数控机床误差检测、建模与补偿

上海交通大学硕士学位论文数控机床误差检测、建模与补偿姓名：王建中申请学位级别：硕士专业：机械工程指导教师：杨建国;吕燮炜200506011.2.3.4.FANUC-0M,,,,ABSTRACTNowadays,theNCtechnologyhasmadearapiddevelopmentaswellastheNCapplicationusedmorewidely,especialforprecise-manufacturefields.Thatoilmouthandoilpumpareregardedasheart-partofautoengine,whicharethemainproductsofwuxiweifugroupcompany.Actually,manyNCmachinehasbeenusedinthemanufactureprocess.Asaequipmentengineer,IamresponsibleforallNCmachinesofourcompany,includingmaintenance,repairandreconstruction.Basedonmyaffluentexperienceandsomeresearchwork,Ifinishedthetheory,thebriefidealisthatgoesalongwiththefollowingway:Inordertoprovideconstructionformachinemaintenance,repairandreconstruction,theanalysisanddividingforerrorelementsisnecessary,theonbasisofanalysis,theconcernedconclusionmustberequired.Notonlydidtheinspectingtechnologyprovidedirecthelpfornewmachineexam,butmoreimportantly,itcanbeusedtomeasurethepartsABSTRACTprecisewhenmachineisworking.Inaddition,themeasuretechniqueaboutlaserhasbeenusedwidely,asthemostimportantmeasuretechnique.Mytheorystemsfromtheanalysisandcompareforvariouslasermeasureprinciple,thendeducetheexpressionfromthesefactors.Accordingtotheanalysisofvarioustechniqueonhowtoprojectmodelwitherrorelements,Iprojectedthemathmodelwitherrorelementswhichisonthebasisoftwoways.Withtheanalysisandresearchofvariouserrorcompensationcontrolsystembeingdone,IfinishedtheanalysisoferrorcompensationcontrolsystemaboutFANUC-0MNCsystem,thusimprovingthepreciseofmachineonanchorpoint.Allofthathasveryimportantinstructiononimprovingpreciseofmaintenance.KEYWORDSNCmachine,errorelement,modelwitherrorelement,errorelementmeasuringtechnique,errorcompensationcontrolsystem1200568211.120[1]21.2.231.2.3FANUC1.341234FANUC52.1“”“”70%2.1.11.62.XYZ211337XX3(LINEARPOSITIONERRORS()XXd(STRAIGHTNESSERRORS)()XYd()XZd3XYZROLLERRORS()XYdPITCHERRORS()XYeYAWERRORS()XZe6X636=18XYZ3XYeYZeZXe212-12-2YZX)(xxe)(xye)(xze8XYZXYZX()XXd()XYd()XZd()XXe()XYe()XZeXYXYeY()YXd()YYd()YZd()YXe()YYe()YZeYZYZeZ()ZXd()ZYd()ZZd()ZXe()ZYe()ZZeZ.XZXe()XXdX()YXeY()XYdXY()YYeY()XZdXZ()YZeY()YXdYX()ZXeZ()YYdY()ZYeZ()YZdYZ()ZZeZ()ZXdZXXYeXY()ZYdZYYZeYZ()ZZdZZXeZX()XXeX9()XYeX()XZeX232.1.21122-31022-3112-42-42.22.2.1112500MM1500MM50MM500MM100MM50MM-200MM23I.II.2-547725-301530456075903603NXXcXc31325504X1()X1()557614]XiPiN(2-1)[]1NXXN1i2i--=σ∑=(2-1)XiXX=∑=NiiNX1(2-2)N1)2)3)X34)2-6152-65)2.2.1FZ12WFZ12WXFZ12WX2-72-12-22-3162-7FZ12W2-3FZ12WX17...XFZ12WX(m)X2-8+5.7m-4.7mx0.0104mm2-8FZ12WX183603.13.1.15*10-4HzHe-Ne2Hz3.1.2LLL=2/3-119He-Ne1Hz40Km3.1.3=/03-201/eHe-Ne1m1mm10-310-4rad3.1.4/43.23.2.13-1O-xyzOz20O-OxyxyxyxyzxyzO-xyzxpypzp⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡++⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡--=⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡zzyxxyxzyzeeezhxqqqqqq111zyxppp3-3zP+z,3-4⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡--+⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡=⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡----=⎥⎥⎥⎦⎤⎢⎢⎢⎣⎡ΔΔΔzhxqqqqqqeeezhx010zyxpppxyxzyzzyxpppzzyx3-43-4xyz213-13.2.2zz3-4xzypyzxpxxzqxqezqhqe+-=Δ+-=Δ3-5zxyxpyp3-5zxpypxyzxyzxpyp22QPD(QuadrantPhotodiode)QPD1)R2)QPD3)QPDS1557QPD1mmQPD0.01mmS1557QPD3-13-1S15571mm/0.2mm2//nm430-1060/nm85050/-20-+80/pA1/ns30QPDOO-xyzOQPDOQPDi1,i2,i3,i43-2QPDzQPDOOxyxyQPDxyRix,iyxPxPiiixΔ=Δ=-=)/22(/2242gpagpa3-6yPiiiyΔ=-=)/22(31gpa3-7P23Pix,iyxyix,iyxy3-2QPDabQPDcQPD243.3/20-/2003.3.11E(p,t)=E1(p,t)+E2(p,t)(3-8)Etp2II(p,t)=E(p,t)E*(p,t)(3-9)E*(p,t)E(p,t)P[][][])p(cosII2IIeeEEEEe)eEeE(e)eEeE()t,p(E)t,p(E)t,p(I2121)2010(j)2010(j2010220210tj20j2010j10tj20j2010j10δ⋅++=+++=⋅+⋅⋅⋅+⋅==ϕ-ϕ-ϕ-ϕαϕ-ϕ-α-ϕϕ*3-1022022101EI,EI==P()2010pφ-φ=δ25P33-10PPp123p3.3.2Cf=C/f(3-11)CfHe-Ne=0.6328m12A1A2K1K2,Ki=2/i,I[]2121212221t)(r)KK(cosB2AAIϕ-ϕ+ω-ω--++=(3-12)rt21,ϕϕrtBA1,A2*×=21AAB3-133-13*3-12K1=K21=2)cos(B2AAI212221ϕ-ϕ++=3-14)(21ϕ-ϕKxKx21=ϕ-ϕ3-15263-14KxcosB2AAI2221++=3-16x2/KI3.43.4.13-3MHz2~1ff12=νΔ=-B1P1f1f2f2-f1D1f2-f1C1B11/4B2f1dM2M1M2B21/49045P2f2-f1D2C2SC1C2M2M2fλν=ν⋅=Δ2c2ff23-17cC2f2-f1f2-f1ftM2LSfL2dt2dtfN2t0t02λ=⋅νλ=⋅Δ=∫∫3-18M2L2NL2λ=3-19ND1D2272f23-31-2-B13-1/414-B15-M16-1/427-1/438-M29-P1P210-D1D211-C1C212-S13-T3.4.23-41235647f2-f13f143f22735f1f2f1=f254728=Rsin(3-20)R3-41-2-3-4-5-6-7-f1f2f1f23.4.33-521f1f2Wf1f1f2f23W4Wxf1=f2yABf1AC2,f2BD2f1f229)BDAC(2+3-52sinAB2sinABBDACθ+θ=+3-213-21y2sin2BDACABθ+=3-223-51-2-3-4-3.5301)M2f2-f1f2)M2M23)M2M1M2M1M23.63.6.1213633333-6000(XYZ)XYZn3nDxDyDzDx=X/nDy=Y/nDz=Z/n3-7aga(000)DxYDyZDzg313000XYZpppX000YZnpp0y0X0Zpnp00ZXY0ppnpppxyznppXxyzyzpnpyyxzxzppnzzxyxy3.6.2FZ12W800mm600mm600mmXYZ20mm15mm15mmn=402323-73-8358m3-833,4.14.1.1(PartialLeastSquareRegression,PLSR)xi,yi(i=1,2,N),mmm2210ixaxaxaayΛ+++=(mN)2mim2i2i10N1iii)xaxaxaay(----δ∑=Λaji0(i=1,2N)i=1(i=1,2N)mX1,X2Xmx1,x2xm,nY1,Y2Ym,N1,N2Nmx1,x2xm34nnmnmmmm2210ixaxaxaayΛ+++=x1,x2xmnN1,N2Nmy1,y2yn,x1,x2xn4.1.2BPRBPBPBackPropagationBPRBF(RadialBasisFunction)MoodyC.Darken2080ReceptiveFieldRBFBP,103-104354.24.2.1xiyi(i=1,2N)mmm2210xaxaxaayΛ+++=mN(4-1)2mim2i2i10N1iii)xaxaxaay(----δ∑=Λaji0(i=1,2N)i=1i=1,2N2mim2i2i10N1ii)xaxaxaay(J----=∑=Λ4-2⎪⎪⎩⎪⎪⎨⎧==----=∂∂=-----=∂∂∑∑==N1ijimim2i2i10ijN1imim2i2i10i0)m,2,1j(,0x)xaxaxaay(2aJ0)xaxaxaay(2aJΛΛΛ4-3xkyk(k=0,1,2N)m+1m+1a0a1a2am36⎪⎪⎪⎪⎭⎪⎪⎪⎪⎬⎫=⋅++⋅+⋅=⋅++⋅+⋅=⋅++⋅+⋅∑∑∑∑∑∑∑∑∑∑∑===========N1iN1i