激光器高反膜

1112(1,430074)(2,116023):(highlyreflectivecoating),,:,,ProgressinresearchondielectricmultilayercoatinghighlyreflectiveoflaserresonatorXiongFeng1QiaoXueliang1ChenJianguo1SunLing2(1HuazhongUniversityofScienceandTechnology,Wuhan430074)Abstract:Presentstatusofstudyondielectriccoatinghighlyreflectiveisintroducedwithemphasislaidonthefocalpointsandsomeimportantachievementsinthefieldofdesignprinciple,manufacturingmethods,performancemeasurementandlaser2induceddamagethreshold.Theprospectiveofimprovingtheperformanceofthehighlyreflectivecoatingisalsodiscussed.Keywords:dielectric,highlyreflectivecoating,laser2induceddamagethreshold1X,,,,,;24,,,,,,,:,;,,,(-),,9919%,0101%,,21:Mj=cosjisinj/jjjsinjcosj(1),j=2-1njdjcosj,;j=nj/cosj(TM),=njcosj(TE),;,:BC=mj=1cosjisinj/jjjsinjcosj1m+1(2),,Sub/(HL)sH/air()Sub/L(HL)sH/air(MoSi):Rmax=1-(nH/nL)2s(n2H/ng)1+(nH/nL)2s(n2H/ng)2(3)Rmax=1-(nH/nL)2sng1+(nH/nL)2sng2(4),HL,,m,,100%12002231LASERJOURNAL(Vol.23.No.1.2002)X20016282001915©1995-2003TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,,,,,(111)2,HfO2TiO2Ta2O5ZrO2,,1:1HfO2,,TiO2,,,ZrO2,,,,,Gd2O3Er2O3Y2O3,,,,SiO2,,,,2:2nkSubstrateNkCoatingmaterialsnkSi31511310-6SiO21144721210-6Mo11746148TiO221271910-5Cu015157106HfO221021010-5Ag014258161ZrO2211121010-5SiO211447Ta2O5210521010-63,;,,,,,,,(IAD)(IBAD)(PIAD)(PLD)311,,,,9919%,9919998%11,,,;,,;,,,,,,,,,,,,,-,,-SiO2,,,-TiO2/SiO2ZrO2/SiO21416,,,,,,,,,,,,4,,;,,22002231LASERJOURNAL(Vol.23.No.1.2002)©1995-2003TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.411,,1721:(Ellipsometer)(tan)(122);((EDS)(WDS)(SEM)X(XPS)(STM)(AFM);;,:;221ERD(elasticrecoildetec2tion)TiO2,,,(k110-4),,412,8,13,15,17,2227,();;;;()LeonL.Shaw,,,,,,,,,,,M.Reichling:,ShiuhChaoTiO22SiO2,,,:,,327;;,,,,,,413,100%,,,(),:();,,2728,,:,,;PhilipBaumeister29,;,32002231LASERJOURNAL(Vol.23.No.1.2002)©1995-2003TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.22,30,5,,,,,,,,100%,,,111:,19842,11,1998,10(4):518-5223L.Pichon,T.Girardeau,A.Straboni.Ionbeamassistedde2positionofzirconiumnitridesformodulatedopticalindexstructures.NuclearInstrumentsandMethodsinPhysicsRe2search,1999,B(147):378-3824HansjorgNiederwald.Low2temperaturedepositionofopticalcoatingsusingionassistance.ThinSolidFilms2000,377-378:21-265A.Husmann,J.Gottmann,T.Klotzbucher.Pulsedlaserde2positionofceramicthinfilmsusingdifferentlasersources.SurfaceandCoatingTechnology,1998,100-101:411-4146,,11,2000,6(2):63-707A.Husmann,J.Gottmann,T.Klotzbucher.Pulsedlaserde2positionofceramicthinfilmsusingdifferentlasersource.SurfaceandCoatingsTechnology,1998,100-101:411-4148HansK,Pulker.Opticalcoatingsdepositedbyionandplas2maPVDprocesses.SurfaceandCoatingsTechnology,1999,112:250-2569S.Miyake,Y.Setsuhara,Y.Sakawa.Developmentofhigh2densityRFplasmaandapplicationtoPVD.SurfaceandCoatingsTechnology,2000,131:171-17610HansK.Pulker.Opticalcoatingsdepositedbyionandplas2maPVDprocesses.SurfaceandCoatingsTechnology,1999,112:250-25611,11,1997,9(3):423-42812,11,1999,11(5):565-56813FloryFR.Thinfilmsforopticalsystems.NewYouk,MarcelDekker,Inc.1995:140-14114ThomasIM.SinglelayerTiO2andmultilayerTiO22SiO2opticalcoatingspreparedfromcolloidalsuspension.Appl.Opt.,1987,26:2688-269315QinyuanZhang,JunShen,JueWang.Sol2gelderivedZrO22SiO2highlyreflectivecoatings.InternationalJournalofIn2organicMaterial,2000,2:319-32316R.Gordon,Chemicalvapordepositionofcoatingsonglass.JournalofNon2crystallineSolids,1997,218:81-9117J.P.Roger,P.Gleyzes,H.EiRhaleb,etal,Opticalandthermalcharacterizationofcoatings.ThinSolidFilms,1995,261:132-13818DonaldA.Jaworske,Correlationofpredictedandobservedopticalpropertiesofmultilayerthermalcontrolcoatings.ThinSolidFilms,1998,332:30-3319,,11,1999,29(1)31-3320J.Viard,E.Beche,XPSandFTIRstudyofSiliconOxyni2trideThinFilms.JournalofEuropeanCeramicSociety,1997,17:2025-202821S.Mandl,G.Thorwarth,M.Schreck,Ramanstudyoftita2niumoxidelayersproducedwithplasmaimmersionionim2plantation.SurfaceandCoatingsTechnology,2000,125:84-8822M.Kidemo,B.Drevillon,Real2timecontrolofthedeposi2tionofopticalcoatingsbymultiwavelengthellipsometry.SurfaceandCoatingsTechnology,1998,100-101:480-48523DjaffarBOUSSAA,Optimizingacompositionallygradedinterlayertoreducethermalstressesinacoatedtube.Me2chanicsofsolidsandstructures,2000,328b:209-21524LeonL.Shaw,Thermalresidualstressesinplatesandcoat2ingscomposedofmulti2layeredandfunctionallygradedmaterials.ElsevierSciencelimited,1998,199-21025M.Reichling,A.Bodemann,N.Kaiser,Defectinducedlaserdamageinoxidemultilayercoatingsfor246nm.ThinSolidFilms,1998,320:264-27926,,1HfO2/SiO2YAG1,2000,20(2):13-1627ShiuhChao,Wen2HsiangWang,Min2YuHsu,Characteris2ticsofion2beam2sputteredhigh2refractive2indexTiO22SiO2mixedfilms.OpticalSocietyofAmerica,1999,16:1477-148328Yu.S.Kaganovskii,V.D.freilikher,E.Kanzieper.Lightscatteringfromslightlyroughdielectricfilms.OpticalSo2cietyofAmerica,1999,16:331-33829PhilipBaumeister,Dependenceofthereflectanceofamul2tilayerreflectoronthethicknessoftheouterlayer.AppliedOptics,1999,38(28):6034-603530B.T.Sullivan,J.A.Dobrowolski,G.Clarke,Manufactureofcomplexopticalmultilayerfilter