气敏传感器的研究现状与发展趋势

:1003-0794(2005)04-0003-03气敏传感器的研究现状与发展趋势1,1,1,1,2(11,221008;21,310000):传感器技术是现代检测和自动化技术的重要基础之一,它已深入到人类生活的各个领域随着微电脑和微电子技术的日益普及和应用,对传感器的性能数量及用途提出了新的需求,这就使人们更加重视对新型传感器的开发重点介绍气敏传感器的研究现状与发展趋势:气敏传感器;SnO2;MEMS;纳米科技:TP212:A1,(),,,,2,,,:(1),,(2),,,(3)(4)(MEMS),MEMS,,30~100Lm(5),,,,,;;,3,,,,,,SnO2SnO2,SnO2SnO2,,,,,,,SnO2SnO2,,,,,-,--SnO2SnO2,,SnCl4,,-,,,,SnO2,,SnO2,#3#20054SnO2,,,,SnO2,SnO2,,,,,SnO2,,,,:(l),SnO2,,,,,,,,,,,,,,,,(2)SnO2,,SiO2,COH2,PdCl2,SiO2PdCl2;CuO(2.4%~4.6%)H2S;MgOAl2O3CaO;CdOPbOCaO,V2O5Nb2O5MoO3SnO2,Ti4+Ge4+Li+Al+H2S,Pb3+Tn4+Ge4+;PtSiO2,600e,;CO(Y2O3Er2O3ZrO2Sb2O3),Er2O3;AgCuOZnO,SnO2,ZrRe2O3SnO2;PtPdRhIr;ReddyMoN2LPG,;YulongXuLiO2,;DongHyunkimLa2O3SnO20.01Mla,1000eCO;FukuiCOCr;Quaranta5%OsCH4,;ChaudharfRuPdAgH2(3),SiO2H2,(4),,,,,SnO2,,(5),(-),,--,(6)4(Nano-ST)0.1~100nm,,(1),:¹,,;º;»(2),,,,,,,,,#4#))),20054,,,,,,5SnO2,,:;;;,;,;,;,:MOSSnO2,,,,,:[1],.[M].:,2002.[2].[J].,2000,14(9):1-5.[3].[J].(),2001,14(1):37-41.[4].[J].,2002,(1):2.[5].SnO2[J].(),2002,(5):65-68.[6],,.[J].,2002,(7):1-6.[7],.SnO2[J].,1999,18(6):36-39.[8].-[J].,1998,17(4):5-8.:(1981-),,,03,1E-mail:[e-mail].:2005-03-01TheCurrentResearchSituationandDevelopmentTrendofGasSensorJIALiang-ju1,YINGPeng-zhan1,XULin-min1,NIZi-feng1,WANGYa-qing2(1.ChinaUniversityofMineandTechnology,Xuzhou221008,China;2.ZhejiangTeacherUniversity,Hangzhou310000,China)Abstract:Thetechnologyofthesensorisamodernmeasuringandoneoftheimportantfoundationsoftheautomatictech-nology,ithasalreadygotdeeplytoeachfieldofhumanlife.Withthepopularizationandapplicationdaybydayofthemicrocomputerandmicroelectrictechnique,haveputforwardthenewdemandfortheperformance,quantityanduseofthesensor,thismakespeopleaddandpayattentiontothedevelopmenttothenew-typesensorevenmore.Thistextin-troducestheresearchcurrentsituationoftheangryquicksensoranddevelopmenttrendespecially.Keywords:gassensor;SnO2;MEMS;nano-technology2005年中国国际煤炭装备及矿山技术设备展览会:200589~11:(6):::():5656565656561:,,,,,,;,/20050200589~11,,,,,,2:3:31118:100043:010-6868347781606655:010-68683076:E-mail:[e-mail]:13838026323#5#20054))),