exhaust_system_design-2

SemiconductorFabExhaustSystemDesign©M+WZander2Generalviewsemiconductorfab©M+WZander3Emissions:TheGeneralSituationVolumeConcentrationNumberofCompoundsTypeofCompoundsUnknownsMassFlowEnvironmentalImpactYESlowhighFabSafetyImpact©M+WZander4FocusPointsSafetyPerformanceBudgetRegulationsDesignVolumesMaterialsScrubbersDuctSystems„Data„Priorities„Choice/Definition„Dimensions©M+WZander5Ductwork„Corrosionresistance„Fireresistance„Easeofmounting,replacingandchanging„Price©M+WZander6StandardChoicesforExhaustDuctwork„GalvanizedSteel„CoatedGalvanizedSteel„FiberReinforcedPlasticFRP(FMcompliant/noncompliant)„Polypropylene,fireretardant„PurePVDFforhookup„StainlessSteel,uncoated„ETFE/ECTFEcoatedstainlesssteel©M+WZander7PureMaterialvs.SandwichStructureChemicalresistanceandmechanicalstabilityMechanicalstabilityChemicalresistance©M+WZander8ChemicalStructureofpartiallyandfullyfluorinatedPE-CF2-CF--CH2-CH2--CF2-CF-ClCl-CH2-CH2--CF2-CF--CH2-CH2--CF2-CF-ClCl-CH2-CH2--CF2-CF2--CH2-CH2--CF2-CF2--CH2-CH2--CF2-CF2--CH2-CH2--CF2-CF2--CH2-CH2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CH2-CF2--CF2--CF2-CF2--CF2-CF2--CF2-CF2--CF2-CF2--CF2-CF2--CF2-CF2-ECTFEETFEPVDFPTFE(„Teflon“)©M+WZander9CentralTreatments75,000m3/hhorizontalscrubberunderconstruction„Centralwetscrubbers„Solventtreatment©M+WZander10FiberfabricconcentratorAcloserlooktoVOCtreatmentprocessesVOCRotorconcentratorZeoliteCarbonFixedorfluidizedbedconcentratorBiologicalsystemOthersBiowasherBiofilterBiotricklingfilterOxidizerRegenerativeRecuperativeCatalyticThermalDirectthermalCatalyticThermalEnergyrecoverynecessaryNocatalystswithHMDSNotsuitableforsemiconductor/PVfabs©M+WZander11ELOSORB-basicflowschematic„AdsorptionofVOConactivatedcarbonfiberfilters„DesorptionoftheVOCfromthefiltersthroughdirectelectricalheatingwithcurrentinconnectionwithasmallairflow„RegulationoftheconcentrationofVOCupto25%ofthelowerexplosionlimitispossible„DegradationoftheconcentratedVOCinasmallthermaloxidizer©M+WZander12Comparison:EcoefficiencywithregardtoGWPParameters10,000Nm³/h(5,900cfm)20°C(68°F)30%r.H.Isopropanol05010015020025005001.0001.5002.0002.5003.0003.5004.000ELOSORBBiotricklingfilterRecuperativecombustionRegenerativethermaloxidationRotorconcentrator+thermaloxidationGWP/kg/hCO2eqVOCload/mg/m³upperlimitsemiconductorindustry©M+WZander13LocalTreatments„ReductionofFireHazard„ReductionofCloggingPotential„ReductionofHAPEmissions(HAP:HazardousAirPollutant)„ReductionofPFCEmissions(PFC:PerfluorocarbonCompound)©M+WZander14Whylooktolocalabatements(LOCA)?©M+WZander15Typesoflocalinstallations„ThermalOxidizer(withoutflame)(„HotWallDecomposer“)„Burner/Burnbox„Burner/Washer„topdown„bottomup„radial„Absorber„Transitionmetaloxides„Metals/Bases„SpecificPackingforNF3(Hot)„CatalyticPackings(PFCdecomposition)„Plasma(Pre-pump,post-pump)„Solidremoval„Wetscrubber„verticaltype„horizontaltype©M+WZander16DesignPhases©M+WZander17EmissionForecastTechnology/SpecialtiesAgeofprocessequipmentTypeofworkshopAreaofworkshopProductMixProductTypePrimaryEmissionsNumber/TypeofexhaustsystemsLocal/CentralabatementsReduction&DilutionFinalEmissionsSoftwarebasedemissionforecast©M+WZander18CVDProcessArea(asexample)LocalAbatementChemicallytransformedreactionproductsInputProcessWasteWaterWasteGas©M+WZander19„Safety„DuctFire(partial:concentrationatdifferentducts)„Toxicityincaseofunintendedrelease„DuctClogging/solidification(partial:solidmassandmaintenancecost)„Corrosion,materialcompatibilityseparate,specificchoice„EnvironmentProtection„Thresholdvalues„GWPreduction(GWP:globalwarmingpotential)RelevantCriteriacoveredbyIDIOM