Datacon-2200-evo-Maintenance-Release-3.0

thenewworldofadvancedpackagingmemberofBesigroup2200evoTwin-HeadMulti-ChipDieBonderMaintenanceRelease3.0DocumentationVersionhistoryReleaseDateAmendedby:Comment1.027.07.2006KarlDeiters/TDCreated2.001.12.2006KarlDeiters/TDCompletelyrevised2.131.07.2006TDLayoutrevised3.018.02.2008TDCompletelyrevisedaccordingtoSEMIS2-0706©DataconTechnologyGmbH2009andallsubsequentrevisiondates.TheinformationcontainedinthisdocumentisthepropertyofDataconTechnologyGmbHandissubjecttochangewithoutnotice.Thisdocumentmaynotbereproducedortransmittedinanyform,norstoredinaretrievalsystemofanynature,withouttheexpresswrittenauthorityofDataconTechnologyGmbH.Maintenance©2009DataconTechnologyGmbHTableofcontents2200evo3Release3.0Safetycheck......................................................................................................................10Cleaning........................................................................................................................12XYZaxissystem...................................................................................................................16XYZmechanicsfordispenser.........................................................................................................18Ionizingunit......................................................................................................................20Coverwithlockingdevice............................................................................................................22Waferlift........................................................................................................................26Wafertransfersystem..............................................................................................................28Wafertable......................................................................................................................30Waferstretcher...................................................................................................................32Heatingwaferstretcher.............................................................................................................34Ejectioncarrouselunit..............................................................................................................36Toolbankwithextension............................................................................................................38Loweringbelttransportsystem........................................................................................................40Cameras........................................................................................................................42Ventilators.......................................................................................................................44ML1magazinliftoptional..........................................................................................................46Bufferlineoptional...............................................................................................................48MagazinliftML6optional..........................................................................................................50Waferbar-codescanner.............................................................................................................52Vacuumpump....................................................................................................................56Preliminaryinformation.......................................................................................................4MaintenanceintervalDaily(shiftchange).......................................................................................8Maintenanceinterval-Monthly...............................................................................................14Maintenanceinterval-Sixmonthly............................................................................................24Maintenanceinterval-Additionaltasks.......................................................................................54Maintenance©2009DataconTechnologyGmbH2200evo4Release3.0Preliminaryinformation1.Prerequisites1.1GeneralTheoperatormustensurethat:•thecorrectfunctioningofthesafetydevicesinstalledbyDataconischecked.•thattheprescribedmaintenancedutiesarecarriedout.1.2MaintenancepersonnelTheoperatormustensurethat:•themaintenancepersonnelaresuitablytrainedinaccordancewithnational/internationalstandards.•themaintenancepersonnelhaveundergoneserviceandmaintenancetrainingatDatacon.1.3Technicalprerequisites2.MaintenanceintervalsThemaintenanceworkisdividedintothefollowingintervals:•Dailyoratshiftchanges•Monthly•Sixmonthly•Annually•AdditionaltasksNOTICEPrerequisiteforsafeoperationofthemachineisknowledgeofthecontentofthe»2200evo—Safety«documentation.Thisdocumentationcanbefound:fprintedinthedocumentationboxinthemachine.fasaPDFfileonthe»Documentation«CD-Romsupplied.CAUTIONForallmaintenanceworkdescribedbelow,themachinemustbecompletelydisconnectedf