气体传感器研究进展和发展方向

.2003.11(10)ComputerMeasurement&Control731:2002-13-21:(50174015):(1980-),,,,(1946-),,,,,(1946-),,,,,:1671-4598(2003)10-0731-04:TP212:A,,,(,110004):,:;;;ResearchingProgressandDevelopingTrendofGasSensorsWUYu2feng,TIANYan2wen,HANYuan2shan,ZHAIYu2chun(MaterialandMetallurgyCollege,NortheasternUniversity,Shenyang110004,China)Abstract:Basedonthegassensitivematerialsusedinthegassensorsandthedifferentinteractionmechanismsbetweenthegassensitivematerialsandthegases,theprimarygassensorsresearchedpresentlyareclassified.Thedomesticandoverseasde2velopingstatusofthesemiconductorgassensor,thesolidelectrolytegassensorandthecalelyticcombustionsensor,theopticalgassensor,thequartzresonancegassensorandthesurfaceacousticwavegassensorareintroduced.Theresearchingprogressongasessensitivematerialsofdifferenttypesisintroducedemphatically.Basedonthedomesticandoverseasresearchingstatusinthisfield,thedevelopingtrendofgassensorsispointed.Keywords:gassensors;gasessensitivematerials;researchingprogress;developingtrend1,,,221160,SnO2ZnO,,1[1],WO3In2O3TiO2Al2O3,21111SnO2ZnO,,,,200500,1CH4Rh-SnO2CeO2-SnO2COAu/Co3O4Cu-ZnO2H2Sb2O3-SnO2Bi2O3-SnO2CO2La2O3-SnO2CaO-La2O3Ag-CuO-BaTiO2Cu-BaSnO2BaCe0.25Y0.05O3-xCu-SnTiO3NH3Au/WO3Cr1.8TiO3C2H5OHPd-La2O3-SnO2Pd-La2O3-In2O3H2SZnO-SnO2CuO-SnO2Ag-SnO2Au-WO3NOX(x=12)In-TiO2In2O3Cd-SnO2WO3Ga-ZnOIn,Al-SnO2Cr2O5-Nb2O5V/In-SnO2SO2Li2SO4-CaSO4-SiO2PH3ZnOSnO2Sr1-yCayFeO3-x(y=0.05,1)Fe2O373211,(AgAuPt),Al2O3SiO2ZrO2[2]110-5H2S,1%ZrO2ZrO2-SnO2ZrO2,50[3,4];SnO2Pt[5]SnO/SnO2:PtCO,,200[6],ZnOAg,V2O5,Ga2O3[7]Fe2O3,Fe2O3CH4H2C2H5OH[8];Fe2O3SO2-4Sn4+,[9,10],,,,[11],SnO2ZnOFe2O3,21112MOSPdMOSEFT,Pd,,ppm,,A.FuchsKIO3,2080ppb[12]MOSFET,La017Sr013FeO3OSFET[13],,212,[7]LB,,[14]MOSFET,,Pr[Pc(OC8H17)8]2,,LB,Pr[Pc(OC8H17)8]2(OA)1:3LB(CFT),CFTLBNO2,NO25ppm[15],[7]3,,,ZrO2,:;,NH-CaCO3YST-Au-WO3NH3H2S[16];LaF3(CaF2)H2OH2SO2,[17],,,,(PEO)Nafion,H2()[18,19]H2SPH3[20]10:733,,4:,300600,,,,[21],,,H2LPGCH4[3,22],,5:[23][16,24],COCO2,SO2NO2[25],,[23,26],,,:H2,[23],,6,,,,[7],PEI(polyethyleneimine),CO2,50010-6CO2,5s,2s[27]NH3SO2HClH2S,,[7]7,,:,;,,,,[16,28];NO2NH3COSO2[7],,8,:(1):,;,:,,,,,(2):73411,[29](3):,,,(4):,[30][31]:[1],,.[J].,1997,14(2):30.[2],.[M].:,1997.[3].[J].(),1997,19(2):211-216.[4].›¦¿¤™[J].SUTBULLETIN,1993,(4):26.[5],.Œ™[J].DENKIKAGAKU,1998,56(11):998-999.[6],,,.CO[J].,2001,17(5):46-48.[7],,.[J].,1999,30(2):126-128.[8]WUOH,LEEKM,LIUCC.Developmentofchemicalsensorsusingmicrofabricationandmicromachinetechniques[J].SensorsandActuatorsB,1993,(13):2-5.[9].Œ™›Ó•[J].›Ó•,1986,(6):180-184.[10].Œ™›Ó•[J].›Ó•,1986,(6):184-190.[11]HOJJ,FANGYK.Highsensitivityethanolgassensorin2tegratedwithasolid-stateheaterandthermalisolationim2provementstructureforlegaldrink-drivedetecting[J].SensorsandActuatorsB,1998,(50):225-232.[12],.[J].,1996,(5):20-22.[13],,,.La0.7Sr0.3FeO3FET[J].,2000,(31):59-61.[14],,,.[J].,2001,20(5):331-338.[15],,,.[J].,2001,22(7):933-936.[16],,,.[J].,1999,7(2):55.[17],,,.LaF3[J].()1995,16(4):376-379.[18],,,.[J].,2001,13(3):166.[19].Œ™›Ó•[J].›Ó•,1989,(5):82-86.[20].[J].,1995,5(2):158.[21].Œ™›Ó•[J].›Ó•,1991,(3):73-75.[22].Œ™›Ó•[J].,1991,3(5):14-17.[23],,.[J].,2001,23(6):15-17.[24]KLAINERSM.Environmentalapplicationsoffiberopticchemicalsensors[J].OpticalChemicalSensors,1991,28(6):83-96.[25].[M].:,2001.[26]JINW,STEWARRG,CULSHAWB.Sourcenoiselimita2tioninafiberopticsgassensorsusingabroadbandsource[J].AppliedOptics,1994,35(5):55-62.[27],,,.CO2[J].,2001,20(9):30-31.[28]RAPPM,SLANELR.Gasdetectionintheppb-rangewithahighfrequency,highsensitivitySAWdevices[J].ThinSolidFilms,1992,210:474-475.[29]SHATOKHINA,PUTIILNF,SAFONOVAO,etal.SensorpropertiesofPd-DopedSnO2filmsdepositedbylaserablationinorganicmaterials[J].SensorsandActuators,2002,38(4):374-379.[30]GARDERJW,BARTLETTCEDSPN.Sensorsandsenso2rysystemsforelectronicnose[M].Dordrecht/Boston/Lon2don:KluwerAcademicPublishers,1992.[31]PASIERBP,KOMORNICKIS,GAJERSKIR,Electrochemi2calgassensormaterialsstudiedbyimpedancespectroscopy[J].JournalofElectrocermics,2002,8(1):57-64.[32]QUAHS,DANOWSKIK,PANTANOP,TherapeuticmicroandnanotechnologySection:microwellarrayphotoimprintlithog2raphy:micropostsensorsandguidanceofPC12neuriteprocesses[J].BiomedicalMicrodevices,2002,4(3):123-130.