一种LTPS面板厂建厂设计提案构想介绍_杨政谕

*201493*LTPSLTPSAnIntroductiontoDesignProposalofLTPSFPDPlantConstructionYangZhengyuAbstractAfterreviewingtheprevalentdesignconceptofnewFPDconstructionandstartingfromthestandpointsofrequirementofprocess,cost,scheduleandcontaminationcontrol,anotherdesignproposalisproposedfornewLTPSFPDplantconstructionforindustrialapplicationreference.KeywordsFPDPlant;LTPS;PlantConstruction;Designproposal1968121512633051267027000E-mail:[e-mail]2013-09-11ArrayColorFilterCellModuleOLEDTFTLTPSLTPS90TrussFABRAPFABRAPcheeseslab600mm~800mmTrussFABcleanroomceilinggrid3FABRAPLTPSLTPSAMHSLTPS600mm~800mmLTPSLTPSOHSInlineStockermini-environment11OHS10class10AMHSStockerOHSStockerclass10StockerCraneAGVRGVAGVRGVparticleAGVRGVOHSInlineStocker1InlineStocker22RAPRAPFABRAP4.5m6mRAPLTPSLTPSAGVRGVInlineStocker33.43.33CFDStockerCraneOHS444OHSInlineStockerOHSStockerRobot55RobotStockerCraneStockerOHSStockerRobotRobotRobotStockerCraneRobotRobotIEIEOHSRAPRAPVC-C3.6mStockerCraneFAB6.44.CC&AC2014OHS6FABELAPhotoOHS6OHSFFU66OHSOHSRAPOHSFABRAPRobot3RobotOHSBallroomIEOHSInlineStockerIEStockerConcurrentEngineering[1].,,201210365633.3[P].2012.09.28[2].,,201220660331.4[P].2012.12.04[3].,,201220659436.8[P].2012.12.0563.45.