圆平膜压阻式力传感器的线性度与灵敏度分析

X(710048)(710048),,TheAnalysisofTheSensitivityandLinearityofThin2FilmPressureTransducerswithTheStructureofCircular2FlatDiaphragmAbstractThesensitivityandlinearityofpressuresensorforcircularareanalysedindetail,Itwasmadeonthebasisofdefinitionsensitivityandlinearityofpressureresistancesensor,bythecalculation,thegreatquantitydatahavebeengiven,Thefactorsofinfluencethesensitivityandlinearityofpressuresensorandtheeffectonincreasingsensorsensitivityandlinearityhavebeendirected.KeywordsSensitivityLinearityDiaphragm1300,3000,,20%30%,,510,1020[1],,,,,,,74224199712X1997518©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(),11(),,(),r:w(r)=3p(122)16Eh3(a2-r2)2(1):p;;E;a;h(1):,:w(0)=w0=3p(122)16Eh3a4,(1):w(r)=w0(1-r2a2)2(2),rt[2]:r=3pa28h2[(1+)-r2a2(3+)],t=3pa28h2[(1+)-r2a2(1+3)](3)rt:r=1E(r-t),t=1E(t-r)(4)(3)(4),:r=3(1-2)(a2-3r2)8Eh2,t=3(1-2)(a2-r2)8Eh2(5)84224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.[9],:(1)r=2h2a2(1-3r2a2)p-014882h2a2(1-3r2a2)p3t=2h2a2(1-r2a2)p-014882h2a2(1-r2a2)p3(6)(2)r=fr(ra)h2a2p2,t=ft(ra)h2a2p2(7),=+,p,,,:pm=qma464hD,D=Eh312(122),qm=16Epm3(1-2)(ha)4(8)(8),,,,22,R1R2R3R4,R1=R2=R3=R4,,,,,,94224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.=R3,R2=R4,,:V=R1-R22R+R1+R2U(9)(9),,:V=[12(R1R-R2R)+2(R1R-R2R)2]U,=R2+R1R2-R1(10):,R/R,:RrR=Kl€r+Kb€t,RtR=Kl€t+Kb€r(11):Rr,Rr;Rt,Rt;€r,€t;Kl,Kb[4],,KbKl,,2,,e=p+p2-p3(12):e=V/U,,,:ec=p(13):e=p2-p3(14),:1=|e|max/(pm)100%(15):|e|max:|e|max=max[42722|p2m-p3m|]pm23p2m-p3mpm23pmqm(MPa),(6)(7),,(6)(7),:fr(ra)h2a2p2-014882h2a2(1-3r2a2)p3=0(16)05224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(16),,,,(16),::(,,),,,[5](1)[5]R2R4,1r/a019019001800170R2,4/R(10-3)-91135-66102-54102-40120(R2,4/R)(%)0-2717-4017-5519Qr,Qt(R2,4/R)i(R2,4/R)i,11:r/a=0190,r/a=01928%,r/a=0170,56%,:,,,(2)r2r,r/()021020R1,3/R(10-3)88103811204613624184(R1,3/R)(%)0-718-4713-7116(3),rtR1,3/R(R1,3/R)23ƒr4(001)2,()5,R1R330%:R1R3,,5(001)[100](4),[6]15224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.=(11t+12r)sin2(A-G)+(11r+12t)cos2(A-G)+(1/2)(11-12-44)(t-r)sin2Asin2G(17)A,G,€r,x,y4,A,G(17),R/R:A=GA=G/2(r/a=1),(),,,,,,[7],,MPX5(a)MPX12,,5(a)MPX125(b)MPX105(b)MPX10,,,(015%F.S.),,5(b)310V,,;1.,6y=f(x),n,25224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.:(xi,xi+1),y:y=yi+(x-xi)yi+1-yixi+1-xi(18),,,n,72.,,7,,,A(x0,y0),B(x1,y1),C(x2,y2)(),,,:y=K0+K1x+K2x2K0,K1,K2y=f(x)A,B,C,,y=m0+m1(x-x0)+m2(x-x0)(x-x1)(19):m0,m1,m2A,B,Cm0=y0;m1=y1-y0x1-x0;m2=(y2-y0x2-x0-y1-y0x1-x0)/(x2-x1),A,B,Cm0,m1m2,,x(19),y[8]3.,,,,,,,,,;,,,,,,35224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.(7):132,.,,1992,6,pp1962093,.,1996,(9):174.,,1996,10,pp991015,.,1996,(12):59656.(),pp1231297,,.,,1996,4,pp1148.,,1995,8,pp3269.,1991,(1)45224199712©1994-2008ChinaAcademicJournalElectronicPublishingHouse.Allrightsreserved.