气体质量流量控制器中文说明

LineTech|~300.010~3025~5025~5030~12530~125FULLSCALEN2(slpm)≤1.0≤1.0≤1.0≤1.0≤1.0≤1.0ACCURACY(%FS)±0.25±0.25±0.25±0.25±0.25±0.25REPEATABLLITY(%)≤2≤2≤2≤2≤2≤2RESPONSETIME(sec)0~5Vdc0~5Vdcor4~20mA0~5Vdc0~5Vdcor4~20mA0~5Vdc0~5Vdcor4~20mAIN/OUTSIGNAL(Vdc/mA)+15~28Vdc+15~28Vdc+15~28Vdc+15~28Vdc+15~28Vdc+15~28VdcSUPPLYVOLTAGE(Vdc)5~13005~13005~13005~130030~100030~1000OPERATINGPRESSURERANGE(psia)0~500~500~500~500~500~50OPERATINGTEMP.(。C)M2030VM2030AM2050VM2050AM2100VM2100AMODEL0.005~300.005~3025~5025~5030~12530~125FULLSCALEN2(slpm)≤1.0≤1.0≤1.0≤1.0≤1.0≤1.0ACCURACY(%FS)±0.25±0.25±0.25±0.25±0.25±0.25REPEATABLLITY(%)M3030M3100M2030M2100MODELV:0~5VdcA:4~20mAIN/OUTSIGNAL2:1/8inc4:1/4inc6:3/8incFITTINGSIZEA:A-LOCKV:VCRMALEFITTINGTYPEV:vitonB:bunaK:kalrezT:teflonSEAL≤2≤2≤2≤2≤2≤2RESPONSETIME(sec)0~5Vdc0~5Vdcor4~20mA0~5Vdc0~5Vdcor4~20mA0~5Vdc0~5Vdcor4~20mAIN/OUTSIGNAL(Vdc/mA)+15~28Vdc+15~28Vdc+15~28Vdc+15~28Vdc+15~28Vdc+15~28VdcSUPPLYVOLTAGE(Vdc)5~13005~13005~13005~130030~100030~1000OPERATINGPRESSURERANGE(psia)0~500~500~500~500~500~50OPERATINGTEMP.(。C)Exam:MODELING-M3030V-4AV-CONTROLSIGNAL:0~5Vdc-FITTING:1/4inc-FITTINGTYPE:A-LOCK-SEALMATERIAL:VITONMASSFLOWCONTROLLERSFECIFICATIONSMASSFLOWMETERSFECIFICATIONSORDERINGINFORMATION5•TotalIndustry•PrecisionGasBlending&Analyzing•GasInjectiononSurfacetreatmentIndustry(PVD,CVD,Reactor,etc)•SemiconductorIndustry•ComponentLeakDetection•ResearchandDevelopment•HighpressureIndustry•OpticalFiber•FuelCell•ReactorSystem•GasmixingSystem•LaboratoryApplications6•MassFlowMeasurement•NoTemperatureorPressureCorrectionsRequired•CompactFlowControlSystem•HighlyAccurate•Widepressurerangeavailable.(95bar)•HighResponse.Time•HighRepeatabilityThisproductsareusingthespecificthermalsensorandthecontrolcircuitytoprovidehighlyaccuracy.Thisallowsforgreaterprecisionoverawiderangeofoperationconditions.Gasflowisdividedatconstantratebyalaminarfolwbypass.GasmoleculestravelingthroughthesensorCarryheatdownstreamcreatingadifferentialtemperaturebetweentheRTDS.ThedifferenceintemperaturebetweentheRTDsispropotionaltothemassflowrate.Advantage▼MeasurementTechnigueThermalMassFlowMeterandController7•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactible•Highstableremoveablesensor•CorrosionresistanceValue•ExcellentLinerity•ExcellentlongtermStability•Modulardesign•WidepressureRangeavailable•CompactFlowControlSystemM3030VM3030A10sccm~30slpm±1%FS±0.25%FS≤2sec(option:≤1sec)0~5Vdc0~5Vdcor4~20mA+15~+28Vdc,350mA≦90bar0~50℃1×10-9atm·cc/sec2~100%formaxrangeModelM3030V▶MassFlowControllerModelM3030A▶MassFlowControllerFeatures8•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactible•Highstableremoveablesensor•CorrosionresistanceValue•ExcellentLinerity•ExcellentlongtermStability•Modulardesign•WidepressureRangeavailableM2030VM2030A10sccm~30slpm±1%FS±0.25%FS≤2sec0~5Vdc0~5Vdcor4~20mA+15~+28Vdc,350mA≦90bar0~50℃1×10-9atm·cc/sec2~100%formaxrangeModelM2030V▶MassFlowMeterModelM2030A▶MassFlowMeterFeatures9•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactible•Highstableremoveablesensor•CorrosionresistanceValue•ExcellentLinerity•ExcellentlongtermStability•Modulardesign•WidepressureRangeavailable•CompactFlowControlSystemM3050VM3050A25slpm~50slpm±1%FS±0.25%FS≤2sec(option:≤1sec)0~5Vdc0~5Vdcor4~20mA+15~+28Vdc,350mA≦90bar0~50℃1×10-9atm·cc/sec2~100%formaxrangeModelM3050V▶MassFlowControllerModelM3050A▶MassFlowControllerFeatures10•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactible•Highstableremoveablesensor•CorrosionresistanceValue•ExcellentLinerity•ExcellentlongtermStability•Modulardesign•WidepressureRangeavailableM2050VM2050A25slpm~50slpm±1%FS±0.25%FS≤2sec0~5Vdc0~5Vdcor4~20mA+15~+28Vdc,350mA≦90bar0~50℃1×10-9atm·cc/sec2~100%formaxrangeModelM2050V▶MassFlowMeterModelM2050A▶MassFlowMeterFeatures11•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactible•Highstableremoveablesensor•CorrosionresistanceValue•ExcellentLinerity•ExcellentlongtermStability•Modulardesign•WidepressureRangeavailable•CompactFlowControlSystemM3100VM3100A30slpm~125slpm±1%FS±0.25%FS≤2sec0~5Vdc0~5Vdcor4~20mA+15~+28Vdc,350mA≦70bar0~50℃1×10-9atm·cc/sec2~100%formaxrangeModelM3100V▶MassFlowControllerModelM3100A▶MassFlowControllerFeatures12•AccuracyatLowFlow•FastResponse•NoLeakage•ConnectionCompactibl