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,,(,210016):,:;;:O484,TG174:A:10072760X(2001)0620015203IonBeamSurfaceModificationTechnologyofMetalMaterialsWEIZhong2shan,WANGMin,ZUODun2wen(CollegeofMechanicalandElectronicEngineering,NanjingUniversityofAeronauticsandAstronautics,JSNanjing210016,China)Abstract:Inthispaper,theresearchonionbeamsurfaceprocessinginChinaandabroadisreviewed,includingcathodearedeposition,ionimplantation,ionbeammix,ionenhanceddepositionandplasmaimmersionionim2plantation.Theprospectofthistechnologyisdiscussed.Keywords:ionbeam;surfacemodification;metalmaterials120,,,,[13]:a),,b),c),d)550mA,,e),,f)1m,,2,,,TiH13,,[1],,,2Fe2-3N[2]3:;:200120722451200161keV5keV;10keV30MeV;110MeV,,[1]3112080,,TiN,TiNKobe,CrN,[4]1989,,,,(CVD),,TiB2Ti(C,N)TiN,[5],[6]312(IBII),,,,,100[1],,400500,,,(MEVVA),20mm,25%,150[7]1MEVVAIIA-H,,1[1][1,8]313,,,,,519m,1218[9]314,,,,,,,315(P),P,,,2,,,2PIBII,,,,IBII[10]6120016P,TiNCrN,Cr12MoVTi6Al4VW18Cr4VP,42%88%[1]P,400h()/5163L,1050h1142L,[9]TiCrV,PMEVVA,(MPIII),,PIII,MPIII9Cr18,PIII9Cr18,PIII[12]4:,,(MPs,Macroparticles)MPs,,,[13,14],;,MPs,Akari[15];Kuehn[16];Anders90,[17]MPs,,,[18],3MPs,,[6]3[6],,,Xu-Tecprocess,[19],[20]5,,:a),b)c)d)e)f),g)PIII,(21)7120016p=q;q=p+2;n=n+1;mj=mj+1;gotoloop1;}}}},,XYIJZXKI():,1m;,;,,(21/4):N10G01X-01000Y401000N11G01X-15.217Y38.692I-01052J-88.576(R881569)N12G01X-25.234Y36.290I131980J-80.241(R811434)N13G01X-33.303Y33.273I211382J-69.366(R721568)N14G01X-39.992Y29.819I251698J-57.902(R631327)N15G01X-45.567Y26.023I271873J-46.866(R541508)N16G01X-50.153Y21.957I281586J-36.811(R461589)N17G01X-53.877Y17.604I281344J-27.983(R391815)N18G01X-56.793Y12.903I271608J-20.345(R341282)N19G01X-58.893Y7.647I261760J-13.714(R301062)N20G01X-59.987Y0.840I261190J-7.672(R271287)N21G01X-60.000Y-0.000I271070J-0.798(R271085),ABXX=603cos(W)W1W9,W0W9ab,(17):[1],1[M]1:,19991[2]RejDJ,Faeh1RJ,MatossianJN1Keyissuesinplasma-sourceionimplantation[J]1Surf.Coat.Technol.,1994(96):45-511[3]BrownIG.Vancuumarcmetalplasmaproductionandthetransi2tionofprocessingmodefrommetalionbeamtodcmetalplasmaimmersion[J]1Surf.Coat.Technol.,2001(136):16-221[4]TamagakiT,TsujiK,KomuroT,etal.Thein-timearcplatingsystemforhighthroughputprocessingofautomobileparts[J]1Surf.Coat.Technol.,1992(54-55):594-597[5],1[J]1,2000,(1):1-111[6]1[D]1:,19961[7],1MEVVA[J]1,2000,13(3):8-121[8]1[J]1,2001,15(2):4-41[9]LiuXH.RecentadvanceinsurfacetreatmentanditsapplicationsinChina[J]1Surf.Coat.Technol.2000(131):261-2661[10],,1[J]1,2000,17,(4):449-4541[11],1(PIII)[J]1,2000,(1):40-421[12],,,19Cr18[J]1,2000,13(4):24-281[13],,1[J]1,1996,(1):1-121[14]StraumalBB,GustW,VershininNF.MorphologyofMoparti2clesandtheirincorporationintothegrowingfilmduringvacuumarcdeposition[J]1Nucl.Instrum.Methods,1997(B122):594-5971[15]AkariK,TamagkiH.Reductioninmacroparticlesduringthede2positionofTiNfilmspreparedbyarcionplating[J]1Surf.Coat.Technol.,1990(43-44):312-3231[16]KuehnM,SpacethC,PintaskeR.Effectofadditionalion/plasmaassistanceinCNx-filmdepositionbasedonafilteredcathodicarc[J].ThinsolidFilms,1997(311):151-156.[17]AndersS,AndersA,BrownIG.Macroparticle-freethinfilmsproducedbyanefficientvacuumarcdepositiontechnique[J]1J.Appl.Phys.,1993(74):4239-42411[18],,1[J]1(),1997,33(3):361-3651[19],1[P]1CN871043581[20],,1[J]1,2000,20(5):373-37611220016