搜索
硅片平整度知识讨论IQC2006-4-20硅片平整度知识讨论主要内容如下：1、硅片平整度定义；2、硅片平整度测量；3、硅片平整度规范4、硅片使用中异常举例平整度SEMI标准关键字注释习惯用语SEMI标准用语新SEMI标准关键字注释TTVGBIRGlobalflatnessbackidealrangeTIRGFLRGlobalflatnessfrontleast-squaresrangeSTIRSFQRSiteflatnessfrontleast-squaresrangeLTVSBIRSiteflatnessbackidealrangeFPDGFLDGF3DGlobalflatnessfrontleast-squaresdeviationGlobalflatnessfront3pointdeviationTTV(TotalThicknessVariation)定义：TTV=a–b(SEMI标准中为GBIR)说明：1.参考平面B为Wafer背面TIR(TotalIndicatorReading)定义：TIR=|a|+|b|(SEMI标准中为GFLR)说明：1.参考平面(bf)G为距上表面所有点截距之和最小的平面；FPD(FocalPlaneDeviation)定义：FPD=±Max(|a|,|b|)(SEMI标准中为GFLD)说明：1.如果|a||b|，则FPD取正值；反之取负值；2.参考平面G(bf)为距Wafer上表面所有点截距之和最小的平面；Warp定义：Warp=|a|+|b|说明：1.参考平面M为距曲面Medianplane所有点截距之和最小的平面；2.不考虑重力影响；Bow定义：Bow=1/2*(b-f)说明：1.参考平面W以Wafer上三点确定，此三点组成一等边三角形2.凸的WaferBow值为正，凹的WaferBow值为负；3mm120°120°LTV(LocalThicknessVariation)定义：LTVi=ai–bii=1,2,3,4,...,n(SEMI标准中为SBIR)说明：1.参考平面B为Wafer背面；2.LTVmax=Max(LTV1,LTV2,...,LTVn)STIR(SiteTotalIndicatorReading)定义：STIRi=|ai|+|bi|i=1,2,3,4,...,n(SEMI标准中为SFLR)说明：1.参考平面Gi通过每一单元块的中心且平行于wafer上表面的拟合平面bfG；2.G为距单元块上每一点截距最小的平面；3.STIRmax=Max(STIR1,STIR2,...,STIRn)；STIR/L-Site(SiteTotalIndicatorReading)定义：STIRi/L=|ai|+|bi|i=1,2,3,4,...,n(SEMI标准中为SFQR)说明：1.参考平面bfGi为距单元块上每一点截距最小的平面；2.STIRi/Lmax=Max(STIR1/L,STIR2/L,...,STIRn/L)；SFPD/L-Site定义：SFPDi/L=±Max(|ai|,|bi|)i=1,2,3,4,...,n(SEMI标准中为SFQD)说明：1.|a||b|,取正值；|a||b|,取负值；2.参考平面bfLi为距单元块上每一点截距最小的平面；3.SFPD/Lmax=Max(SFPD1/L,SFPD2/L,...,SFPDn/L)SFPD/G-Site定义：SFPDi/G=±Max(|ai|,|bi|)i=1,2,3,4,...,n(SEMI标准中为SFLD)说明：1.|a||b|,取正值；|a||b|,取负值；2.参考平面Gi通过每一单元块的中心且平行于wafer上表面的拟合平面bfG；3.SFPD/Gmax=Max(SFPD1/G,SFPD2/G,...,SFPDn/G)SEMIStandardFQAMeasurementMethodReferenceSurfaceReferencePlaneandAreaReferencePlaneandAreaReferenceSurfaceSiteSizeandArrayParameterParameterGBIRGF3RGF3DGFLRGFLDSF3RSF3DSFLRSFLDSFQRSFQDSBIRSBIDRangeRangeDeviationRangeDeviationRangeDeviationRangeDeviationRangeDeviationRangeDeviationParameterParameterParameterParameterParameterReferencePlaneandAreaReferencePlaneandAreaS-TIRS-FPDS-TIRS-FPDS-TIRS-FPDLTVS-FPDSemi用语現行习惯用语TTVTIRFPDTIRNTVFPDFrontRef.CenterFocus3pointBestFitSiteBestFitBackRef.CenterFocusSiteFlatnessGlobalFlatnessFrontBackBackFront3Point3Point(全面)Ideal(全面)(最小二乗法)bfLeastSquares(全面)LeastSquares(全面)(bf)LeastSquares(site)Ideal(全面)参考面的选取(表面or背面)参考平面的設定(bfor3pt)又称理想平面(FlatnessQualityArea)FlatnessToolsPrinciple:Capacitancesensor(ADE)Wafertbcat=a-b-cRingSpacingRingSpacingSamplingDataPointADE93003.81mm400point/ring8,664ADE96001.9mm400point/ring22,134ADE98500.95mm400point/ring40,000X-YResolutionNikon0.33mm/pixel290,000局部平整度测量边缘问题PartialsInactiveSiteSetup局部平整度测量边缘问题PartialsActiveSiteSetup•Greenlinesindicatespartialsites.两种方式测量结果差异举例---SFQDTrend00.10.20.30.40.50.60.70.80.9881618100201210026071002920100653310068981007177101267210176801018841102989210319451033130100599410338821097393109811811012721101701110187711019771102109121155912120441251255125353212578681262722126318012633061264530126475412723941292925129884412998671301689Box#SFQD-EPI(um)MEANSPEC.MAXPre11/17/05shipmentPost11/17/05shipmentChangedMeasurementtoPartialSitesActiveChangingtoPartialSitesActiveIncreasedSFQDonasampleofEpiwafersInactive0.17umActive0.24um平整度SEMI标准ITEMSPOLISHEDWAFEREPITAXIALWAFER1.0umDesignRuleTwin-TubCMOS0.35umDesignRuleTwin-TubCMOS0.35umDesignRuleDRAMTTV(GBIR)10um----5umTIR(GFLR)------3umSFQD--=0.5um18x18mm=0.23um22x22mm=0.35um22x22mmBOW60um------WARP60um------SEMISTANDARDFOR150mm(SEMIM1ANDM11)常用硅片STIR数值举例P15-25各硅片厂家STIR数据分布对比00.20.40.60.811.21.4ABC有研厂家STIRMAXMEANMIN上图为各厂家STIR均值中的MAX、MEAN、MIN比较工艺过程硅片平整度变化00.511.522.51357911131517192123251次擦片后2次一次/牺牲氧化后3次SIN后擦片后、一次/牺牲氧化（900C）后、SIN（700C）后采用光刻PENKIB1设备进行平整度测量，每片的平整度三次测量结论：数值差异不大平整度有增大的趋势聚焦异常FlatnessValues测量TTVTIRBestFitSFPDBestFitBowBestFitWarpBestFitS1Defocus5.6201.943-0.271-0.736.16S2Defocus6.9552.443-0.241-20.6142.14S3Defocus5.2332.363+0.314-17.0035.77S233.0301.600-0.292+0.517.31S25OK2.8681.793-0.297-17.8238.35EPINotProc3.0651.801-0.224------异常与TTV相关聚焦异常FlatnessValues测量SFQDSiteBestFitCurrentSBIDBackRefSFLDFrontRefBestFitSF3DFrontRef3PointS1Defocus-0.271-1.311-0.940-0.966S2Defocus-0.241-1.649-1.204-1.262S3Defocus+0.314-1.502-1.151-1.184S23-0.292-0.757-0.951-1.012S25OK-0.297-1.043-0.940-1.035EPINotProc-0.224-0.565-0.744-0.730defocusdoesnotcorrespondtositeflatness,suchasSFQD,SBID,SFLD,andSF3D.