设备二次配相关简称

二次配系统通用管道种类简称种类简称名称全文DA压缩空气DRYAIRCDA洁净压缩空气CLEANDRYAIRPV（VAC）制程真空PLANTVACUUMPUMPLINE制程高真空HINGHPLANTVACUUMHV真空清扫GEX一般排气GENERALEXHAUSTHEX热排气HOTEXHAUSTSEX酸性排气ACIDEXHAUSTAEX碱性排气ALKALIEXHAUSTVEX有机排气SOLVENTEXHAUSTN2氮气PN2高纯氮气O2氧气PO2高纯氧气AR氩气HE氦气H2氢气PCW生产冷却水PROCESSCOOLINGWATERDIW生产纯水DIWATERUPW超纯水ULTRAPUREWATERG.D一般排水GENERALDRAINA.D酸排水ACIDDRAINAL.D碱排水ALKALIDRAINO.D有机排水ORGANICDRAINP.D电气排水POWERDRAINIP.D制程排水ExhaustPlantGasDRAINWATERAIRSUS管粗糙度AP管：RA=2.5UM；MP管：RA=1.0UM；BA管：RA=0.8UM；EP管：RA=0.2UM一般材质SUS304SUS316LBAU-PVCSCH80/SUS304SUS316LBAU-PVCSCH80/SUS304SUS304SUS304SUS304(特氟龙PTFE)SUS304(特氟龙PTFE)SUS304SUSBASUSEPSUSAPSUSBAEPSUSBAEPSUSBAEPSUSBAEPSUS304（脱脂）CLEAN-PVCCLEAN-PVCU-PVCU-PVCU-PVCSUS304U-PVCPFA、SUSAP管：RA=2.5UM；MP管：RA=1.0UM；BA管：RA=0.8UM；EP管：RA=0.2UM