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I原子力显微镜在材料科学研究中的应用摘要此论文简要叙述了原子力显微镜的工作原理及特点，介绍其在材料科学中的应用，指出原子力显微镜在材料的研究过程中有广阔得应用前景。原子力显微镜为扫描探针显微镜家族的一员，具有纳米级的分辨能力，其操作容易简便，是目前研究纳米科技和材料分析的最重要的工具之一。原子力显微镜是利用探针和样品间原子作用力的关系来得知样品的表面形貌。至今，原子力显微镜已发展出许多分析功能，原子力显微技术已经是当今科学研究中不可缺少的重要分析仪器。关键词：原子力显微镜，材料，扫描探针，表面形貌IIApplicationApplicationApplicationApplicationofofofofAtomicAtomicAtomicAtomicForceForceForceForceMicroscopeMicroscopeMicroscopeMicroscopeininininMaterialMaterialMaterialMaterialResearchResearchResearchResearchABSTRACTABSTRACTABSTRACTABSTRACTThepricipleandcharacterofatomicforcemicroscopeisdepictedbythisarticleandwealsointroducedtheapplicationofatomicforcemicroscope.Greatsuperiorityandpotentialofapplicationinfieldofmaterialisshowed.Atomicforcemicroscopeisnumberofthescanningprobemicroscopefamily.Itiscapableofgenerating3Dimagesofsurfacetopographywithnanometer.Alsoitwillbeoperatedeasily.Consequently,itisthemostusefulinstrumentwhichcanbeutilizedfornanometertechnologyandmaterialresearchatpresent.atomicforcemicroscopescansthesurfacebytheforceofatomicrange,whichgeneratedbytheprobeandthespecimens.Nowadaystheatomicforcemicroscopehaveownedmanyanalyticalfunctions.Andtheatomicforcemicroscopictechnologyisindispensableinthetechnologicalresearchcurrently.KEYKEYKEYKEYWORDSWORDSWORDSWORDS::::atomicforcemicroscope,material,scanningprobe,surfacetopographyIII目录摘要...........................................................................................................................................IABSTRACT...............................................................................................................................II1原子力显微镜的基本知识.....................................................................................................11.1显微技术概述..............................................................................................................11.1.1前言...................................................................................................................11.1.2原子力显微镜(AFM)综述...............................................................................11.2原子力显微镜工作原理..............................................................................................21.2.1原子力显微镜原理概述...................................................................................21.2.2原子力显微镜的基本操作模式.......................................................................31.2.3原子力显微镜量测架构...................................................................................41.3原子力显微镜的功能技术..........................................................................................51.3.1相位式原子力显微镜.......................................................................................51.3.2扫描式磁场力显微镜.......................................................................................51.3.3侧向力显微镜...................................................................................................61.3.4扫描式热梯度探针显微镜...............................................................................71.3.5扫描式电场力显微镜.......................................................................................71.3.6液相原子力显微镜...........................................................................................81.3.7微影操控术.......................................................................................................82原子力显微镜在材料科学研究中的应用...........................................................................102.1在材料科学方面中的应用........................................................................................102.1.1三维形貌观测.................................................................................................102.1.2纳米材料与粉体材料的分析.........................................................................112.1.3成分分析.........................................................................................................122.1.4晶体生长方面的应用.....................................................................................132.1.5在薄膜技术中的应用.....................................................................................142.2在其它有关方面中的应用........................................................................................172.2.1在生物学中的应用.........................................................................................172.2.2在物理学中的应用.........................................................................................182.2.3在化学中的应用.............................................................................................193原子力显微镜在材料科学研究方面的应用实验...............................................................203.1实验综述....................................................................................................................203.2氧化锡红外反射薄膜制备的基本原理....................................................................20IV3.3实验仪器与样品........................................................................................................213.4原子力显微镜对红外反射薄膜的测试....................................................................223.4.1系统启动........................................................................