Sentaurus学习指南

PredictableSuccessSentaurusTCADTrainingforCMOSApplication©2007Synopsys,Inc.(2)PredictableSuccessCourseOutline•SentaurusTCADOverview•SentaurusWorkbench•SentaurusProcess1D&2D•TecplotSV•SentaurusStructureEditor–BuildingMeshes•SentaurusDeviceI-Vsimulation•Inspect©2007Synopsys,Inc.(3)PredictableSuccessCourseOutline•90nmnMOSFETExercise•C-VDeviceSimulation•BreakdownDeviceSimulation•pMOSFETDeviceSimulation•Ligamentintroduction•SolvNetResourcesSolvNetIntroduction2DStrainedSilicon45nmCMOSReferenceFlowDemo3DnMOSFETDemoPredictableSuccessSynopsysTCADOverview©2007Synopsys,Inc.(5)PredictableSuccess•Deepsubmicrontransistor•Sophisticatedmodels•AtomisticmodelingCMOS•High-speeddevice•Compoundsemiconductor•Complexstructure&process•Mixedmodesimulation•Flash•DRAM•LED,LASER•Imagesensor•Photodetector•SolarcellMemoryPowerRFOptoTCADApplicationMarketsAl0.3Ga0.7AsGaAsEmitterCollectorBaseTCADApplicationAreas©2007Synopsys,Inc.(6)PredictableSuccessTechnologyDevelopmentSentaurusProductFamilySentaurusLibrarySentaurusStructureEditorManufacturingControlCalibrationIntegratedTCADFlowfromDevelopmenttoManufacturingSentaurusWorkbenchFlexibleFrameworkEnvironmentAdvancedVisualizationSentaurusProcess2D/3DProcessSimulationCalibrationLibraryStructureEditorInterfaceSentaurusDevice2D/3DDeviceSimulationStructureEditorandMesherApplicationSpecificOptionsSentaurusTFMPCMStudioProcessCompactModelsBasedonCalibratedFlowLinksProcessVariationandDevicePerformance©2007Synopsys,Inc.(7)PredictableSuccessFramework•ProvidesaGUI-basedsimulationenvironment•Organizessimulationprojects,runsandresults•AllowslargeDesignofExperiment(DOE)andstatisticalanalysis•Managesjobscheduling&networkcomputing•Enablesinteractivevisualizationandanalysisofsimulationresults©2007Synopsys,Inc.(8)PredictableSuccessSentaurusDevicePCMStudioSentarusWorkbenchSentaurusProcessTCADProductArchitectureSentaurusDeviceEditorMeshSentaurusProcess©2007Synopsys,Inc.(9)PredictableSuccessProcessSimulation•ModelswaferfabricationstepsImplantation,diffusion,oxidation&lithographymodelsarecalibratedandhighlypredictiveEtchinganddepositionaretypicallymodeledgeometrically•Startsfromflowdescriptionandlayout90nmnFETTCADprocessfloweditor©2007Synopsys,Inc.(10)PredictableSuccess3DEmulationFromlayoutandgeometricalphoto,etch,&depositiontogenerate3Dstructure.2Dand3DiterativeeditorIntuitiveuserinterfaceInteractivescripting•recordGUIactions•type/pastescriptcommand•easytodebugStructureEditor©2007Synopsys,Inc.(11)PredictableSuccessDeviceSimulation•Modelstheelectrical,optical,mechanical&magneticbehaviorofsemiconductordevicesSimulationistypicallyperformedonstructurescreatedbyprocesssimulationModesofsimulation•Static,time-dependent,largeandsmallsignalfrequencydependentandnoisemodeling•HighlyaccurateCADmodelscanbeextractedfromdevicesimulationresultsSimulatedelectricalcharacteristicsSimulatedcurrentdensityandflowlinesin100nmdevice©2007Synopsys,Inc.(12)PredictableSuccessPCMStudio•PCMactsasalinkbetweentheYieldManagementSystem(YMS)andTCADPCMfromTCADIn-processMetrologyandDeviceCharacteristicsfromManufacturing•Graphical&Statisticalanalysis•Visualizationofexperimentaldata•Visualizationofprocess-devicerelations•AlgorithmicanalysisReverseanalysisFeed-forwardanalysisProcessWindowanalysis©2007Synopsys,Inc.(13)PredictableSuccessTCADConsultingandEngineering•Dedicatedteamofhighlyproficientengineerswithlongprofessionalexperience•ClosecollaborationwiththeSynopsyssoftwareengineers•Closecollaborationwithcustomersinconsultingandengineeringprojects•ServiceprojectexamplesCalibrationProcessanalysisandoptimizationDifficultsimulationtypes,suchas3D,full-chip,SEU/SER,ESDCustomerspecifictechnologytemplatesCustomerspecifictrainingandknow-howtransferModeldevelopmentandintegrationSoftwareintegration:TCADFabLinkDedicatedengineeringprojects©2007Synopsys,Inc.(14)PredictableSuccessSynopsysTCADUsedby19outof20topsemiconductorcompaniesworldwideSynopsysTCADTodayComplementaryConsultingandEngineeringServiceOfferingsTechnicalandmarketleadershipacrossalltechnologies:DSM,Power,Memory,CompoundandOptoelectronicsStrongR&Dprogramwithresearch&academiaDedicatedsupportorganizationfocusingoncustomersuccessPredictableSuccessSentaurusWorkBench(SWB)©2007Synopsys,Inc.(16)PredictableSuccessSentaurusWorkbenchLigamentSProcessStructureEditorSDeviceSNMeshTecplotSV(2D,3D)Inspect(1D,XYplot)(aGUItooltoassembleprocessflowandlayoutdata,thentranslatetotheinputfileofSProcess)©2007Synopsys,Inc.(17)PredictableSuccessSentaurusWorkbenchToolFlowParametersBarSimulationNodesProjectDirector&ExampleLibraryMenuBarColorChart–indicatingthestatusofeachnode©2007Synopsys,Inc.(18)PredictableSuccessOverview•SentaurusWorkbenchistheprimarygraphicalfrontendthatintegratesSynopsyssimulationprogramsintooneenvironment.•Simulationsarecomprehensivelyorganizedintoprojects.•SentaurusWorkbenchautomaticallymanagestheinformationflow,whichincludespreprocessingofuserinputfiles,parameterizingprojects,settingupandexecutingtoolinstances,andvisualizingresults.•SentaurusWorkbenchallowsuserstodefineparam