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1(RAP)(RAE)JobinYvon∆∆∆=Ψ===iispsprrrree)tan(e~~0iρρψ∆tanψpsPolarizeAnalyzerPolarize,Analyzer45Polarizeω0PolarizeφAnalyzersPA[],)sinsin~coscos~(01cossinsincos~00~cossinsincos0100EPArPArEPPPPrrAAAAEpspsf+=⎥⎦⎤⎢⎣⎡⎥⎦⎤⎢⎣⎡−⎥⎦⎤⎢⎣⎡⎥⎦⎤⎢⎣⎡−=sr~pr~(s)(p)PIPIII2sin+2cos+=210ρ0cos∆21212022110100)(cos)()(IIIIIII−=⎥⎦⎤⎢⎣⎡+−=∆ρJobinYvonPolarizer(PhaseModulator)Analyzer)N-Nd(2=10λπδPolarizerModulatordetectorDataacquisitionandcomputerfiltersShutterLightsourceMonochromatorSampleOpticalfiberOpticalfiberδπλωω(t)=2d(N-N)sint=sint01AEt=T(ARASRMMRP-MP)EiI(t)=EtEt*=I[I0+ISsin(t)+ICcos(t)]II0=1-cos2Ψcos2A+cos2(P-M)cos2M(cos2A-cos2Ψ)+cos2(P-M)sin2Asin2Msin2Ψcos∆IS=sin2(P-M)sin2Asin2Ψsin∆IC=sin2(P-M)[sin2M(cos2Ψ-cos2A)+sin2Acos2Msin2Ψcos∆]PMAP-M=45°A=45°M=0IS=sin2Ψsin∆IC=sin2Ψcos∆M=45°IS=sin2Ψsin∆IC=cos2ΨIsIcΨ∆180――JobinYvon1819JobinYvon――JobinYvon――19001962140019681973IR1001977IR100ICP19751983“”198519891996CNRS1998CCDTriax2002LabRAMIRPitt’Con20021988SPEX1995DilorSofieJobinYvon1997――HolibaIBHJobinYvonJobinYvonRamanFLOESICPGDSSystemIRCCD80JobinYvonJobinYvonJobinYvonJobinYvon20002002JobinYvonUVISELA.(50kHz)JOBINYVONS.A.S(1)50kHz10ms/point10100Hzin-situ(2)()(3)1800--(4)(5)JobinYvonUVISEL0º180º)t2sin(b)t2cos(aDC)t(Vω+ω+=PtgtgPtgtgDCa2222+Ψ−Ψ==αPtgtgthPcostg2DCb22+Ψ∆Ψ==βαβΨ∆PΨ∆tgP11tgα−α+=ΨtgPtgP1cos2⋅α−β=∆Ψ∆Ψ+Ψδ=Ψδ⇒δαα−Ψ=Ψδ22tg1)tg()1tg()tg(∆−∆δ=∆δ⇒α−δβ+δα∆α−α=∆δ22222cos1)(cos)1()cos1()(cosCos∆1-1∆=0°180°∆=020°160180°cos∆tgψcos∆IsIc∆cos∆tg∆0180∆=0°180°0.1°47µmSiO2-1.5-1-0.500.511.5020406080100120140160180200ΨΨ∆()47µmSiO2PDPModeling47micronsstructureE(eV)0.90.890.880.870.860.850.840.830.820.810.8Is0.030.0280.0260.0240.0220.020.0180.0160.0140.0120.010.0080.0060.0040.0020-0.002-0.004-0.006-0.008-0.01-0.012-0.014Ic0.0260.0240.0220.020.0180.0160.0140.0120.010.0080.0060.0040.0020-0.002-0.004-0.006-0.008-0.01-0.012-0.014-0.016-0.018-0.02-0.022•0.01eV0.5nmJobinYvon•0.030.01∆n≈0.01JobinYvonUVISEL4602601700B.JYUVISELUVISEL“21”20.050.10.20.5mm1mmJobinYvonJonbinYvon12345polariseranalyser/PEMUVISELUVISELmapping,mappingJYUVISELC.JobinYvonPCServer(Controler)PCClientRJ45ControlerClientClientClientControlerClientServerControlerClientD.JobinYvon10“”30UVISELFig.TheBenchTopUVISELEllipsometryFig.ThemainpartoftheUVISELEllisometryAutocollimationsystemCCDCamera(option)Modulatorhead(temperaturecontrolled)MicrospotheadXYstage(option)Automaticgoniometer(option)