激光光束的整形技术-林勇

··林　勇,胡家升(大连理工大学电子与信息工程学院,大连　116024):。,、、、、。,,。:;;,:TN248.1　　　　:A　　　　:0253-2743(2008)06-0001-04LaserbeamshapingtechniquesLINYong,HUJia-sheng(SchoolofElectronicsandInformationEngineering,DalianUniversityofTechnology,Dalian116024,China)Abstract:Thedevelopmentandthepresentstatusoflaserbeamshapingaresummarizedinthispaper.Severaltypicaltechniques,includingtheasphericlens-es,thelensletarray,thediffractiveopticalelements,thebirefringentlenses,theliquidcrystalspatiallightmodulatorandtheaxicon,arecommentated.Thecharacteristicandrealizationofeachmethodisintroduced,existingproblemsinusearediscussed,andprospectsarepredicted.Keywords:beamshaping;Gaussianbeam;intensitydistributionuniformization;longfocaldepth:2008-10-25:(1976-),,,,。　　,〔1,2〕。,。,〔3〕。1965,Frieden〔4〕,。,,。,、,。,,。2000,(SPIE),〔5-12〕。、,。Frieden,。,。,。〔13〕,〔14〕。。,〔15〕,,。Dickey〔16〕。,。,,。〔17〕(diffractiveopticalelementsDOE)。,、。2080。(),,。。,,。·〔18〕。。〔19〕,,。〔20〕(axi-con)。,(non-diffractive)。。。〔21〕,。。。。2　光束整形技术回顾2.1　Frieden〔4〕。—L1—L2,1a。L1P2。L2。S1S2:,S1、S2A、B,。S1,,。L1,,L2。P1、P2S2。1a　　1b　Frieden、,。。Shafer〔22〕,。HoffnagleJefferson〔23〕-,。EvansShealy〔14〕,,,。,ScottSouthwell〔13〕,,。,。,,,,。2.2　Dickey〔16〕。,1b。L1,L2。,。,。〔24〕,〔23〕、〔26〕。,,,,。,1　　　:　　《》2008296　　　　LASERJOURNAL(Vol.29.No.6.2008),,。,。,Pepler〔27-28〕。Copp〔29〕Bollanti〔30〕、、,。,。,,、〔31〕。:〔32〕,,。〔31〕,,。〔32〕,,、,,。2.3　,。。、,。〔34〕。,。1969LesemHirsch〔35〕,,,。1984,〔36〕,,。。,〔37〕、〔38〕,〔39〕〔40〕,〔41〕。。G-S〔42〕、Y-G〔43〕〔44〕、〔45〕,/〔46〕,,〔47-48〕。,DOE,。,,,〔49〕。,〔50〕,,,(FEM)〔51〕、(BIM)〔52〕(FDTD)〔53〕,FDTDMaxwell,FEMBIM,,。MirotznikPrather〔54〕FDTD。JiangNordin〔55〕FDTDuGA〔56〕。,。,。2a　　　　　2b　　　　　　、,,〔57〕。、、,,。2.4　:,,.〔18〕,。L1、L2、L3、L4P,2a。。L1L4,λ/2,λ/4,:L2L3,λ/4,λ/2,;L1,L4,L213。,L2L3L1L4,,。,,〔58〕。,L1。,,。Ⅱ〔59〕,(),66%80%,()。ICF。2.5　、。。,、、、、〔60〕。,。,。,。,〔61〕,。2001,〔62〕2b。P,,CCD、,,。,、,(、)。,〔63〕。3　长焦深整形元件,、、。:,。1987〔64〕,,〔65〕、〔64〕,〔66〕〔67-68〕。,,,,10〔69〕。,。,。,。。1954,(Mcleod),3,2　　　:　　《》2008296　　　　LASERJOURNAL(Vol.29.No.6.2008),。1987。、、、,。〔70〕〔71〕。,Mishra〔21〕(hollowandbottle),〔72〕。,〔20〕,,。1992〔73〕,、。〔74〕,,。,〔75〕。,,〔76〕,。3　1998,ZbigniewJaroszewiczJavierMorales(lensaxicons)〔77〕,,,,。,,,,,〔78-81〕。,,。。。,———,〔77〕〔82〕。。,。,,,〔83〕、〔84〕。4　总结和展望,,(RPP)〔84〕,〔86〕,〔87〕,〔88〕,〔89〕,〔90〕,,,。,。,,。,,、,。。。,、。;,,。〔1〕　DavidL.Shealy.JohnA.Hoffnagle.Laserbeamshapingprofilesandpropagation〔J〕.Appl.Opt.,2006,45(21):5118-5131.〔2〕　DavidL.Shealy.Historicalperspectiveoflaserbeamshaping〔C〕.Pro.ofSPIE,2002,4770:28-47.〔3〕　F.M.Dickey,L.S.Weichman,R.N.Shagam.LaserBeamShap-ingTechniques〔C〕.Pro.ofSPIE,2000,4065.