基于SU8和PMMA的毛细管电泳芯片制作

142Vol114,No1220084JOURNALOFFUNCTIONALMATERIALSANDDEVICESApr.,2008:1007-4252(2008)02-0412-05:2007-07-20;:2007-09-22:;.:(1979-),,(E-mail:[e-mail]).SU8PMMA1,2,2,2,1(1.,230026;2.,230026):SU8PMMA,PMMASU8lift-off,PMMASU8,,,UV-LIGA:SU8;PMMA;:TB324:AFabricationofCEmicrochipbasedonSU8andPMMAZHUXue2lin1,XIONGYiong2,LIUGang2,TIANYang2chao2,CHUJia2ru1(1.DepartmentofPrecisionMachineryandPrecisionInstrumentation,Hefei230026,China;2.NationalSynchrotronRadiationLaboratory,UniversityofScienceandTechnologyofChina,Hefei230026,China)Abstract:ThefabricationofmicrochipofCapillaryElectrophoresisbasedonSU8andPMMAwasdevel2opedinthispaper.ThefabricationprocessofSU8micro-channelwasstudied,thefabricationofmicro-electrodesaffectedbymaterialpropertiesofPMMAwasalsodiscussed.Themicrochipwaspackagedbythermal-pressurebondingmethod.TheresultsindicatethathighqualityofCEmicrochipwasfastfabri2catedbythisnewmethod,whichalsoprovidesthefoundationfortheresearchofUV-LIGAofCEmicro2chips.Keywords:SU8;PMMA;microchipofcapillaryelectrophoresis0[1,2]MEMS,MEMS,,[3]:(1),[2];(2),,[4,5];(3)PDMS,,©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:1)SU8SU8,MEMS[7]PMMA,2)SU8,PMMASU8,[9]3)UV-LIGAUV-LIGA,UV-LIGASU8,,,,SU8PMMA,,UV-LIGA1Fig.1SketchmapoffabricationprocessformicrochipofCEbasedSU8andPMMA1SU8-PMMA1PMMALift-Off;SU8;PMMA1.1Lift-Off2,:10mSU8,11SU8Table1ParametersfortheSU8adhesivelayer14500rpm/s,30s291,30min3i-line:100mJ/cm2491,15min5100,4hourSU8PMMA2m,1002,,g40mJ/cm21,,,,Fig.2Sketchmapoffabricationofmicro-electrodes2(30100nm),3142,:SU8PMMA©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:130mJ/cm2491,15min54min1.3PMMA,,,809034,Plasma,Plasma(RIE),:O2,30SCCM,2.5Pa,30W,15sHEX02:97,1MPa,51.43S,SW,B,BWHV,GW,R(S-SW)1cm,(B-BW)2.7Na2HPO4,pH9.010mM(UricAcid)(L-Ascorbic),(DIwater)20,SSW100V,BBW,20s:BBW300V,SSW,,+700mV()6Fig.3LayoutoftheCE-ECDchip.324-aPMMASU8,()Fig.4CEmicrochipfabricatedandtheCCDimageofinitin2jectionofmicrochannel4CCD2.1PMMA,PMMA,SU8,,5,PMMA,SU8,SU8PMMA,PMMASU86PMMASU8,lift-off,,SU841414©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.[9],SU880[10],PMMASU8,PMMAIRE,:O2,25SCCM,2.5Pa,25W,20s,,,4-b2.4(UricAcid)(L-Ascorbic),7,Fig.7ElectropherogramofuricandL-ascorbicacidsamplesusingtheSU8-PMMACEmicrochipwithendcolumnampero2metricdetectionsystem.73PMMA,,PMMASU8(UricAcid)(L-Ascorbic),,,UV-LIGA:[1]DarwinRReyes,DimitriIossifidis,Pierre-AlainAuroux.MicrototalanalysissystemsI:introduction,theory,and5142,:SU8PMMA©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.[J].AnalChem,2002,74:2623-2626.[2]HarrisonDJ,FluriK,seilerK,etal.Micromachingamini2aturizedcapillaryelectrophoresisbasedchemicalanalysissystemonachip[J].Science,1993,261:895-897.[3]CarstenHaber.Microfluidicsincommercialapplications;anindustryperspective[J].LabonaChip,2006,6:1118-1121.[4]LarisaMartynova,LaurieELocascio,MichaelGaitan,etal.Fabricationofplasticmicrofluidchannelsbyimprintingmethods[J].AnalChem,1997,69:4783-4789.[5]ZhifengChen,YunhuaGao,JinmingLin,etal.Vacuum-assistedthermalbondingofplasticcapillaryelectrophoresismicrochipimprintedwithstainlesssteeeltemplate[J].JChormaA,2004,1038:239-245.[6]LuoYi,WangXiaodong,LiuChong,etal.SwellingofSU-8structureinNimoldfabricationbyUV-LIGAtech2nique[J].MicrosystemTechnologies,2005,11(12):1272-1275.[7]SU82000seriesmanual,[8]BBilenberg,TNielsen,BClausen.PMMAtoSU-8bond2ingforpolymerbasedlab-on-a-chipsystemswithinte2gratedoptics[J].JMicromechMicroeng,2004,14:814-818.[9],,,.[J].,2005,21(2):225-27.[10]NeilJShirtcliffe,SanaaAqil,CarlEvans,etal.Theuseofhighaspectratiophotoresist(SU-8)forsuper-hy2drophobicpatternprototyping[J].JMicromechMicro2eng,2004,14:1384-1389.61414©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.