夫琅和费衍射法测量细丝直径的研究

1671-3559200502-0178-032004-07-021958-250022D4O436.1A1-91d10dsinθ=kλk=±1±2±311d=kλD/xkk=±1±2±32DKEθλxkkθ=0kxkD2d2dDD2D=xkd/kλ3dxkkD10µmd=0.092mmλ=632.8nmk=10xk=64.355mm3D=935.62mm2DΔD/D=Δk/k+Δλ/λ+Δxk/xk+Δd/d4Δλ/λΔk/kΔxx0.1mmxk50～80mmΔxk/xk0.13%～0.20%Δd5µmd0.092mmΔd/d=5.4%D319220056JOURNALOFJINANUNIVERSITYSci.&Tech.Vol.19No.2Jun.20052Δd/d=Δk/k+Δλ/λ+Δxk/xk+ΔD/D53ΔD/DDΔxk/xkΔxkxk4GSZF-Ⅱ12I/V3A/D420cm0.005mm555.15.242a～dad=0.574mmbd=0.350mmcd=0.133mmdd=0.091mm2497122kxkd11xk/mmkD/mmλ/nmd/mm18.25893.246330.574216.901093.246330.350344.501093.246330.133444.95793.246330.09145.342323mm10.5740.5810.58920.3500.3880.36230.1330.1420.13840.0910.0890.08461.D.1997.2.D.2001.3.J.2003613-14.4.J.2003112171-175.5.J.200323246-49.6.J.200326132-34.7.J.1998112-5.8.J.19915225-227.9.J.20001039-41.10.M.2000.MeasurementofFilamentDiameterBasedonFraunhoferDiffractionPrincipleWANGShao-qingLOuBen-zhuoHuShi-huiScienceSchoolofJinanUniversityJinan250022ChinaAbstractThemethodsofthediametermeasurementoffilamenthavebeensummarizedatfirst.Theprincipleandexperimentequip-mentofFraunhoferDiffractionmethodhavebeenpresented.Theer-rorfactorsofFraunhoferdiffractionmethodhavebeenanalyzedsys-tematically.ThemethodofcalibratingtheworkingdistanceDhasbeenpresented.WehavemeasuredthediametersoffourdifferentfilamentsandverifiedtheresultsobtainedfromFraunhoferdiffractionmethodbytwoothermethods.KeywordsfilamentdiametermeasurementFraunhoferdiffraction08119