半导体激光器的设计和工艺

12.•1.•2.Fabry-Perot()•3.()•4.•5.•6.•7.VCSEL•8.•9.3.•1.TETM•2.•3.(VCSEL)•4.•5.DFB•6.DFB•7.•8.4.•1.•2.•3.•4.•5.•6.•7.5.•1•2•3.3dB•4.•5.•6.•7.•8.•9.•10.6.1.2.3.4.7.•1.1.2.3.(a)(b)(c)(d)8(1970)•1970RT-CWGaAs/AlGaAsDHLD:Z.Alferov,IEEEJ.STQE,vol.6,p.832(2000)(RT-CW1.5µmGaInAsP/InPLD,JJAP,vol.18,p.2333,1979)92.Fabry-Perot()•r1r2exp(i2βl+gl)r1r2r2exp(iβl+gl/2)exp(iβl+gl/2)r1r2exp(i2βl+gl)=1l:r1r2exp(gl)=1:2βl=2mπ(m,β=2πn/λ)⇒δλ=λ2/(2ngl)ng=n-λdn/dλn20~30%GaAsInGaAsPng=4~4.5103.()P-N-(a)(b)(a)(b)11PNP(c)(d)Si-(e)(f)cd)(e)(f)124.•NiPIEcEvEgnEcEvEcEv(DH)(SCH)135.1VCSEL2DFBDBR(C3):VCSEL14DFBDFB:(a)(b)λ/4(c)(d)(e)DFB15SOAEADFBK.Kudo,IEEEPTL,vol.12,p.242(2000)16(DBR)()(VCSEL):176.•••DFBNortel,JDSUniphase•Fujitsu•DBRADC,Agere,Agility•,Alcatel,JDSUniphase•Marconi,MultiplexN•NewFocus,Iolon,•BlueSky••VCSELBandwidth9,l1819DBR20DBR:T.L.Kochetal,APL,vol.53,p.1036(1988)21Superstructure-gratingDBRlasers(NEL)e-beam,lowpower)22R.O’Dowd,IEEEJ-STQE,vol.7,p.259(2001)23VCSELC.J.Chang-Hasnain,IEEEJ.STQE,vol.6,p.978(2000)247.VCSELA.Karimetal,IEEEJ.STQE,vol.6,p.1244(2000)25VCSELDBR1550-nmVCSELDBRDBRκ1κ2W/cmK)268.SubstrateElectrodeActiveregionOpeninglengthETROutputwaveguideY.Z.Huangetal,IEEEJ.QE,vol.37,p.100,p.1259(2001)J.K.Hwang,IEEEPTL,vol.12,p.1293(2000)A.Yariv,IEEEJ.STQE,vol.6,p.1478(2000)M.FujitaetalIEEEJ.STQE,vol.5,p.673(1999)279.K.Iga,IEEEJ.STQE,vol.6,p.1201(2000)284.55.05.56.06.5-2-1012341.55µm1.3µmSiGaInNAsAlSbInPGaSbAlAsInSbGaPInAsGaAsInNGaNBand-gapenergy(eV)Latticeconstant(A)GaAsGaInNAs29(AlInAs/GaInAs)F.Capasso,IEEEJ.STQE,vol.6,p.931(2000)30.•1.TETMXZjnjgjdjx-z)(exp)(),,(tizixtzxωβφφ−=,φ(x,z,t),TEEy(x,z,t)Hx(x,z,t)andHz(x,z,t)TMHy(x,z,t),Ex(x,z,t)andEz(x,z,t).0),,()(),,(2202=+∇tzxxnktzxφφk0=2π/λ,n(x)=nr(x)-ig(x)/2k031j)exp()exp()(xiKBxiKAxjjjj−+=φj,)(212220β−=jjnkK)exp()exp(11,1−−−=nnnnnnnziKBRziKA).exp()exp(,nnnmnnnnziKARziKB=−1)2exp(,1,=nnmnndiKRR⇒32)2exp(1)2exp(111,11,111,11,1,−−−−−−−−++=nnnnnnnnnnndiKRRdiKRRR)./()(111,−−−+−=nnnnnnKKKKRTMKnKn-1Kn/nn2andKn-1/nn-1220222)sinexp()(cos)(∫=dxxikxRUθφλθθ332.•β=βr+iβiN=βr/k0,•G=-2βi.•Ey(x)Ey*(x)TEHy(x)Hy*(x)(TM,ΓTMEx(x)Ex*(x)TM•(γ=G/gi,)()()(022TEyiyrTENndxxENdxxExnΓ=∫∫=∞∞−γ,)()(])()()[(202222TMxrizxrTMNNndxxExndxxExExnNΓ≈∫∫+=∞∞−γY.Z.Huang,JAP,vol.79,p.3827(1996),IEEProc.Opto,vol.148,p.131(2001)34Γ(1.55µm)3.550.01µmd(µm)0.050.10.20.30.4Γ(%)0.941.421.751.691.543.3-1.0-0.50.00.51.00.00.20.40.60.81.01.21.41.60.05µm0.4mm0.3µm0.2µmd=0.1mmSquaredElectricFieldDistance(µm)-40-20020400.00.51.01.52.02.53.03.54.04.50.05µm0.4µm0.3µm0.2µmd=0.1µmFarFieldDistributionAngle(degree)n=3.17d351.55µmMQW(66-nmQW)G/gTEmode0.06660.0603TMmode0.04270.0472TE/TM1.561.28G/gair-Si-SiO2G/gSi(1.3µm)0.00.10.20.30.40.50.00.20.40.60.81.01.21.4TM1TE1TM0TE0G/gThicknessofSiLayer(µm)363.