扩散片制程简报200212121

TFT-LCDzzzzzzzzzzCLASS1000zzzCOMMALIPzzzzCOMMAzLIPzzz—zCLASS5000CLASS10000zzz—zzzzzzzzzzzzzzzzzzzzzzzzzzzzzzzHZ-40PcDT-100—PETTt%HAZE%188µ873.8100µ883.475µ87450µ86.57.9—12350g422%526Tt=1.7HAZS=1z30z500CCzPETzzz—z20~3060RHz10PCS9055zHZ40P(Tt)—z20~3060RHz10PCS9055zHZ40P(HAZE)—80,80%RHz8080RHz10PCS9055z500zHZ40P(Tt)(HAZE)—-20z-20z10PCS9055z500zHZ40P(Tt)(HAZE)—-20~60z-20(20hr)0(20hr)20(20hr)40(20hr)60(20hr)z10PCS9055z5zHZ40P(Tt)(HAZE)