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1,2,1(1.,610054;2.,610039):,()m,,;ANSYS,;,:2004-06-17:2004-12-16:;;:TP212:A:1002-1841(2005)04-0005-03ResearchandDesignofCapacitiveDisplacementSensorforTestingRailroadsTemperatureStressRAOLi1,2,DINGJie2xiong1(1.UniversityofElectronicScienceandTechnologyofChina,Chengdu610054,China;2.XihuaUniversity,Chengdu610039,China)Abstract:Describedacapacitivemicro2displacementsensor,whichteststemperaturestressofseamlessrailroad.Basedontheprin2cipleofCalibratedLengthofRail(CLR),thetemperaturestressofseamlessrailroadwastestedbymeasuringstrain(displacement)ofrailroad.Becausetherangeofmetricaldisplacementisonlyafewmicrons,itisnecessarytoamplifydisplacementinordertoimprovethesensitivityofsensorandreducethedesigndifficultyofcircuit.Therefore,theflexiblehingesamplifier(HIA)wasadopted.ThemodelsofFEMforthestructureofHIAandthecapacitiveelectricfieldweresetupandanalyzedtooptimizeparameters.Theaffectofthesen2sorssensitivityandlinearitybytheHIAwasanalyzedandthesensorwasoptimized.KeyWords:DisplacementSensor;FlexibleHinge;FiniteElementMethods(FEM)1,,3Herzoy[1][2],;,,,,[3],,,,,,ANSYS,21,,,,[3],,,,,,,,,,,x,1=xE(1)E20054InstrumentTechniqueandSensor2005No14©1995-2006TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.d:d=Kx(2)K=dKE(3)3,,m,,2,,,;,,;,S,,,2dx=AB+BCAB=1+BCAB(4)d=(1+BCAB)x(5)ANSYS,3,423,55S,;,;,,,,,,,,,,6,,7,,,;,,4567,65Mn,,4:K=-Ad2(6):;A;dd,d,,,,,,,,,8,,8(A=6cm2,=1),,,996InstrumentTechniqueandSensorApr12005©1995-2006TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.,,;,,9[8]Y=a0+KX(7):a0,K;X[8]L=cmaxcFS100%(8):cFS;cmax[8]k=c(x)(9),014mm,015mm,016mm,0111%,0109%,0106%,33125,21155,16193;014mm,015mm,016mm0176%,0130%;75174,59142,015mm5,,,d,,[1]Herzoy..,1999(4):30.[2],..,1998,34(2):104-110.[3],..,1998(4):24-26[4],..:,1991.[5]BERTONEGA,MEIKSINZ.H.Investigationofcapacitance2baseddis2placementtransducer.IEEETransactionsonInstrumentationandMeasure2ment,1990(4):424-428.[6],..,2003,30(4):51-54.[7]KINGTG,XUW.Piezomotorsusingflexurehingeddisplacementampli2fiers.IEE.Colloquium(Digest),1995(11):1-5.[8],..:,1999.(4),,,PCB,,,PCB,,PWMDC/DC4,,,,,,[1]BLANCHARDH,DEMONTMOLLINF.HighlysensitiveHallsensorinCMOStechnology.SensorsandActuators,2002(82):144-148.[2]POPOVIERS,RANDJELOVIEZ.IntegratedHall2effectmagneticsen2sors.SensorsandActuators,2001(A91):46-50.[3]..,2003:226.[4]RANDJELOVICZB,KAYALM.HighlysensitiveHallmagneticsensormicrosysteminCMOStechnology.IEEEJournalofSolid2stateCircuits.[5]POPOVICRS,DRLJACAPM,SCHOTTC.BridgingthegapbetweenAMR,GMR,andHallmagenticSensor.Yugoslavia.Proc.23rdInter2nationalConferenceonMicroelectronics(MIEl2002),2002:55-58.[6],...,2003.4:7©1995-2006TsinghuaTongfangOpticalDiscCo.,Ltd.Allrightsreserved.