国内外切削刀具涂层技术发展综述

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:20019赵海波:,PVD,,,,,,:,,,,,SummaryofDevelopmentofCuttingToolCoatingTechnologyatHomeandAbroadZhaoHaiboAbstract:Thepresentstatusanddevelopingtendencyofthecuttingtoolcoatingtechnologyathomeandabroadaresummarized.ThepresentproblemsaboutthedevelopmentofcuttingtoolcoatingtechnologyinChina,includingprocess,equipments,exploitation,spreadingapplicationandserviceaftersaleareanalyzed.Itsputforwardthatweshouldestablishanunitedsystemofresearch,developmentandservice,systematicallyintroduceanddigestadvancedtechnologies,andfinallyrealizethetargetoftakingpartincompetitionintheworldmarketbyincreasingthedevelopmentabilitybyourselvesandevolvingpatenttechnologies.Keywords:cuttingtool,coatingtechnology,CVD,PVD,presentstatus,developingtendency1,,,,,,,,,,(PVD),2(CVD)(PVD),2.1CVD,CVDCVD,TiNTiCTiCNTiBNTiB2Al2O3,,7~9m,,85%,CVD99%;,CVD80%CVD,CVD:,;,;CVD,,,CVD,Krupp.Widia(PCVD),450~650,,TiNTiCNTiC,,PCVD,(MTCVD)CVDMTCVDC/N(CH3CN)TiCL4H2N2700~900TiCNMT3200236!2CVD,8~10m(MTCVD1),(HTCVD)Al2O3TiNMTCVD,1MTCVD,CVD(MTCVD),CVDAl2O3,PVD,,CVD2.2PVDPVD,500,PVD,,,PVD60%PVD,,:CVD,PVD,600(1);,;PVD,,,,PVD,,PVD1PVD[1](MPa)(300)(600)(700)M202109226621292059M302285246923701894PVD,TiNTiCTiCNZrNCrNMoS2TiAlNTiAlCNTiNAlNCNxZX(TiNAlN,2)PVD(ZX3),CBN,,,,,2ZX3ZX4,221968TiCTiNCVD1973TiCNTiC+Al2O3CVD1979TiNPVD1981TiC+Al2O3+TiNAlONCVD1982TiCNMTCVD1984TiCNPVD1986DiamondCBNCVDPVD1989TiAlNPVD()1990TiNTiCNTiCPCVD1991TiAlN+CrCPVD1993TiN+TiCN(CVD)+TiN(PVD)CVD+PVD1993CrNPVD1994MoS2PVD1995TiNAlNPVD1996TiCNMTCVD()1996CNxCVDPVD2000TiAlCNPVD:,;,;,,;,,PVDMTCVD33.1CVDCVD,,,CVD,,();,MTCVD,MTCVD2001,,;PCVD,PCVD,,CVD,MTCVD,CVD3.2PVDPVD,,TiN,,PVD(TiN)PVD,,PVD,,,PVD,PVDTiNTiCNTiN(TiCN3),CNx(4),,PVDPVD,,TiN3[1](r/min)(m/min)(mm/r)()1TiCN14008802144802TiCN14008802141703TiCN14008802143154140088021470:;:TL009,HB195+40;4[2]()TiNCNx16622692380168341554614--2765--18149927180mm1980mm5420mm:HSS1/4∀;:40Cr(HB210);:n=1820r/min,v=363m/min,f=022mm/r;20mm5200236!24PVD4.1,PVD,,,,TiCN,TiN,:(1)PVDPVD,,(),,PVD,PVD;,PVD,,,,,PVD(2)PVD,PVD,;,,,PVD,,,,(BalzersTiNTiCN,30),(3),PVD,PVD,,,,,,,,()(4),(),;,,,PVD(5),50%;,,,(5TiN);,,,5TiN()[3]12345678A14671513137112811180966111511951261B522350126341794512538644478C84451010732178446D46620325284466634347346395E12612839207100684667F13337015416844409177G7251254042004268682078385H384326271543364334I10854257645561054562605731723J62262641133774119071574556:HSS!8mm;:40Cr(HB210);:v=35m/min,f=028mm/r;24mm(6)6,,,80%,,(CVD),,PVD,4.2,,,MoS2,TiN,,TiAlNTiAlCNTiNAlN,TiNPVD,PVD,:(1)PVD,PVD,,#∃,:,,,,,TiN(2),,,,,,(3),,1..#∃(10),20002..,20003.TiN.,1989(2)作者:赵海波,研究员级高级工程师,副总工程师,成都工具研究所,610056成都市二环路东一段16号:%%CWMTE#∃()()200211()#∃6020022002100,100(1),,,,,,,(2),,,,100,,,2002(3),40,7200236!2

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