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12121(,710004)2(,710049)(Ti6Al4V),(Ionbeamenhanceddeposition,IBED):,,(111)TiO;16.8N,TitaniumOxideLayeronBiomedicalTitaniumAlloyDepositedbyIonBeamEnhancedDepositionSiHongling1TianLinhai2LiXiaohong1FuTao21(SchoolofStomatopathy,Xi’anJiaotongUniversity,Xi’an710004,China)2(SchoolofMaterialsScienceandEngineering,Xi’anJiaotongUniversity,Xi’an710049,China)AbstractIonbeamenhanceddeposition(IBED)hasbeenappliedtopreparetitaniumoxidelayerontitaniumalloy(Ti6Al4V)inordertoimproveitsbiocompatibility.Thelayerontitaniumalloyiseven,andtheelementsAlandVinsubstratearenotdetected.ThelayeriscomposedofTiOcontainingnitrogenorientedalong(111)plane.Thecriticalloadofthelayerinscratchtestis16.8N.Morphologicalobservationrevealsthelayerendsinafailurecausedbyplasticdeformation.KeywordsTitaniumalloyIonbeamenhanceddeposition(IBED)Titaniumoxide1,(TA1343490MPa[1]),(Ti6Al4V)(902MPa[1]),,Ti6Al4V[2],Ti6Al4V,,,Ti6Al4V,,(),[3]317L,[4,5][6,7],Ti6Al4V,25254.5mmTi6Al4V,600900MIB2850,,(99.99%),45,4h99.9995%,2.010-3Pa,0.1Pa,150,(100)(SEM),JBiomedEng2005;22(4)742744(EDX),X(XRD,CuKA),X(XPS,MgKA)XPS,,284.60eV33.1SEMTi6Al4VIBED,,(1a)EDX(1b),EDX,1Lm,,,;,3.2XRDXRDTiO(2),XRDTiO,2.010-3Pa,8.210-4PaIBED,Ti2O3TiO[8],1Ti6Al4VIBED(a)SEM(b)EDXFig1(a)SEMmicrographand(b)EDXspectraoftheIBEDlayeronTi6Al4V3474TiO(111)ö(200)01932165,(JCPDS2921361)(0.50),TiO(111)[9],(111)TiO,(0.93)(2.65)3.3XPSXPS,TiOCNTi(3),,,,,,3.4,(IBED),,,[6,7],,1618N,1618N,1618N,,4(Ti6Al4V),;(111)TiO;1618N,1LiZX,HuangYX,RuanYX.Handbookofcompositionandpropertiesofworldnonferrousmetalmaterials.Beijing:MetallurgicalIndustryPress,1992:8[,,..:,19928]2QianJH.PureTiandnewTialloyforsurgicalimplantapplication.ChineseJofRareMetals,2001;25(4)303[..,2001;25(4)303]3XueB,ZhouYH,ZhuMR.Scanningelectronmicroscopeobservationofbone2tissueinterfaceoftitaniumsprayed317Limplant.ChineseJChinOralMed,1994;10(3)141[,,.317L.,1994;10(3)141]4YaoXW,ZhuMR,YinXM.LightmicroscopicobservationofboneinterfaceofTitanium2coated317Lplatescrew.JBiomedEng,1997;14(4)327[,,.317L.,1997;14(4)327]5ChenXM,XuCB,LiSP,etal.ThecompositionandstructureoftheTi6Al4Valloysurfaceonwhichtitaniumalloywascoatedbyvacuumevaporatingathightemperature.Beijing:Proceed2ingsoftheFirstInternationalConferenceonBiomaterials(China),20017;2676TangB,ZhuXD,HuNS,etal.StudyonthestructureandtribologicalpropertiesofCrNcoatingbyIBED.SurfCoatTech,2000;1313917CuiFZ,LuoZS.Biomaterialsmodificationbyion2beamprocessing.SurfCoatTech,1999;1122788WangXH,ZhangF,ZhengZH,etal.ChemicalcompositionandstructureoftitaniumoxidefilmsdepositedonLTI2carbonbyIBED.ThinSolidFilm,2000;365949ZhangF,ZhenZH,LiuXH.Controlofpreferredorientationofrutile2typetitaniumdioxidefilmspreparedbyionbeamassisteddeposition.ChineseJMaterRes,1999;13(6)581[,,..,1999;13(6)581](:2003204221:2003210222)44722