TFT-LCD Panel产品及生产流程简介--lx200009

產品及生產流程簡介產品:TFT-LCDPanel產品及生產流程簡介TFT-ArrayCellModule液晶產品及生產流程簡介DisplayTechnology:CRTvsAMLCDCRTAdvantage:•LowcostperpixelandhighqualityofdisplayApplications:•TV,computer,oscilloscopeandmeasuringdevicesMarket:•1993:11billions•1998:18billionsDisadvantage:•EnvironmentalandsafetyissuesAMLCDAdvantage:•thin,light-weighted,andlowpowerconsumptionApplications:•portable&compactsystemsandHDTVMarket:•19932billions•199810-15billionsDisadvantage:•cost,largeupfrontinvestmentandmanufacturingdifficulties產品及生產流程簡介TFT-basedActiveMatrixLCDs(AMLCD)DATADRIVERSSCANDRIVERS產品及生產流程簡介InanAMLCDdisplay,eachpixelhasaTFT.Thegateisattachedtoahorizontalrowelectrodeandthedrainisattachedtoaverticalcolumnelectrode.ThesourceisattachedtotheLCelectrode.Thedisplayisactivatedonerowatatime,byactivatingthegatelines.Thecolumnelectrodescarrythedatavoltages.WhenaTFTisturnedon,thedatalinechargesuptheLCcapacitortotheappropriatevoltage.ThentheTFTisturnedoff,sothatthechargeisheldonthecapacitoruntilthenextrefreshtime.(Typicalrefreshratesare60-70Hz)ThedatavoltageisisolatedfromtheotherrowsofthedisplaybytheTFT,sothatcrosstalkisverylow,evenwhenthenumberofrowsislarge.Theoveralleffectisalmostthesameasbeingabletocontrolthevoltageateachpixels.Thus,anypointonthetransmissioncurveisaccessible,leadingtogoodON/OFFcontrastandgoodgrayscalecontrol.TFT-basedActiveMatrixLCDs(AMLCD)產品及生產流程簡介LiquidCrystalOperationLCsandwichedbetweenglassplates,whicharerubbedatrightanglestoaligntheLCmolecules.Polarizersalignedperpendicularlyoneitherside.Withnovoltageappliedacrossthepixel,theLCmoleculestwisttoaligntotherubbingoftheglassplates.Lightenteringthefirstpolarizeristwistedandcanexitthesecondpolarizer--pixelisONWithavoltageappliedacrossthepixel,theLCmoleculesuntwisttoalignwiththeelectricfield.Lightenteringthefirstpolarizercannotexitthesecondpolarizer--pixelisOFF.產品及生產流程簡介LiquidCrystalPixel:ONPolarizer1(Vertical)Polarizar2(Horizontal)HorizontallyPolarizedLightOutUnpolarizedLightInLiquidCrystalNoappliedvoltage:opticalpolarizationfollowstwistofLCmolecules產品及生產流程簡介LiquidCrystalPixel:OFFPolarizer1(Vertical)Polarizar2(Horizontal)NoLightOutUnpolarizedLightInLiquidCrystalappliedvoltage:LCmoleculestoisotropic.產品及生產流程簡介QualitativeComparisonCrystallinePolysiliconAmorphousRelativesizesVds=5V-10-5051015Gate-sourcevoltage[V]10-1410-1310-1210-1110-1010-910-810-710-610-510-410-3Draincurrent[A]Vds=5V-10-5051015Gate-sourcevoltage[V]10-1410-1310-1210-1110-1010-910-810-710-610-510-410-3DraincurrentVds=5V-10-5051015Gate-sourcevoltage[V]10-1410-1310-1210-1110-1010-910-810-710-610-510-410-3Draincurrent產品及生產流程簡介TFTProductionProcessCFProcessFormblackmatrixCoatcolorresistExposethroughMaskDevelopPost-backRepairforGreenandBlueApplyProtectivefilmDepositITOCommonelectrodeArrayProcessExposethroughMaskrepeat4-6timesGlassSubstrateSputteringCVDCoatPhotoresistDevelopEtchStripPhotoresistCompletedArrayStructureModuleProcessTABICBondDriverstoGlass&PCBBacklightUnitCompletedTFTModuleCellProcessSealInjectLCPanelassemblyAttachSpacersApplySealantRubApplyPIFilmAttachPolarizersCompletedCell產品及生產流程簡介TFTLCDCrossSection-ArrayProcessGlassSubstrateDisplayElectrodeCapacitorTFT產品及生產流程簡介TFTLCDCrossSection-CFProcessCommonElectrodeProtectiveFilmColorFilterBlackMatrixGlassSubstrateDisplayElectrodeCapacitorTFT產品及生產流程簡介TFTLCDCrossSection-CellProcessCommonElectrodeProtectiveFilmColorFilterBlackMatrixGlassSubstrateDisplayElectrodeCapacitorTFTPolarizerFilmSpacerPolarizerLiquidCrystalAlignmentFilmSealant產品及生產流程簡介TFTLCDCrossSection-ModuleProcessCommonElectrodeProtectiveFilmColorFilterBlackMatrixGlassSubstrateDisplayElectrodeCapacitorTFTPolarizerFilmSpacerPolarizerLiquidCrystalAlignmentFilmSealantTABDriverLSIConnectionControlICPrintedCircuitBoardLightDiffuserPrismSheetWaveguidePlateReflectorEdgeLightAnistoropicConductorFilm產品及生產流程簡介GlassInput產品及生產流程簡介GlassCleaningSprayNozzle產品及生產流程簡介MoWFilmSputtering產品及生產流程簡介ResistCoat產品及生產流程簡介MaskPhotoExposure產品及生產流程簡介DeveloperSprayNozzle產品及生產流程簡介MowEtching產品及生產流程簡介ResistRemoveSprayNozzle產品及生產流程簡介BottomGateEtchStopTFT-CrossGlassSubstrateITOSiNxn+a-SiGateMetalSiOxS/DMetala-Si產品及生產流程簡介BottomGateBCETFT-CrossGlassSubstrateITOSiNxn+a-SiGateSiOxS/DMetala-SiPassivation產品及生產流程簡介TopGateTFT-CrossITOSiNxa-SiLightShieldMetalSiOxS/DMetalGateMetaln+a-SiGlassSubstrate產品及生產流程簡介TFT-LCDPixelTopViewGatemetalDatametalITOCSstoragecapacitance產品及生產流程簡介IPSTFTLCDPixelTopViewGatemetalDatametalCSstoragecapacitance產品及生產流程簡介FAB13FArrayLayoutSputterS-0CleanerS-1S-2MeasureEQPECVDCoaterDeveloperStepperWetEtcherDryEtcherASPMicro.ResistRemovePass-SiNxS-3SS-1S-5S-8TesterAGVAGVAGVAGVAGVAGVAGVAGVAGVAGVDHEO/STesterAGVAnnealLaserRepairMicro.Micro.產品及生產流程簡介FAB12F&1FCellLayout1stCutEdgeGrindCleanCFCleanPreCleanSealantCleanCleanRubbingMainCurePIPrintPIcheckPreCleanRubbingMainCurePIPrintSealInspec.PIInspec.SealCureTeansferSpacerSprayDensityInspectionAssemblySealPressSealHardenInspectionArrayGlassInputCFGlassInput2ndCutVacuumAnnealVisualInspectionAnnealCleanEndSealLCInjectionOutwardGrindAutoClaveCellPanelFinalTesterPolarizerAttachmentSufacePo