电子特种气体基础知识

2„1.9•SiH4;PH3;B2H6;AsH3;GeH4;H2;CH2F2;SiH2Cl2;SiHCl3…….9•O2;NF3;N2O;Cl2;ClF3;NO……9•HCl;HBr;BCl3;BF3;SiCl4;WF6;Cl2;SiHCl3;SiH2Cl2……9•N2;He;Ar;Kr;Xe;CF4;C2F6;C3F8;CHF3……„2.3Chapter1:ESGBasicKnowledge:999999994„3.D•15psig6000psig.„4.Dz•–,CO;AsH3;PH3;Cl2……•:TLV:TLV-TWA:STEL:LC50:LD50:•–Chapter1:ESGBasicKnowledge5Chapter1:ESGBasicKnowledgeTLV-TWASTELPELIDLHLC50LD50PPMPPMPPMPPMPPM/4hourmg/kgCF4N/AN/AN/AN/AN/AN/ANH3SiH4PH3GeH4B2H6AsH3Gas6Chapter1:ESGBasicKnowledgez¾¾¾z¾¾¾¾Emergency¾¾¾¾¾7Chapter1:ESGBasicKnowledge9z¾¾¾¾z¾¾¾z¾:HCl;HBr;Cl2;BF3;BCl3;SO2¾:NH38Chapter1:ESGBasicKnowledge9z:z:¾Disilane:54C(130F)¾Silane:¾Phosphine:100C(212F)¾Diborane40to50C(104-122F)¾Germane:z:,¾¾¾¾9Chapter1:ESGBasicKnowledge9zDOT::¾;¾;¾z¾(LFL):4.0%¾(UFL):75%z¾Hydrogen,CarbonMonoxide;Methane;Propane;Ethylene,Acetylenez-¾¾¾¾z(ignition),,20.¾;;;¾¾10Chapter1:ESGBasicKnowledgeGasSiH4NH3H2C2H2CH4PH3B2H6GeH4FlammableRange1.4~96%15~27%4~75%2.5~82%5~15%1.6~98%0.8~98%N/A119z:z:¾Oxygen¾Fluorine¾Chlorine¾NitrousOxide(Unstable)¾NitrogenOxide¾ChlorineTrifluoride¾NitrogenTrifluoridez¾(,)¾¾Chapter1:ESGBasicKnowledge12Chapter1:ESGBasicKnowledge9z():¾.¾,19.5%¾:•Nitrogen•Argon•Helium•SulfurHexafluoride,etc.13Chapter1:ESGBasicKnowledgez¾:¾:•CarbonMonoxide•HydrogenSulfide•Hydrogencyanide9z:2380F(-1500C)z:¾Argon:¾Helium:¾CarbonMonoxide:¾CarbonDioxide:¾Hydrogen:¾Nitrogen:¾Oxygen:14Chapter1:ESGBasicKnowledgez¾.¾.¾z¾¾15Chapter1:ESGBasicKnowledge9z15psigz:¾Dichlorosilane¾Trichlorosilane¾SiliconTetrachloride:1.DichlorosilaneTrichlorosilane;2.15-30psig16Chapter1:ESGBasicKnowledge9z:z::¾Fuel-OxidizerCO+O2N2O+SiH4¾Acid-BaseHCl+NH3:1.;2..3.4.23.5%17„DDDD„DDDDChapter2:Silane18Chapter2:Silane„PPEDDDD19Chapter2:Silane„D•••D•••MSDS20Chapter2:Silane„PPEDDDD21Chapter2:Silane„DMDAD/DDDDGN2DD„DDD22Chapter2:Silane„DDDDPPEPPEDPPEPPE23Chapter3:Ammonia„D21.1C(70F)psig:114.1DD„DDDD„DD„DD24Chapter4:20051123MOTECH13025Chapter5:26