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12PierreAuger1920XAuger1968HarrisAESPierreAuger,1899~19933LiseMeitnerLudwigBoltzmannUniversityofVienna19201923JournalZeitschriftfurPhysik()LiseMeitnerU.S.FermiPrize1966NobelMaxPlanckOttoHahn109MeitneriumMtLiseMeitner,1878~19684OttoHahnLiseMeitner1944NobelLiseMeitner1966FermiPrizeNobel1938OttoHahnLiseMeitnerLiseMeitnerOttoHahnOttoHahnNobelOttoHahn,1879~19685¾6AugerAugerXAugerX)()(*0AugereAAA−++⎯⎯→⎯⎯⎯→⎯VacuunlevelVacuunlevelAugerelectronX-ray7¾WXWYAugerAugerEWXYEWEXEYZAugerφφφ−−−=)()()(ZYZXZWWXYEEEE)()()(ZYZXZWWXYEEEE−−=EWXY“”WXYEYφEFEXEW8Auger32Z≥3AugerAESZ≥3EPMAEPMAZ≥119AugerXAugerWAXWX1WA+WX=1XWXAugerEPMAWAWXZKLMNZ=3∼14KLLZ=15∼40LMMZ=41∼79MNNZ79NOO105∼20ÅAugerAugerattenuationlengthAugerxλ1/eX=λI/I0=1/e]exp[]exp[00λµxIxII−=−=11Tracy1971“”E=20∼1500eV5∼20Å20λÅ102000eV512AugerAugerAugerAugerAugerAugerN(E)EAugerAuger/Auger∼10-12A∼10-10A2PierreAugerLiseMeitner1920Auger131968HarrisAugerAESdEEdN)(22)(dEENdAugerN(E)EAuger14¾AAugerAnAIAAIAAnAAIIK/=AugerEPZBAWEWXYAugerθ)(EpIZBAθθCOSZAB/=)(EpI15ZEPZA(a)WEWAWWXWXYAugerWa(WXY)ZANa(Z)Na=Na(Z)ZAWXYAugerθABλAuger)(EpI),(ZEpI),(EwEpaσ]/exp[λAB−)]/(exp[]/exp[θλλCOSZAB−=−16100%AugerT%ZAWXYAugerθWXYAuger1EWAWXYAuger2ZAugerΩθΩθZAWXYAuger)(EpI]exp[)()(),(),()(θλσCOSZNWITdIZaWXYaEwEpaZEpWXYa−•••••=∫∫∫∞ΩΩ−••••=0)()(),(),()(]exp[dZdEdCOSZNWITIZaWXYaEwEpaZEpEpEwWXYaθλσ17Z≤λ∞Z≅λAAugerEWAAugerAugerIPIB),()(ZEpEpII≅aZaNN≅)(),()0,(ZEpEpEE≅λσ•••••=aWXYaEwEpaEpWXYaNWITI)(),()()()(EpIBPEpIII+=)(18AugerAugerAuger1RBIa(WXY)ANaA)()(/APABII)()(1APABBIIR+=BaWXYaEwEpaEpWXYaRNWITI••••••=λσ)(),()()(BWXYaEwEpaEpWXYaaRWITIN•••••=λσ)(),()()(/nBnaWXYaEwEpaEpnWXYanaRWITIN•••••=λσ)(),()()(/SBSaWXYaEwEpaEpSWXYaSaRWITIN•••••=λσ)(),()()(/naNSaN19TI(Ep)Wa(WXY)≅≅),(EwEpaσnBSBnaSaSWXYanWXYaSanaRRIINN••=λλ)()(nBRSBRnaλSaλSaSWXYanWXYanaNIIN•=)()(naN20¾ASaSWXYanWXYanaNIIN•=)()(1=SaNSWXYanWXYanaIIN)()(=AAugerSWXYaI)(21100%Iini=12•••nAugerIiSi=12•••nAugerAugerAuger11=∑=niiC∑==niSiniSWXYanWXYaaIIIIC1)()(//22AgMNNAugerE≅351eVIAg(MNN)AugerIAg(MNN)SiAugerIini=123••••••n)(/MNNAgSiiIIS=∑∑====