搜索
4/2004174/2004(MEMS)12(,1;,2100081),,,;,,,,/(MicroelectromechanicalSystems,MEMS)/,MEMS,-()-MEMS(m),(mm),,MEMS,;MEMS,,MEMS,,MEMS,(Q),MEMS;MEMS,MEMS,,MEMS,MEMSRichardFeynman19591983There’sPlentyofRoomattheBot2tomInfinitesimalMachinery,/2080,MEMS,,3,(NSF),(DARPA),5000,MEMS,,1991,10250MEMS,;NEXUS(NetworkofExcellenceinMultifunctionalMicrosys2tems),MEMS7000,MEMS,,,MEMSMEMS2090,,863MEMS,,,1.MEMSMEMS,,,,;;,,MEMSTHTPTMO3HIGH-TECHNOLOGY4/200418ScienceandTechnologyReview4/2004,,MEMSMEMS;CAD/CAM,;MEMSMEMS2.MEMSMEMS,,MEMSTiNiMEMS,,,LIGALIGA(1)(BulkingMicromachining)(),,(),,MEMS,(2)(SurfaceMicromachining),,,,,,,(3)LIGALIGALIGALIthographieGalvanoformungAnformung,,1000,,LIGAX,X,LIGA3:XXX,,XX,,,LIGA,X,LIGA,X,,LIGA,(4)(WaferBonding),3.MEMSMEMS,MEMS,,,,,;,,,4.,,,,MEMS4,,,--,MEMS,MEMS,,,,MEMS,,MEMS,4/2004194/2004MEMS,,1.MEMS,,,(Coriolis),,(MIMU),,(),RF2.MOEMS,MEMSMOEMS,;MOEMS,,MOEMS,,,,MOEMS3.-,,,,,4.,,MEMS,MEMS,/,5.,,:,;,,6.,,,,,MEMS,MEMS,,MEMS;,MEMS,,1.,,1/10,,,,0.001g;gg10g,,,2.MEMS,,,,,81mm155mmHIGH-TECHNOLOGY4/200420ScienceandTechnologyReview4/2004;,,3.,,,1100Gb/cm2,4.MOEMSDMD(DigitalMicromirrorDevice),,5.,,,DARPA,,6.MEMS,,,,0.1kg,1,7.MEMSMEMS/,MEMS(Agent),,MEMS;MEMS,;8.,,,,MEMS,,MEMS,,MEMSMEMS,,,,,MEMS,,MEMS[1]RichardFeynman.ThereisPlentyofRoomattheBottom.MicroelectromechanicalSystem.1992.[2]RichardFeynman.InfinitesimalMachinery.Microelec2tromechanicalSystem.Vol.2(1),March,1993.[3]WilliamC.Tang.DarpaMEMSProgram.[4]HoCMandTaiYC.MEMSanditsapplicationforflowcontrol.ASMEJournalofFluidsEngineering.1996.[5]LuoHao,FedderGaryK.,CarleyL.Richard.1mGlat2eralCMOS-MEMSaccelerometer.ProceedingsoftheIEEEMicroelectromechanicalSystems(MEMS),2000:502-507.[6]HuiKaiXie,G.K.Fedder.ACMOS-MEMSLateral-axisGyroscope.Proc.2000Int.Conf.onModelingandSimulationofMicrosystem,SanDiego,CA,Mar2000.[7]Cardarelli,Donato.AnintegratedMEMSInertialMea2surementUnit.IEEEPLANS,PositionLocationandNav2igationSymposium,2002:314-319.[8]WarnaschAlbert,KillenAlbert.LowCost,HighG,Micro2electro-MechanicalSystems(MEMS),InertialMeasure2mentsUnit(IMU)Program.IEEEPLANS,PositionLo2cationandNavigationSymposium,2002:299-305.[9]Connelly.J,Dennehy,N,+.MEMS-basedGN&CSensorsandActuatorsforMicro/Nanosatellites.AdvancesintheAstronauticalSciences,V104,2000:561-576.[10]DeLabachelerie,MichelThevenet.MOEMSAevicesandtheirApplicationstoOpticalTelecommunicationSystems.AnnalesdesTelecommunications/AnnalsofTelecommuni2cations,V58(9-10),September/October,2003:1401-1423.[11]Chu,PatrickB.,Lee,Shi-Sheng,etal.MOEMS-EnablingTechnologiesforLargeOpticalCross-connects.ProceedingsofSPIE-TheInternationalSocietyforOpti2calEngineering,V4561,2001:55-65.[12]Lin,Liwei.ThermalChallengesinMEMSApplications:PhaseChangePhenomenaandThermalBondingProcesses.MicroelectronicsJournal,V34(3),March,2003:179-185.[13]Osiander,R.,Champion,J.L,Darrin,M.A.MEMSinAerospaceApplications--ThermalControlShutters.ProceedingsofSPIE-TheInternationalSocietyforOpticalEngineering,V4587,2001:7-13.[14]DeVoeDonL.ThermalIssuesinMEMSandMicroscaleSystems.IEEETransactionsonComponentsandPackagingTechnologies,V25(4),December,2002:576-583.[15]WiseK.D..MicromechanicalSensorsActuatorsandSystems.AmericanSocietyofMechanicalEngineers,Dy2namicSystemsandControlDivision(Publication)DSC,V32,MicromechanicalSensors,Actuators,andSystems,1991:1-14.[16]HenningAlbertK.MicrofluidicMEMS.IEEEAerospaceApplicationsConferenceProceedings,V1,1998:471-486.[17]CooleyPatrick,WallaceDavid,AntoheBogdan.Appli2cationsofInk-jetPrintingTechnologytoBioMEMSandMicrofluidicSystems.ProceedingsofSPIE-TheInter2nationalSocietyforOpticalEngineering,V4560,2001:177-188.4/2004214/2004[18]Niarchos,D.MagneticMEMS:KeyIssuesandSomeApplications.SensorsandActuators,A:Physical,V109(1-2),Dec.,2003:166-173[19]ChenF,XieH,FedderG.K.AMEMS-basedMono2lithicElectrostaticMicroactuatorforUltra-lowMagneticDiskHeadFlyHeightControl.IEEETransactionsonMagnetics,V37(4),July,2001:1915-1918.[20]Ruffin,PaulB.MEMS-basedSensorArraysforMilitaryApplications.TheInternationalSocietyforOpticalEngi2neering,V4700,2002:111-121.[21]VaradanV.K.,etal.SmartStructuresandMaterials2002:SmartElectronics,MEMS,andNanotechnology.TheInternationalSocietyforOpticalEngineering,V4700,2002:357.[22]George,Thomas.OverviewofMEMS/NEMSTechnologyDevelopmentforSpaceApplicationsatNASA/JPL.TheInternationalSocietyforOpticalEngineering,V5116(I),2003:136-148.[23]././.,2000:1-6[24][25]GregoryT.A.Kovacs...:,2003[26],..,2001[27],.MEMS.,1998[28],.MEMS,.,1996[29],,..,2000,19(2):23-25[30],,.MEMS.,2000,21():45-46()3(70271059)12(,1;2230052),,,G3X13,,,,,,,,,,,,,2060,,,3,,,:,15,,,,,,,,,,,,,2060,,RESEARCH&MANAGEMENT