(VCSEL)ψ(z,t)=ϕ(z)exp(-iωt)jϕ(z))exp()exp()(ziKBziKAzjjjj−+=ϕjj=1,2,,m)KjnjKj=k0nj=k0(njr+iκj)1)2exp(,1,=jjmjjdiKRR37VCSEL-1.5-1.0-0.50.00.51.01.50123SquaredelectricfieldDistance(µm)0123RefractiveIndex-1.5-1.0-0.50.00.51.01.50.00.51.01.52.0SquaredelectricfieldDistance(µm)Kj=k0nj=k0(njr+iκj)212220)(β−=jjnkK384.••rad(s)=F(s)exp(iz))()exp()()exp()(xzixRzixradiiϕβϕβϕϕ++−=−)exp()(zisGΓ−=φ39∫=∞+0)exp()sin()(),(zidssxsezxEBBBγ),()()(),(zxEexREexEzxEBziizii++=−−ββ,(z0)ziitxfedtetezxEβ−∞+∞−−+∫=)(),((z0):40TETM0.00.20.40.60.81.00.300.350.40p=10%p=5%p=3%TEPLANTFSRMHSRMPowerreflectivityRThicknessd(µm)0.00.20.40.60.81.00.250.260.270.280.290.300.310.32TMp=3%p=10%p=5%PLANTFSRMHSRMPowerreflectivityRThicknessd(µm)n1=3.6n2=3.6(1–p)0.86m0.02m1m415.DFB])[,(),,,()()(ztjbztjfeEeEyxtzyxβωβω+−+=UE∑∆=∆≠Λ−02),(),,(lzjlleyxzyxπεεΛ=−=−−zjflbzjblfezEjkdzzdEezEjkdzzdEδδ22)()()()(δ≡β-β0β0=lπ/ΛdAdAyxkkll2220),(2∫∫∆=±±UUεβ42])()([),,(00zjzjezBezAzyxββ+=−UE+=−−=−BjAjkdzdBAjBjkdzdAllδδzzzzeBeBBeAeAAσσσσ2121+=+=−−2222δδσ−=−=−kkkllcos(2πz/Λ-φ)φjkek±±=1)2(0kgjnnnkggxyggδδλπ+Γ=436.DFB154015451550155515600.00.20.40.60.81.01.2n=3.2,3.2-∆n,g=0∆n=0.005(red),0.01(blue),0.02(green)TransmissionWavelength(nm)498λ/4(λ=1550nm)….154015451550155515600.00.20.40.60.81.01.2∆n=0.02,thefirstlayerthicknessisλ/8(red)andλ/16(blue)TransmissionWavelength(nm)1545155015550.00.20.40.60.81.01.2n=3.2,3.2-∆n,g=0∆n=0.005(red),0.01(blue),0.02(green)TransmissionWavelength(nm)99849844498λ/4DFB(λ=1550nm)153515401545155015551560156515700.1110100∆n=0ReflectivityWavelength(nm)15351540154515501555156015650.00.20.40.60.81.01.2∆n=0.02andaddλ/4shiftatthecenterlayerTransmissionWavelength(nm)g=0,200cm-1g=0,50cm-1g=0,50cm-1(red);0,100cm-1(green);0,200cm-1(blue)λ/4457.•N1N2N3.WWN1N2N3.TE(TM)TE(TM)TM(TE)EEEYXYX46VCSELneff1DVCSELλ1λ0λ1∆neff/neff=(λ1-λ0)/λ0λ0λ1θcosθ=λ0/λ1G.R.Hadley,Opt.Lett.,vol.20,p.1483(1995)47r0.5(x)213.0rrba−+≤(y)XYR.A.Sorefetal,IEEEJ.QE,vol.27,p.1971(1991)488.BPMψψψψψε]),,([2]exp[),,(),,(0),,(222022220022rrronzyxnkyxznjkznikzyxzyxEEkzyxE−+∂∂+∂∂=∂∂−==+∇nrzFFT-BPMFD-BPM49FDTD(PadeFDTDFDTDQFDTD⇒FFT⇒⇒QPadeFDTD⇒FFT/Pade⇒⇒QFDTD⇒Pade⇒⇒QPadeFDTDFFT1/101/50W.H.GuoetalIEEEPTL,vol.12,p.813(2000),IEEEMWCL,vol.11,p.223(2001)Y.Z.Huangetal,IEEProc.-Optoelectron(2001.12)503µmFDTD1122334455112233XX((µ