2005(1)::TH16;TG66:A:16713133(2005)01012103GeneralsituationandapplicationofultraprecisemachiningtechniqueZhouZhibin,XiaoShali,ZhouYan,WangKeAbstractDiscussedthedevelopment,statusandapplicationinthecorrelativefieldofthemodernultraprecisemachiningtech2niqueundersummingupamassofdomesticandforeigndata.Ithasalsodiscussedthemachiningmechanicsandthepossiblema2chiningequipmentsandtheerrorcompensationtechniqueabouttheultraprecisemachiningtechnique.Keywords:UltraprecisemachiningPrecisionMachinetoolNanometer011m,Ra01101025m,0101m,,:,,,,1,,,Nano,NION(NationalInitiativeonNanotechnology),ERATO(ExploratoryResearchforAdvancedTechnology),2080,,,,(LargeOpticsDiamondTurningMa2chine,LODTM),1163m,28nm,,1m25nm,,2080,,01025mJCS-027JCS-031JCS-035NAM-800,Z28-75,,1..:,19842..:,2001:,,:(213011):[phone]:20040603121©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.2005(1),RankPneumoMSG325CNC,,,,(),,,;;2211,:,11()();();;;;;()();;;;()();();,;;,,,,,,,,,,,:212,,,,(2);,,,;,3,LLNLDTM3LODTMCranfieldOAGM2500LODTM(theLargeOpticsDiamondTurningMachine),KeckF/252100mm4500kg1625mm1360kg,;221©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.2005(1)2ML10Gold::01001m:40m(80m):017ppm:60m/min:0105ppmDIDektak8::1!/65k!(),,AJ-I(STM)::XY3m3m3:XY1!:10nm,011m;,XGASP::055MPa:0134MPa,,CNC,;,DC,;,(2001005),,,01025pm,,PERL-DTM-233/mnmP2V()!rms()33PERL-DTM-2LODTMDTM-3DTM-430.150.10.500.51.650.52.301.00.300.31005001006001002530050250503DTM-4,233rms(rootmeanssquare),rms,Ra()NAM-800PC,,,,800mm(4),4NAM-80030nm501500r/min0.15m/200mm(XZ)400mm400mm215nm5nm800mm400mm0.2m/400mm;0.1m/100mm()Ra25nm10nm1..,1995,(1)2,..,1997,(1)3.21.,2003,24PhilippeLAHAYE.UsingaDesignofExperimentMethodtoIm2proveKDPCrystalsMachiningProces.SPIE,1999,3492:(400044):20040913321©1995-2005TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.