33520125ChineseJournalofScientificInstrumentVol.33No.5May.20122010-12ReceivedDate2010-12*“”2010ZX04014-091、50627501、PHR201006104*11211001242230009。、、、、5。、、、、、。。。。TB92A460.2010Re-visittotheAbbeprincipleShiZhaoyao1ZhangBin1FeiYetai21CollegeofMechanicalEngineeringandAppliedElectronicsTechnologyBeijingUniversityofTechnologyBeijing100124China2SchoolofInstrumentScienceandOpto-electronicsEngineeringHefeiUniversityofTechnologyHefei230009ChinaAbstractToexploretheadaptabilityoftheAbbeprincipleinmodernultra-precisionmanufacturingandmeasure-menttheAbbeprincipleanditsextensionarereviewedthefirstordererrorsduetotheconfigurationoftheele-mentsareanalyzedandtheAbbeprinciplefortwodimensionallengthmeasurementisdiscussed.Throughanalyzingtheerrorsgeneratedbythedifferentconfigurationsoffiveelementssuchasreferencemeasurandsensingpointref-erencepointandguidingsurfaceitisdiscoveredthatthefirstordererrorsarefoundwhenthesensingpointrefer-encepointandguidingsurfacearenotinthesamelinewhilethereferenceandmeasurandarecollinearastheAbbeprinciplerequires.TheconceptsofcollinearsensingpointcollinearreferencepointandcollinearguidingsurfacearepresentedandtheAbbeoffseterrorsenseoffseterrorreferenceoffseterrorguidingoffseterrorandAbbecompre-hensiveerroraredefined.TheimpliedconditionsoftheAbbeprinciplearerevealedandanewstatementofAbbeprincipleispresented.TheadaptabilityoftheAbbeprincipleinstack-upandco-planartwodimensionalstructuresisdiscussed.Asapplicationsaconcisestructureforimprovingtheaccuracyoftoolmicroscopesisproposedandaco-planartwodimensionalprecisionstageisintroducedinwhichtheAbbeerrorisreduced.Throughre-understandingtheAbbeprincipleitispossibletoupdatethedesignphilosophyforthedesignofnewultra-precisioninstrumentsandmachineryandfortheupgradeoftypicalmetrologyinstruments.KeywordsAbbeprinciplefirstordererrorAbbeerror2DAbbeprinciple5112911890·ErnstAbbe1。SiegfriedCzapski《》23。μm。4-56。7-11。3nm。。。。22.11212。1。LφφΔLΔL=Lcosφ-1≈-12L·φ2L=500mmφ=10″ΔL=-0.00000059mm。。1Fig.1ConfigurationcompliedwiththeAbbeprinciple2Fig.2ConfigurationnotcompliedwiththeAbbeprinciple2。Aφαα=Atanφ≈AφA=100mmφ=4″α=0.00195mm。。。2.2。OttoEppenstein。、、。。J.B.Bryan13。。14。。。15、。、、。16。1130332。17nm。。2.3。、、、5。33.1。“”。2“”。。3.2。“”。“”。3Sδ=Stanφ≈S·φ。。3Fig.3Senseoffseterror4Rθ=Rtanφ≈Rφ。。4Fig.4Referenceoffseterror3.3。2。、“”。5GGξ≈G·φ。。5Fig.5Guidingoffseterror44.1。、。、、。4.251131、。“”。、、。5。。。2218619-207。。YYYXX。、、、。XY。XXXXYXX、、、、YYYYXYY、、、、。XY。。66.18。。μm。8Fig.8Classicaltoolmicroscopeconfiguration9。。19nm、。9Fig.9Animprovedtoolmicroscopeconfiguration1132336.2H、、。10H21。HXY。10HFig.10HstyletwodimensionalprecisionstageXY。X0.93μmY0.93μm0.9722。7。、、、、。、、、“”。H。。1ABBEE.MessapparatefuerPhysikerJ.ZeitsfuerIn-strumentenkunde189010446-448.2CZAPSKIS.GrundzuegedertheoriederoptischenInstru-mentenachAbbeM.LeipzigVerlagvonJohannAm-brosiusBarth1904.3EVANSC.PrecisionengineeringAnevolutionaryviewM.BedfordEnglandCranfieldPress1989.4LUCC.J.20113271655-1659.XUSANLIDSHLUCCetal.Researchofnanopo-sitioningmethodbasedonphase-controlheterodyneinter-ferometrictechniqueJ.ChineseJournalofScientificInstrument20113271655-1659.5.J.20113251138-1144.XUQXHOUWMSHENGSHJetal.3-dimension-alprofilerbasedondigitalmicromirrordeviceJ.Chi-neseJournalofScientificInstrument20113251138-1144.6.M..2011—2020.2010288-315.ZENGLJZHAOWQZHUJG.MeasurementscienceofmanufacturalandoperationalparametersofmachinesM.DepartmentofEngineeringandMaterialsScienceofNationalNaturalScienceFoundationofChina.Strategicreportonmechanicaldisciplinedevelopment2011—2020.BeijingSciencePress2010288-315.7.———J.2011375648-656.SHIZHYZHANGBLINJCHetal.Halfcenturyofcoordinatemetrologytechnology—EvolutionandtrendsJ.JournalofBeijingUniversityofTechnology2011375648-656.8JAEGERG.Ananopositioningandnanomeasuringma-chineoperationmeasuredresultsJ.NanotechnologyandPrecisionEngineering20042Suppl.81-84.9RUIJLT.UltraprecisioncoordinatemeasuringmachineDesigncalibrationanderrorcompensationD.TheNetherlandsTechnischeUniversiteitEindhoven20017-84.10FANKCLIUCLWUPTetal.Thestructurede-signofamicro-precisionCMMwithAbbeprincipleJ.Proceedingsofthe35thInternationalMATADORConfer-ence200712297-300.11SPAANHAMWIDDERSHOVENI.Isara400ultra-precisionCMMJ.Proc.SPIE2011816981690T.doi10.1117/12.902237.5113312.M.2004.LIQXWANGDSHLIYH.Designofmodernpreci-sioninstrumentsM.BeijingTsinghuaUniversityPress2004.13BRYANJB.Designandconsructionofanultra-precision84inchdiamondturningmachineJ.PrecisionEngi-neering19791113-18.14BRYANJBCARTERDL.Designofanerror-correctedco-ordinatemeasuringmachineJ.PrecisionEngineer-ing197913125-128.15ZHANGGX.AstudyontheAbbeprincipleandAbbeerrorJ.CIRPAnnals-ManufacturingTechnology1989381525-528.16.-J.B.BryanJ.1993142212-215.NIEHJ.Aamendideaforthestraightnessmeasurementprinciple-J.B.BryanadviceJ.ChineseJournalofSci-entificInstrument1993142212-215.17FEIYTSHANGPCHENXetal.TheAnalysisandcomplementarityofAbbeprincipleapplicationlimitedincoordinatemeasurementC.ProceedingsoftheWorldCongressonEngineeringLondonU.K.2010.18.J.2011194828-835.WANGSHZHXIETBCHANGSP.Combinedpro-filometerforultra-precisionsurfacetopographyJ