影响超精密加工精度的主要因素

©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:(1970-),,,,(1972-),,,,,(1972-),,,,,1,2,3(11,512005;21,226000;31,226000):,:;;:TG8:A:1007-5348(2000)02-0079-06,,,,,,;,,,,011m,m,,IT-1,1,212()Vol121No1220004JournalofShaoguanUniversity(NaturalScience)Apr12000©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.()10-510-6,,,,,,,,,:(1)(2)(3),,,(1),99199%Al991999199%Mg(2),,,,,,(3),,,,,119mm,,,,,,,,,,2211,,1m,01075m,,,,,011m,,,08()2000©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:;;;212,,,,,CBN,,,213,,,3,,011m,Rmax0102m,,311,,,,,,312100N/m,,182,,:©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.()411,,1/4,,,,,(011m),,,0101m,,,,412,:;;,,nm:,;413(STM)011nm,,,,528()2000©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:51111,51112,,,51113,,,,,,,,,,,,,,,51251211,,,,,100~,100(015m100)51212,,40%RH,50%RH,,40%50%RH,5%151213,,,,,382,,:©1994-2010ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:[1]1[M]1:,1993.[2],1[J]1,1999(3)1[3]1[J]1,19991(2).[4],1[M]1:,1991.[5]()1[M]1:,1986.TheMainInfluentialFactorsofUltra-precisionManufacturingAccuracyHUANGChang-zheng1,WANGJian-ping2,ZHUYu3(11DepartmentofPhysics,ShaoguanUniversity,Shaoguan512005;21NantongDieselEngineJoint-stockLimitedCompanyNantong226000;31NantongInstituteofTechnology,Nantong226000)Abstract:Thetechniqueofultra-precisionmanufacturingissummarizedinthispaper.Themaininfluentialfactorsofultra-precisionmanufacturingaccuracyandsomemeasuresofim2provingitsmanufacturingaccuracyarediscussed1Keywords:ultra-precisionmanufacturing;manufacturingaccuracy;influentialfactors48()2000