常用静电测量技术及其特点-张荣奇

4　5　200710　　　　　　EQUIPMENT　ENVIRONMENTAL　ENGINEERING,,,(,050003):在介绍静电主要参数的基础上,说明了静电电位、静电电荷量和静电感度的测量方法,并对各种测量方法的特点和适用范围作了简要介绍。:静电;测量技术;静电感度;电荷量:O441.1　　　:A:1672-9242(2007)05-0085-04:2007-04-11:(1982-),,,,。OverviewonElectrostaticTestingTechnologiesandTheirCharacteristicsZHANGRong-qi,TANZhi-liang,LINYong-tao,XIEPeng-hao(KeyLaboratoryofDefenseScienceandTechnology,OrdnanceEngineeringCollege,Shijiazhuang050003,China)Abstract:Mainparametersofstaticelectricitywereintroduced.Themeasurementmethodsofelectrostaticpotential,theelectro-staticcharging,andelectrostaticsensitivitywereexplained.Thecharacteristicandscopeofthemeasurementmethodswasintroduced.Keywords:electrostatic;measurementtechnology;electrostaticsensitivity;electrostaticcharging　　,。,19601975,116。20,30。、、,1ns,,(ESDEMP)。,,,[1]。-,,(ElectrostaticProtectionArea,EPA),,,,、,、、。,:[2]。,,[3]。,,,。、、。1　,;。85　　　200710,;,,。,,,,,。1.1　1。Ca1　Fig.1　Equivalentcircuitofcontact-typeelectrometer;CbRb。E0。,Ub,Eb=CaE0C0+Cbe-t/Rb(Ca+Cb):。1,(),。,,。。:1),,Cb,。Eb=CaCa+CbE0,Cb,CaCb。2)。,Rb,:Eb=CaE0Ca+Cbe-t/Rb(Ca+Cb):Rb,。,Rb≥1012Ψ;C180s。3)。,Q-V,ZPD-1。1.2　:,,。,,。,,。:。、。2。2　Fig.2　EquivalentcircuitofdirectlysensingmeasurementUb,。,,C0C0=C10(1+ksinwt),。,,,3。3:a,;,,;c0abc。b,c,。。,a。864　5　　:3　Fig.3　Equivalentcircuitofrotatingblademeasurement,。,,,。C0:C0=C10(1+ksinωt),k1。E(t):E(t)=E0kωC0(1/Rb)2+ω2C2bcosωt(),,,,,R1R2(R1,R2)。(4):Eb=R2R1+R2E4　Fig.4　Equivalentcircuitofpartialvoltagemeasurement2　(),,,。:,,。5　Fig.5　Principleoftheelectriccapacityandelectricpotentialcomputingmethod,:C=QE(Q=CE)。,,。。5,,,,,。,。。,,3,10%,。C΢,C΢,()。:Q=C΢E3　。,,,。,,,,,50%。:87　　　200710,,50%。6,6　Fig.6　Measurementcircuitofrelativeelectrostaticsensitivity7。7　Fig.7　Measurementcircuitofrealelectrostaticsensitivity　　,,,,,,u9(t)u6(t)。u6(t)i(t),、ε,:ε=∫i(t)u(t)dt。ε,50%。:[1]　,.[M].:,2004:2-4.[2]　.ESD[D].:,1997:18-25.[3]　,,,.[M].:,1999:277.(上接第84页)4　　　,:1)、,,、;,,。2)、,,。3)、、、、、,。4)、,,。5),、,,,。:[1]　AllungaExposureLaboratoryWeatherSummaries[R].Australia:AllungaExposureLaboratory,2001-2005.[2]　.[M].:,2003:248.88