SEMI标准介绍：SECS-GEM

IntroductiontotheSEMIStandards:SECS/GEMOctober30,2017©2017CimetrixIncorporated.Allrightsreserved.Nopartofthisworkmaybecopied,modified,distributedinanyformorbyanymeans,orstoredinanydatabaseorretrievalsystem,withoutthepriorwrittenpermissionofCimetrixIncorporated,exceptaspermittedbylaw.Violationofcopyrightcarriescivilandcriminalpenalties.-TRADEMARKS-Cimetrixisaregisteredtrademark.CIM300,CIMConnect,CIMFoundation,CIM40,CIM87,CIM90,CIM94,CIM58,CIM116,CIM148,CIM157,SECSConnect,ECCEPlus,TESTConnect,CIMPortal,CIMPortalPlus,EDAConnect,andCIMControlFramework(CCF)aretrademarksofCimetrixIncorporated.Allotherregisteredtrademarksandtrademarksarepropertiesoftheirrespectiveholders.IntroductiontotheSEMIStandards:SECS/GEMPage3of14TableofContents1 Overview...................................................................................4 2 IndustrialUsageoftheGEMStandard...............................................4 2.1 SemiconductorFrontEnd................................................................................................................4 2.2 SemiconductorBackEnd.................................................................................................................4 2.3 FlatPanelDisplay............................................................................................................................5 2.4 SurfaceMountTechnology..............................................................................................................5 2.5 Photovoltaic......................................................................................................................................5 2.6 High-BrightnessLEDs......................................................................................................................5 3 GEMHostandEquipmentCommunication.........................................5 4 SECS-IIMessageCommunication....................................................6 5 FeatureSummary........................................................................7 5.1 Communication................................................................................................................................8 5.2 Control..............................................................................................................................................8 5.3 OperationNotification.......................................................................................................................8 5.4 DataGathering.................................................................................................................................8 5.5 ProcessProgram(Recipe)Management.........................................................................................9 5.6 Spooling...........................................................................................................................................9 5.7 Documentation...............................................................................................................................10 6 GEMCompliance.......................................................................10 7 FrequentlyAskedQuestions.........................................................11 8 GEMTerminology......................................................................13 IntroductiontotheSEMIStandards:SECS/GEMPage4of141OverviewGEMisastandardimplementationoftheSECS-IIstandard,SEMIstandardE5.Mostequipmentinsemiconductor(frontendandbackend),surfacemounttechnology,electronicsassembly,photovoltaic,LED,flatpaneldisplay,andothermanufacturingindustriesworldwideprovideaSECS/GEMinterfaceonthemanufacturingequipmentsothatthefactoryhostsoftwarecancommunicatewiththeequipmentformonitoringand/orcontrollingpurposes.BecausetheGEMstandardwaswrittenwithveryfewsemiconductor-specificfeatures,itcanbeappliedtovirtuallyanymanufacturingequipmentinanyindustry.2IndustrialUsageoftheGEMStandardAllGEM-compliantmanufacturingequipmentshareaconsistentinterfaceandcertainconsistentbehavior.GEMequipmentcancommunicatewithaGEM-capablehostusingeitherTCP/IP(usingtheHSMSstandard,SEMIE37)orRS-232-basedprotocol(usingtheSECS-Istandard,SEMIE4).Oftenbothprotocolsaresupported.ApieceofequipmentcanbemonitoredandcontrolledusingacommonsetofSECS-IImessagesspecifiedbyGEM.WhenequipmenthasaGEMinterface,ittakesjustminutes(orevenseconds)forfactoryGEMhostsoftwaretoestablishcommunicationandbeginmonitoringtheactivityoftheequipment.Thismeansthatequipmentmanu