niinianWXYaniSiniSWXYanWXYaaSISIIIIIC1)(1)()(////23AugerAuger)()()()()()(ZYZXZWZYZXZWWXYEEEEEEE−−≅−−−=φAugerWXEX(Z)XWXXYAugerEWXYWXYVacuumlevelAtomicnucleus24AugerEWXY∆AES][21)1()(')(++=ZXZXZXEEE][21)1()(')(++=ZYZYZYEEE∆−−−=−+−−−−=+−+−=−−=++++)()()()()1()()1()()()()1()()1()()(')(')()(][21][21][21ZYZXZWZYZYZXZXZYZXZWZYZYZXZXZWZYZXZWWXYEEEEEEEEEEEEEEEEEEE25AESAESAESAESAugerEPMAEDS10-7∼10-8TorrX-Y26Auger//27¾-VPrmaABPl1l2L1Qb28¾-VPLabErAugerυ0θPErabrVEPr/ln−=rKabrVedtdmmaeEFPr−=−•====/lnυ)/ln(==abeVKPdtrKmdrKdtmdυυυυ−=−=)21()21(2229r=raPυ0r=rml+L1/2=L/2amrrttrrKdrrKdtdtdrrKdtrKmmamaln212−=−=−=−=∫∫∫υυ∫•+•=+=mattdtCOSctgaLlLθυθ01222amrrKdtdrmmln)(212122−==υ30θabVPKAugerVPυ0LLAugerυ0EWXYrrmKdrdtmln2−=∫−•+•=mramrrmKdrCOSctgaLln2220θυθabeVKP/ln=31LL-VPAugerAugerAugerAuger10-12AAuger/32AugerAuger1967X-YY“”-VP∆V∆V=Ksinωtω=5∼10HzK=5VIVIV→IV+∆VtIKtKIIKIIVVVVVVωω2cos4sin4''2'''2−++=∆+33∆Vω2ω3ω········IE/KIV'2''KIV34AES0.5~2nmZ≥30SEMAESLEEDAES35¾99990.180.8436PalmbergAESPalmbergXePd(100)5.8×1014atom/cm2()XeAES()Pd(100)Pd(100)5.8×1014atom/cm2XeAES()5.8×1014atom/cm25.8×1014atom/cm2Pd(100)∆φIXe∆φ(eV)001.00.5XePd(100)37AESPd(100)φ∆φ5.8×1014atom/cm2φ−−−=)()()(ZYZXZWWXYEEEE38CVDMOCVDPVDMBEPollardAESThW“ThW(100)”PollardW(100)ThThW(100)W(100)ThWAES39ThW(100)AESAESThW(100)“”“”W(100)5%W(100)Th“”40¾AESBonzelCuSO2BonzelAESAESCuSPO241T=750oCPO2CuSPO2O2CuSAESCuS123CuS2520151050036912tPO2:1-1.24×10-7atm2-0.94×10-7atm3-0.46×10-7atm9AESO2+S9PO2Langmuir-Hinshelwood942¾50Ni50AlAESAESSSAESSEMSNiSNiSNi30ÅAES43PAs0.02P3.87Ni2.3Cr0.32C396~594oC44PAESPEK175ÅPCCrCrFeFeFeNiNiFeFeFeCrCrCAESP40~50ÅAES4.72%235P40Å0.020.020.270.682.034.72P%17545261250Å45¾WMoZrWAESWWPWÅPP46¾Al1.3µAl500ÅSi3N4700ÅSi(111)n47AlAlAESN2450oC/0.5h500oC/0.5h530oC/0.5h1:1H3PO3AESAlKLL1450oC/0.5h2500oC/0.5h3530oC/0.5h12305001000ÅIAlKLLAlSi3N4500oC/0.5hAlSi3N4Si(111)Al48FickCxAl1.3µCxFick)2(0),(DtxerfCCxt=1.251.351.401.451.301000/T10-1710-1610-15lnDsquarecm/sec450oC500oC530oCAlDD1/TEEDAlEDCx)2/(Dtxerf)/exp(0RTEDD−=49¾CuAuCuCuAuAuCuAuAuAESSEMCuAu100nmNiCuNiAu50300oC4hAESNiAu01224364860AESNiAuAuNiAuNiCu51