磁控溅射阴极结构与工艺-GENCOA

关于溅射阴极与工艺的分析报告(ForSurfacility成都研修班)Gencoa工艺工程师黄汉乐(HugoHuang)[e-mail]2016-10-22GENCOAKeyCompanyFacts•GENCOAisaprivatelimitedcompany(Ltd)•成立于1995byDrDermotMonaghan•公司位于英国利物浦•GENCOA是一个专业做阴极，离子源，以及speedflo的公司•GENCOA目前员工38人•（是目前全世界专业只做阴极配件最多人的公司）6design(Creo3DCAD)8processdevelopment&simulation14assembly&test4sales&techsupport(2Asiabased)其中Hugo是亚洲的工艺/产品工程师3administration&accounts3hardware&software(Speedflo)•全球销售阴极数量达3000多个•全球销售speedflo达1000台，在反应溅射控制市场占比95%以上GENCOA2015年新建的工厂GENCOA新工厂将2016年3月20日落成。总占地面积为2600平方米包括设计部办公室，现代化组装厂以及R&D实验室Gencoaofferthefollowingrangeofproducts&processtechnologyforthethinfilmindustrydevelopedoverthelast20yearsPlanarMagnetronsRotatableMagnetronsPulsedEffusionCellsReactiveGasControlPlasmaPre-Treaters磁控溅射的阴极类型按形状分：①平面圆形阴极，主要是实验室研发设备。②平面矩形阴极，主要是生产设备（任意长度）。③靶材旋转圆柱阴极，主要是大中型生产设备（长度4米）。④磁棒旋转圆柱阴极，主要是管状镀膜设备（长度4米）。磁控溅射的阴极类型按磁场设计分HUHUHighUniformityLSLowStrengthForhighvacuumsputteringprocess平衡磁场非平衡磁场高利用率可调平衡度全靶面刻蚀内回路磁场强磁场射频磁场高均匀性弱磁场SmallcantilevermounteddualcathodesExampleofcathodeanodeandtargetmountingAnodeAssembly(AnodeWall&AnodeAssembly)TargetClampAssemblyDiaphragmAnodeisat“zeroheight”comparedtotargetLowprofileanodebelowtargetsurfaceHavingtheanodeatzeroheightmeanstargetthicknessadjustmentwithoutachangetotheanode.Theuniqueanodedesignbothreducesheatloadonthesubstrateandpreventselectricalshortsduringoperationbyreducedcoatingbuild-upontheanodeIntegralgasinjectionthroughtheanodewall–singleormultizoneOptionalanodecoolingforwebcoatingorhotchambersExampleofplasmapre-treatingmagnetronandsmalldoublecathodeForOLEDandtouchscreensSmallsourcesforR&DwiththeoptionofVTechfullyadjustablemagneticsGencoaRetrofits-magneticupgradestoexistingmagnetronsandvariouslevelsofsourceenhancementdependingupontheneedsnewbody/re-machiningofthebodynewmagneticarraynewdiaphragmsystemtoisolatewaterfrommagnetsandeliminatewaterleakduringtargetchangenewcoolingbodyassembly2DmagneticfieldmodelforanHighYieldtypeofdesign2Dmagneticfieldmodelforanstandard2poletypeofdesignComparisonofstandard2poleandhighyieldtypemagneticsFlatterfieldshape=wideerosionMagneticOption-HYTypical2polemagneticdesignUniformitySW350FFERotationspeedcantunetheuniformity(12”orlargerFFEonly)GencoaProcessSupportprovidecompletesub-systemsandprocessset-upsupportworld-wide,processstaffintheUS,ChinaandTaiwanTypicalmagneticfieldshapeofstandardGENCOAmagnetbarPlotofmagneticfieldstrengthrelativetodistancefromthetargetbackingtubeParallelvectortosurfaceatcentreoftherace-track•Gencoamagneticsareencapsulatedinstainlesssteelhousingtopreventcorrosionandmagnetmovement•Themagnetbarscanbeadaptedtofittoanymanufacturersrotatableend-blocks•UniqueGencoamagneticandmechanicaldesignbuiltintoeverybartoensureauniformfieldandstabilityduringuseGencoaMagnetBarsGencoahighspecificationmagneticarraysMagnetsarepre-selectedintolerancebandsandfinalbarsarescannedforqualitycontrol–scansprovidedwitheachbarPrimary(Main)PlasmaSecondary(Side)PlasmaBOCstyleindustrystandardmagneticsshown–notGencoaDependingonthemagneticpolaritythedirectionoftheelectronExBdriftwillbedifferent.Thiswillshifttheplasmatowardsoneendoftherotatable.Andtypicallytheplasmadensitywillgrowfromoneendtotheotherwhichcanleadtonon-uniformities,arcingorend-blockheatingdependingupon,fieldstrength,powermodeandtargetlength.ExBPlasmadensitygrowingintheExBdirectionGENCOAMagneticBars–offeroptionaleliminationofsideplasma’sDependinguponapplicationGencoaMagnetandGasBarsGencoahighspecificationmagneticarraysandgasbarsforrotatablemagnetronsGencoa’smagnetbarsforrotatablemagnetronscanbeadaptedtofitandmakeofend-block.•Highuniformityoffield2.5%asstandard,1.5%onrequest,eachmagnetscannedandwholearrayscanned•Insingleweldedenclosuretopreventcorrosion•Canbesuppliedwithorwithoutsupporttube•5differentstrengthsfrom250to1000Gauss•Gencoa2chambergasbarsfrom1to7zones–combineshighuniformitywithfastspeedofgasresponseLayeruniformitylessthanthe±1%withHUmagnetbar–optimizedon-sitebyGENCOAprocessteamvia5zonegasadjustmentIndustrystandardmagneticswithACpowermodeandelectronmovement70mm100mm120mmACcurrent“leaks”NRELMagneticfield–Gencoabars–noACleakage70mm100mm120mmACcurrent“channelled”GencoahavedevelopedandpatentedamethodtoprovideaneffectiveanodeawayfromthecoatingfluxthatcancollectallelectronsescapingtheplasmaThemethodeffectivelycombinesmagnetictrappingwithelectrostaticattractionofelectrons•Themagneticfieldfromasingleordoublemagnetron(shown)combinedwiththemagneticfieldoftheanodetoformaclosedtrapfortheelectronstoguidethemtotheanode–electronsdonotpossesssufficientenergypassthefieldlinesandescapethetrap.•Theanodecanbeatvaryingpotentials:•Earthpotentialconnectedtochamber•Connectedtothepowersupplyearthreturn(recommended)•Connectedtoaseparatepositivebiassupply•Connectedtoafloating‘earth’returnforthepowersupplywhichnaturallyassumesapositivefloatingpotential–typically+30voltsGencoaActiveAnodesforplasmacontrolandlongtermstabilityforDCandDCpulsedrotatablemagnetronsGencoa’sactiveanodescanbefittedtoanyrotatablemagnetronsystem.Thearrangementsuitsadualrotatable,buttheycanalsobeutilize