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325200410GLASS&ENAMELVol.32No.5Oct.2004ITO,(,430070):ITO:ITO;;;-:TQ171.73+6:A:1000-2871(2004)05-0051-04FabricationTechniquesandDevelopmentofITOFilmWANGShunlin,XIADongnlin(TheKeyLaboratoryofSilicateMaterialsScienceandEngineering,MinistryofEducation,China,WuhanUniversityofTechnology,Wuhan430070,P.R.China)Abstract:Thecomposition,conductionmechanisms,propertiesandfabricationtechniquesofITOthinfilmshavebeenreviewed,andtheadvantagesofdifferentpreparationtechnologiesandproblemswerealsointroduced.Keywords:Indiumtinoxide(ITO)thinfilms;Magnetronsputtering;Vacuumdeposition;Sol-gel1TCO(TransparentConductiveOxide)20,1907BadekerCdO,,1968InSnInSn,,,3eV,,ITO,10-5cm,90%,TCOITO,,,[1][2][3],ITO:2003-11-122ITOIn2O3,In2O3,(),,,SnIn2O3In3+,,ITO,SnSn2+Sn4+,InIn2O3,Sn4+,Sn2+,SnO,,SnITOSnO,,SnOSnO2,,,,ITO:,10-4cm;,85%;,85%;,80%;,85%;;,3ITOITO,[4][5]-(Sol-Gel)[6]3.1,,Ar,O2:,,,Ar,,O2,10-110Pa,,ArAr+,,Ar+,,,,OITO,ITO,;,,,ITO,ITO,,;,,(20%)ITO,ITO252004,,,(),,,,ITO,Sn/In(1/9)3.2,,ITOIn2O3SnO2,,,InSn,,ITO,,,,ITO[7],,,,,200,,100Pa(,)ITO,,3.3-(Sol-Gel)-,80-ITO,[In(OC3H7)3][Sn(OC3H7)4],,,400500,200-1012m2,(LE),,,,,,,,,-,,,,ITO-ITO,:SnSn(12%)(0.64M)ITO4,,,,,,,,4.1(ESAVD),,,,,90%35325ITO,-R.Chandrasekhar[8],ITO,250600nm,810-4210-5Vcm-1,76%,4.2(HIPIB)1966Basov,80,HIPIBHIPIB108109W/cm2,,,,,,,5ITO(LCD)(ELD);(,),,40%;ITO,,,;ITO(1.81.9),,,,-,ITO,,,,,,ZnO,,,,ITO:[1]SungKyPark,JeongInHan.Depositionofindiumtin-oxidefilmsonpolymersubstratesforapplicationinplastic-basedflatpaneldisplays[J].ThinSolidFilms,2001,(397):49-55.[2]Li-TeYin,Jung-ChuanChou.StudyofindiumtinoxidethinfilmforseparativeextendedgateISFET[J].MaterialsChemistryandPhysics,2001,(70):12-16.[3]Hai-NingCui,Shi-QuanXi.ThefabricationofdippedCdSandsputteredITOthinfilmsforphotovoltaicsolarcells[J].ThinSolidFilms,1996,(288):325-329.[4]V.Teixeira,H.N.Cui.AmorphousITOthinfilmspreparedbyDCsputteringforelectrochromicapplications[J].ThinSolidFilms,2002,(420-421):70-75.[5]JosephGeorge,C.S.Menon.ElectricalandopticalpropertiesofelectronbeamevaporatedITOthinfilms[J].SurfaceandCoatingsTechnology,2000,(132):45-48.[6]M.J.Alam,D.C.Cameron.OpticalandelectricalpropertiesoftransparentconductiveITOthinfilmsdepositedbysol-gelprocess[J].ThinSolidFilms,2000:455-459.[7],.ERCITO[J].,1995,26(5):405-408.[8]R.Chandrasekhar,K.L.Choy.Innovativeandcost-effectivesynthesisofindiumtinoxidefilms[J].ThinSolidFilms,2001,(398-399):59-64.452004