莫尔条纹干涉光学系统仿真设计

清华大学2012届毕业设计说明书摘要随着激光技术、近代光学和计算机技术的发展，产生了全息干涉法、散斑干涉法、莫尔条纹干涉法和数字图像处理为主要研究和研究内容的“现代光测新领域。莫尔条纹干涉法是八十年代初兴起的一种具有非接触测量、可进行全场和实时分析的高灵敏度大量程的光学测量方法，通常使用频率为600~2400线/mm的高密度光栅。作为八十年代初期才发展起来的一种现代光测力学方法，莫尔条纹干涉法由于具有高灵敏度、大量程、非接触、全场和实时观测的优点受到广泛重视。本文总结了莫尔条纹干涉法采用的光路种类，比较优缺点。通过理解莫尔条纹的形成原理和其测量温度的原理，设计了用于温度场测量的莫尔条纹干涉法光路测试系统。在对莫尔条纹干涉法测量温度场的基本原理研究的基础上，分析并掌握了莫尔条纹的形成规律，设计光路测试系统，利用光学设计软件ZEMAX中进行了仿真设计，对仿真得出测量结果进行分析。深入讨论了仿真设计中光学参数对莫尔条纹干涉法测量温度的影响。本设计的内容对莫尔条纹干涉法在温度场测量的应用具有一定的参考价值。关键词：莫尔条纹干涉法，温度场测量，ZEMAX仿真设计清华大学2012届毕业设计说明书AbstractWiththedevelopmentoflasertechnology,modernopticsandcomputertechnology,somemodernopticalmeasurementfieldsappeared,suchasholographicinterferometry,speckleinterferometry,moireinterferometryanddigitalimageprocessing.MoireInterferometrytheisanoncontactmeasurementappearedintheearly1980s.Ithasmanyadvantageswithhighsensitivityoftheaudienceandreal-timeanalysisofalargerangeopticalmeasurementmethod.Usuallyahighdensroygrettingwith600to2400lines/mmcanbeused.Asamodernmechanicalmethodsofopticalmeasurement,moireinterferometrymethodhashighsensitivity,alargenumberofprocess,non-contact,wholefield,alargemeasuringnrangeandreal-timeobservationsadvantageofwidespreadattention.Thispapersummarizesthetypesofopticalmoirefringeinterferometry,andcomparesadvantagesanddisadvantages.Throughunderstandingtheformationofmoirefringeprincipleandtheprincipleofmeasuringtemperature,wedesignedthemeasurementoftemperaturefieldbaseonmoirefringe.BasedontheMoirefringeinterferometryformeasuringoftemperaturefield,weanalyzedandmasteredthemoirefringeformationrule,anddesigntheopercaltestsystem.Further,wesimuatedtheopticalsystembyopticdesignsoftwareZEMAX.Simulationmeasurementresultswereanalyzed.TheopticparametersinthetestsystemhavebeendiscussedandconcludetheeffectsoftheMoirefringeinterferometrytomeasurethetemperature.Thecontentsofthisdesignonmoirefringeinterferometryhasacertainreferencevalueformeasuringinthetemperaturefieldapplications.Keywords:moirefringesimulation,thetemperaturefieldmeasurements,ZEMAXsimulation清华大学2012届毕业设计说明书第I页共II页目录1绪论...........................................................................................................................11.1课题背景................................................................................................................11.2莫尔条纹技术的发展............................................................................................11.2.1莫尔条纹技术的分类..........................................................................................21.2.2莫尔条纹干涉技术应用.....................................................................................21.3课题的研究意义及内容.........................................................................................31.3.1课题的研究意义.................................................................................................31.3.2课题的研究内容.................................................................................................32莫尔条纹干涉法原理及几种典型的光路系统.....................................................42.1莫尔条纹干涉法原理............................................................................................42.1.1莫尔条纹.............................................................................................................42.1.2莫尔条纹干涉法基本原理.................................................................................42.2莫尔条纹干涉法中的几种常用光路....................................................................82.2.1双光束光路系统.................................................................................................82.2.2三反镜光路系统.................................................................................................92.2.3大准直镜光路系统..............................................................................................92.2.4光栅分光光路系统...........................................................................................102.3小结......................................................................................................................103莫尔条纹干涉法测量温度的系统设计...............................................................113.1莫尔条纹干涉法光路测试系统..........................................................................113.2光学参数的选取..................................................................................................113.2.1两光栅之间夹角θ.............................................................................................113.2.2两光栅之间距离d的选取...............................................................................123.3小结......................................................................................................................124利用ZEMAX软件进行光路仿真设计..................................................................134.1系统设计..............................................................................................................134.1.1仿真程序模式选择...........................................................................................13清华大学2012届毕业设计说明书第II页共II页4.1.2元件选择和参数设置.......................................................................................134.1.3生成3D