WAT Training

TMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.IntroductionofWATTestSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.OutlineWhatisWATTestPatternHardwareSystemSoftwareSystemTestParameterTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.WATstandardforWaferAcceptanceTestWhatisWAT?TMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.Whatkindofwork?•Anelectricaltestsystem,non-productivityactivity–WATisanelectricaltestsystemforprocessgoodnessmonitor.–Devicecharacteristics:resistor,capacitor,interconnection,continuity,spacing,insulation,leakage•WATistheprimaryqualityelementforafoundryFAB(thequalityassuranceforwaferoutput)•WATcharacteristics:DCforceandmeasurement,Automation,highthroughput,precision,samplingWhatisWAT?TMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.WhyWAT•MonitorProcessWindow.•CheckDesignRule.•ControltheProcessParameters(SPC).•DebugtheProcessError.•ReliabilityCharacterization.•DeviceModelingforCircuitDesign.•DevelopnextGeneration.WhatisWAT?TMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.TestPattern•Testkey:WATjustteststheTestKeysomewasputinsidechip,fordesignrulecheck,yieldmonitorandprocessqualificationanddevelopment.somewasputonscribeline.Thesetestkeywillbedestroyedafterdiesaw.…….....12322TMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.TestKeyATestKeyBTestKeyDTestKeyCTestKeyETestKeyFSite&TestKeyTestPatternTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.TESTER1TestHeadProberWaferProbecardChuckController1SystemsketchmapHardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.WAT(WaferAcceptanceTest):electricalparametertestonspeciallydesignedteststructureonscrublanes,suchasallkindsoftransistors,resisttestpatterns,leakage/breakdowntestpatterns,todecidewhetherthewafergothroughannormalprocess,andshippabletocustomer.TestTools:TELP8XLProberstationKeithleyS630Auto-tester(allSMU:Currentaccuracy:0.1fA)SignatoneS1170ManualProberKeithleyS4200Manualtester(OneSMU:Currentaccuracy:0.1fA)Agilent4284C-Vtester(Manual)Agilent4156Manualtester(allSMU:Currentaccuracy:10fA)HardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.AgilentTestingsystem•AutomaticTester–4072A(Agilent)•AutomaticProber–P8-XL(TEL)•Server(workstation)–HP•ProberCardHardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.Agilent4072+TELP8-XLTesterHead4072AControllerScreenWaferLoaderTouchPannelAutoWaferChangerHardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.AutoTesterFunction•Forcevoltage,current.•Measurevoltage,current.•Capacitancemeasure.•Controlprobermoving•Aswitchmatrixtoprovidemorethan48pinoutput.HardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.AgilentTester4072AWorkstation8114A4284PowerSupply81110CoolingFanSystemCabinetTestheadDiagBoardCPUInputSelector8AUXPorts8SMUGNDUPulseSwitch6HFPortMatrixOpticalInterfaceHardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.TestHeadof4072A48Pin48inputExtendedPathAUXPortHFPortPulseSwitchPortHardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryofSMIC.Itmustnotbecopiedorusedforanypurposeotherthanforreferenceonly,andSMICshallnotbeliableorresponsibleforanyreliance.AutoProberFunction•Waferload,unload&transfertochuck.•ProberCardWaferpre-alignment,precisealignment.•TestLinelocate.•Chuckup(probed)•Chuckdown(un-probed)HardwareSystemTMThisdocumentisstrictlyconfidentialandproprietaryo