〔4〕　B.R.Frieden.Losslessconversionofaplanelaserwavetoaplanewaveofuniformirradiance〔J〕.Appl.Opt.,1965,4(11):1400-1403.〔5〕　F.M.Dickey,S.C.Holswade,eds.LaserBeamShaping〔C〕,Pro.ofSPIE,2000,4095:1-216.〔6〕　F.M.Dickey,S.C.Holswade,D,L,Shealy,eds,LaserBeamShapingII〔C〕.Pro.ofSPIE,2001,4443:1-198.〔7〕　F.M.Dickey,S.C.Holswade,D.L.Shealy,eds.LaserBeamShapingⅢ〔C〕.Pro.ofSPIE,2002,4770:1-158.〔8〕　F.M.Dickey,D.L.Shealy,eds.LaserBeamShapinglV〔C〕.Pro.ofSPIE,2003,5175:1-236.〔9〕　F.M.Dickey,D.L.Shealy,eds.LaserBeamShapingV〔C〕.Pro.ofSPIE,2004,5525:1-233.〔10〕　F.M.Dickey,D.L.Shealy,eds.LaserBeamShapingVI〔C〕.Pro.ofSPIE,2005,5876:1-367.〔11〕　F.M.Dickey,D.L.Shealy,eds.LaserBeamShapingVII〔C〕.Pro.ofSPIE,2006,6290:1-313.〔12〕　F.M.Dickey,D.L.Shealy,eds.LaserBeamShapingVIlI〔C〕.Pro.ofSPIE,2007,6663:1-252.〔13〕　P.W.Scott,W.H.Southwell.Reflectiveopticsforirradiancere-distributionoflaserbeams:design〔J〕.ApplOpt.,1981,20:1606-1610.〔14〕　N.C.Evans,D.L.Shealy.Designandoptimizationofanirradi-anceprofile-shapingsystemwithageneticalgorithmmethod〔J〕.Ap-pl.Opt.,1998,37:5216-5221.〔15〕　.〔J〕.,2000,8(2):128-132.〔16〕　F.M.Dickey,S.C.HoLswade.LaserBeamShaping:TheoryandTechniques〔M〕.MarcelDekker,Inc,NewYork,2000.〔17〕　,,.〔M〕.:,1998.〔18〕　B.M.VanWonterghem,J.T.Salmon,R.W.Wilcox.Beamletpulse-generationandwavefront-controlsystem〔P〕.UCRL-LR-105821-95-1.〔19〕　N.Konforti,E.Marom.Phase-onlymodulationwithtwistednematicliquid-crystalspatiallightmodulators〔J〕.Opt.Lett.,1988,13(3):251-253.〔20〕　MclcodJH.Theaxicon:anewtypeofopticalelement〔J〕.J.OptSoc.Am.,1954,44(8):592-597.〔21〕　Ming-DarWei,Wen-LongShiao,Yi-TseLin.Adjustablegener-ationofbottleandhollowbeamsusinganaxicon〔J〕.Opt.Commun.,2005,248(3):7-14.〔22〕　D.Shafer.Gaussiantoflat-topintensitydistributionlens〔J〕.Opt.LaserTechnol.,1982,14,159-160.〔23〕　J.A.Hoffnagle,C.M.Jefferson.Designandperformanceofare-fractiveopticalsystemthatconvertsGaussiantoflattopbeam〔J〕.Ap-pl.Opt.,2000,39:5488-5499.〔24〕　F.C.Wippermann,Uwe-D.Zeitner,PeterDannbergetal.Fly'seyecondenserbasedonchirpedmicrolensarrays〔C〕.Pro.ofSPIE,2007,6663(09):1-9.〔25〕　MannK,HopfmullerA.Monitoringandshapingofexcimerlaserbeamprofiles〔C〕.Pro.ofSPIE,1992,1834:184-194.〔26〕　,,.〔J〕.,1997,17(11):1581-1584.〔27〕　DAPepler,CNDanson,INRossetal.Binary-phaseFresnelzoneplatearraysforhigh-powerlaserbeamsmoothing〔C〕.Pro.ofSPIE,1995,2404:258-265.〔28〕　KKamon.Fly-eyelensdeviceandlightingsystemincludingsame.USPatentNo.5251067,October5,1993.〔29〕　KoppC,RavelL,MeyrueisP.Efficientbeamshaperhomogenizerde-signcombiningdiffractiveopticalelements,microlensarrayandran-domphaseplate〔J〕.J.Opt.A.Pu