Chapter-3-4-Nanotechnology-and-Micro-machine

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3.4nanotechnologyandmicro-machineNEWFRONTIEROFSCIENCEOutline•Introduction•NanoTechnology•NanotechnologyApplications•NanotechnologyMeetsMEMS•WhatareMEMS?•MEMSApplicationsSilicone硅酮MasashiWakabayashiMACRO,MICROANDNANOMacro–Micro-NanoBigSmall”Nano“meter・・・Theunitofasizesizeofalivingthingsizeofasubstanceandmaterialpeople’sheightthediameterofsiliconewearthesizeofanantthicknessofhomealuminumfoilthesizeoferythrocytethesizeofcoliformbacilluswidthofhumanhairthicknessofgoldleafthepatternlineofLSImitochondriavirusUnit1m11mm1/1000()10μm1μm1/1000,000100nm10nm1nm1/1000,000,000nanomaterialaccumulationofadottubeetc.IsNanotechnologyNew?•Notreally,othernamesusedinthepast:–DNA–Microbiology–AtomicandMolecularPhysics–MolecularChemistry,Molecularengineering•Ithasbeenaroundforcenturies–CarbonBlack(soot烟灰)containsnanotubes1952RosalindFranklinWhatisNano?SummarySimplified•Ifitislessthan100nminanydimension–itcanbecallednanotechnology–regardlessofhowitwasmade.•Ifitismadebyspecificallyplacingmaterialsatombyatomormoleculebymolecule–itisalsonanotechnology.•Ifitisbottomup–it’snano•Ifithasuniquepropertiesbecauseofitssmallsize–it’snanoNanoscienceVsNanotechnology•Nanoscienceisconcernedwiththestudyofnovel新phenomenaandpropertiesofmaterialsthatoccuratextremelysmalllengthscales.•Nanotechnologyistheapplicationofnanoscalescience,engineeringandtechnologytoproducenovelmaterialsanddevices.WhatisNanotechnology?“Nanotechnologyistheunderstandingandcontrolofmatteratdimensionsofroughly1to100nanometers,whereuniquephenomenaenablenovelapplications.Encompassingnanoscalescience,engineeringandtechnology,nanotechnologyinvolvesimaging,measuring,modeling,andmanipulatingmatteratthislengthscale.”NANOTECHNOLOGY•Derivesfromnanometer,whichisone-thousandthofamicrometer(micron),or10–9ofameter•Thestudy,manipulationandmanufactureofultra-smallstructuresandmachinesmadeofasfewasonemoleculeSOMENANOTECHNOLOGYMILESTONESYearsEvents1959Feymandelivers“Plentyofrommsatthebottom”talk1974Firstmolecularelectronicdevicepatentfiled1981Scanningtunnelingmicroscope(STM)invented1985Buckyballsdiscovered1986Atomicforcemicroscope(AFM)invented1987“EnginesofCreation”published1988Quantizationofelectricalconductanceobserved1991Firstsingle-electrontransistorcreated1993First“designerprotein”created1997Carbonnanotubesdiscovered1999FirstnanotechnologylabintheUS2000DNA-basednanomechanicaldevicecreated2001Molecular-scalecomputerswitchcreatedthepresentsubstanceandsystemelectronicindustry・display・high-densityrecordelementmedical-suppliesindustry・embeddingsensor・nanorobotenergyindustry・battery・solarcellmanufactureprocessingindustry・microrobot・nanomachinechemistryindustry・catalyst・magneticfluidspaceindustry・lightweightspaceshuttle・robotaviationindustry・lightweightmaterial・tire・paintagentenvironmentalindustry・toxicsubstanceremovalfilterIMPORTANTAREASOFAPPICATION•Surfacefunctionalisationandrefinement微细改善:Nanoparticlestoconventionalcoatingsyieldsnewandimprovednano-basedcoloureffectsExamplesare:AntireflectivesurfacesSunshadeglazingAntireflectivecoatingforinstrumentpanels•Catalysis催化作用,chemistryandmaterialssynthesis合成:Surfaceactivemembranes,anoporous(bio)filtersandadsorptionagentscanbeoptimizedformthenanotechnologypointofviewBiomimeticenzyme-likecatalystswhichhaveadvantagesoverenzymes,includinguseinextremereactionconditions.•Energyconversion转化anduse:Enhancetheefficiencyofenergyconversion-e.g.useofnaotechnologicalmaterialsinsolarcellsandfuelcellsSuper-condenserswithbatteriesfortractionpurposes-e.g.storingbrakingenergyinelectriccars•Construction:Improvesthemechanicalproperties,lightweightconstruction,hardness,wearresistance,high-temperatureapplications,alsoinmassapplicationslikeplasticcasingsorcladdingThermalinsulationforbuildingsFaçadedesignInterior•Nanosensorsandactuators:MagneticfieldsensorsInfraredsensors红外•Dataprocessingandtransmission:Nanoelectronicsinthefieldofdataprocessingandtransmissionareelectronic,opticalandoptoelectroniccomponentsDNAcomputing•LifesciencesChemicalanalysisanddiagnostics,nanotechnologicalproductionofactiveingredients,precisedeliveryofactiveingredients,andproductionofbiocompatiblematerialsandsurfacesVirusesandcelltypesidentificationUltra-smallsensors-externalstressesandthephysiologicalstateoftheorganismNanomachines•Securityanddefence:Unmannedandautonomoussystems,improvedweapons,andinnovativematerialsinair,seaandspacecouldbefurtherreinforcedbynanotechnologyNanoscalepowdersforuseinpropellantsandexplosives,enhancingtheenergyyieldandspeedofexplosionAutomotiveindustry:NanoparticlesasafillerincartyresAntireflectivecoatingsNanoparticle-reinforcedpolymers&metalsNanotechnologicallymodifiedadhesivetechnologiesandadhesiveprimersCatalyticnanoparticlesasafueladditiveNanoporousfilterstominimisetheemissionofparticlesonthenanometerscaleHydrophilesurfacecoatingsasanti-foggingcoatings“Self-healingcoatings,e.g.throughself-organisation•Textileindustry:Creaseresistance,breathingproperties,wearresistance,spotandwaterrepellence,antistaticproperties,activeingredientstorageorfireprotectionBottomUp•Bottomupa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