CMOS-Process-Flow-Customer

CMOSProcessFlowProcessFlow1.WaferstartP-typeP-subN-WellImplant2.Padoxide:P-subPadOxideN-WellImplant3.SiNDeposition:P-subSiNPadOxideN-WellImplant4.N-wellphoto:P-subSiNPadOxidePRN-WellImplant5.SiNdryetch:P-subSiNPRPadOxideN-WellImplant6.N-wellImplant:P31P-subSiNPRPadOxideN-WellP-WellImplant7.N-wellPRstripping:P-subSiNPadOxideN-WellP-WellImplant8.Welloxide:P-subSiNPadOxideN-WellWellOXDriveinP-WellImplant9.SiNstripping:P-subPadOxideN-WellWellOXP-WellImplant10.P-WellImplant:P-subPadOxideN-WellWellOXP-WellB11P-WellImplant11.WellDiffusion:P-subPadOxideN-WellWellOXP-WellDriveinP-FieldImplant12.Well-oxideremove:P-subN-WellP-WellP-FieldImplant13.Padoxide:P-subN-WellP-WellPadOxidePadOxideP-FieldImplant14.SiNDeposition:P-subN-WellP-WellPadOxidePadOxideSiNSiNP-FieldImplant15.Activeareaphoto:P-subN-WellP-WellPadOxidePadOxideSiNSiNPRPRP-FieldImplant16.SiNdryetch:P-subN-WellP-WellPadOxidePadOxideSiNSiNPRPRP-FieldImplant17.PRStripping:P-subN-WellP-WellPadOxidePadOxideSiNSiNP-FieldImplant18.P-FieldImplantPhoto:P-subN-WellP-WellPadOxidePadOxideSiNSiNPRP-FieldImplant19.P-FieldImplantP-subN-WellP-WellPadOxidePadOxideSiNSiNPRP-P-B11P-FieldImplant120.PRstripping:P-subN-WellP-WellPadOxidePadOxideSiNSiNP-P-LOCOS&VTImplant21.Fox:SINPadOxideSINFOXPadOxideP-subN-WellP-WellPadOxidePadOxideSiNSiNP-P-FOXFOXFOXFOXLOCOS&VTImplant22.SiNStripping:P-subN-WellP-WellPadOxidePadOxideP-P-FOXFOXFOXLOCOS&VTImplant23.Pad_oxideremove:P-subN-WellP-WellP-P-FOXFOXFOXLOCOS&VTImplant24.Sac_oxide:P-subN-WellP-WellP-P-FOXFOXFOXSACOXFOXSACOXLOCOS&VTImplant25.VTimplant:P-subN-WellP-WellP-P-FOXFOXFOXSACOXFOXSACOXB11GateOxide&PolyGateDefine26.SAC_OXremove:P-subN-WellP-WellP-P-FOXFOXFOXFOX6000AGateOxide&PolyGateDefine27.Gate_OX:Gate_OXP-subN-WellP-WellP-P-FOXFOXFOXFOXGate_OXGateOxide&PolyGateDefine28.Polydeposition:P-subN-WellP-WellP-P-FOXGate_OXPolyPolyFOXFOXFOXGateOxide&PolyGateDefine29.N+_POCLdope:P-subN-WellP-WellP-P-Poly(POCL3)Poly(POCL3)FOXFOXFOXPOCL3GateOxide&PolyGateDefine30.Polygatephoto:P-subN-WellP-WellP-P-FOXPRPRPoly(POCL3)Poly(POCL3)FOXFOXGateOxide&PolyGateDefine31.Polydryetch:P-subN-WellP-WellP-P-FOXFOXFOXPolyPRPRPolyNLDDImplant32.PRstripping:P-subN-WellP-WellP-P-FOXFOXFOXPolyPolyNLDDImplant33.S/D_OX:P-subN-WellP-WellP-P-FOXFOXFOXPolyPolyS/DOXGateOXS/DOXNLDDImplant34.N-LDDphoto:P-subN-WellP-WellP-P-FOXPolyS/DOXGateOXFOXPolyFOXPRNLDDImplant35.N-LDDImplant:P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXPRP31S/DOX150AGateOXN-N-N+Implant36.PRstripping:P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXS/DOXGateOXN-N-N+Implant37.TEOSdeposition(spacer):P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXS/DOX150AGateOXN-N-TEOSN+Implant38.Spaceretch:P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXGateOXN-N-SpacerN+Implant39.S/D_OX:P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXS/DOXGateOXN-N-N+Implant40.N+photo:P-subN-WellP-WellP-P-FOXPolyFOXPolyFOXS/DOXGateOXN-N-PRN+Implant41.N+Implant:P-subN-WellP-WellP-P-PolyPolyFOXS/DOXGateOXN-N-PRAs75N+N+FOXFOXP+Implant42.PRstripping:P-subN-WellP-WellP-P-PolyPolyFOXS/DOXGateOXN-N-N+N+FOXFOXP+Implant43.P+photo:P-subN-WellP-WellP-P-PolyPolyFOXS/DOXGateOXN-N-N+N+FOXFOXPRPP+Implant44.P+Implant:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXPRB11P+P+FOXFOXPRP+Implant45.PRstripping:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXContact(ILD:InterlayerDielectric)47.BPSGdeposition:BPSGP-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGContact(ILD:InterlayerDielectric)48.BPSGFlow:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGMetal-1Deposition49.Contactphoto:PRPRPRP-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGMetal-1Deposition50.Contactetch:PRPRPRP-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGMetal-1Deposition51.PRstripping:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGMetal-1Deposition52.Contactreflow:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGSmoothcornerMetal-1Deposition53.Pre_sputterwetdip:P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGMetal-1Deposition54.Metal-1sputter:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGVIA(IMD:InterMetalDielectric)55.Metal-1photo:PRMetal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGVIA(IMD:InterMetalDielectric)56.Metal-1etch:PRMetal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGVIA(IMD:InterMetalDielectric)57.PRStripping:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGVIA(IMD:InterMetalDielectric)58.PE-OX:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGPE-OXVIA(IMD:InterMetalDielectric)59.SOG:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGPE-OXSOGSOGPE-OXBPSGVIA(IMD:InterMetalDielectric)60.PE-OX:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGPE-OXSOGSOGPE-OXBPSGPE-OXPE-OXMetal-2Deposition61.Viaphoto:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGPE-OXSOGSOGPE-OXBPSGPE-OXPE-OXPRPRMetal-2Deposition62.Viaetch:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGPE-OXSOGSOGPE-OXBPSGPE-OXPE-OXPRPREtchbyBOEMetal-2Deposition63.PRStripping:Metal-1P-subN-WellP-WellP-P-PolyPolyN-N-N+N+FOXP+P+FOXFOXBPSGP