latch-up闩锁效应

Latchup•Latchup•Latchup•Latchup•LatchupLatchupƒLatchupI/O,ƒLatchupcmos,powerVDDGND(VSS)PNPNPNBJT,VDDGNDƒIC,,LatchupƒLatchup,LatchupICLayoutLatchup()CMOSINVBJTBJTSCRN+P+P+N+N+P+nwellRwellP+substrateInOutP-epiQ1Q2Q1OUTOUTQ2RwellRsubnwellPsubstrateN+sourceP+substratecontP+sourceLatchup()Q1PNPBJT,(base)nwell,(collector)Q2NPNBJTPsubstrateRwellnwellRsubsubstrateSCRBJTC-BLatchupBJTBJTBJTVDDGNDVSSLatchupLatchup•VDDnwellPsubstrateVDDLatchup•I/OVDD-GNDVSSSCR•ESDwellsubstrateSCR•powergndSCRBJT•WellLatchup•substrate)BJT•sourcedrain•layerBJT•Guardring:P+ringnmosGNDN+ringpmosVDDRwellRsubBJTring•Substratecontactwellcontactsource,RwellRsub•nmosGNDpmosVDD,pmosnmosSCR•I/OLatchupI/Omosguardring•I/Opmos(nwell)ESD•ESD•ESD•ESD•ESD•ESDESD•ESD•••C1150pFR11.5kVesdC1200pFPadPadHBMHuman-bodymodelMMMachinemodelESD•1.5KV~2KV1.5KV~2KVHBM)1.3APADMOSgateESD•IC2KVIC20KVHBMESDN+N+ContactPsubstrateESD•ESD•R1~3KmAPADRC•ESDPAD-0.7vVVDD+0.7vESDESDInputPADTointernalcircuitryVDDVSSESDESD()(ZenerClamp)•P+substrateNmoatP+substrateNmoat•BipolarEmitter-BasecmosNSD/P-epiPSD/N-well•Emitter-Base100~300NSD/P-epiPSD/N-wellPADPADD1NMoatPmoat(substrate)MetalconnectingtopadESD()(ZenerClamp•NMoatsubstratedesignruleSubstratecontactPADdiesealPADNmoatcontact1~2umNooat500um2•diesealcollecting-ringNmoatcollecting-ringsubstratecontact•100~1kESDPADD1PolyresistorSubstratecontactNSD/P-epiESDmos•cmospmosnmossource/drainwellP-epiESD•nmosdrainPADESDNSD/P-epiESDNSD/P-epi•nmospmosmosmosmosmos1000um2mos2kvHBM200vMM•pmosnmosnmospmospmosnmosPAD,drainESD•mosmosESD•PADmosdrainESDESDP+substrateN+N+PN-wellPESD•102kvHBM1.3AmosgateESDmosgate•D1100vRD2RD2RD2R1KR•PolyR2kvHBM200vMM5~8umcontact6~8MoatpolyVSSD1D2RESD•D2NmoatsubstrateringsubstratecontactD2substrateD2D2D150~100umD1PADRPADD2PADD1D2collect-ring•ESDcmosinputpadinputESD,•I/Oinput&output)PADESDD1PADsubstrateR1inputR2outputoutputmossource/drainsubstratewellD2,inputD2VSSD1D2R1R2inputoutputESDVCES•NPNcollector-baseESDQ1VCESVCEO40VBipolar65V45V•Emitter300~500um220VanalogBiCMOS2KVHBM200VMM•LayoutDiffusioncontact1~2umQ1PADBaseEmitterCollector(withdeep-N+)ESDVECS•NPNemittercollector,NPN,NPNbase-emitterESDVECS•VECSNPNVEBO60%~80%analogBiCMOSNPNVEBO8~10V,ESD5V•Emitter600um22KVHBM200MMEmitter10KVHBM•VECSESDQ1PADESD•ICgroundPINPINsubstratePINsubstrateESD•PNP2KVHBM200VMMPNP•guardringESDThick-FieldTransistor•ESD,•NPNNmoatNSDcollectorEmitter,P-epibase,NmoatBondpad,substrateNPNVCES•ESDMOSGategatebondpadsubstrate,NSD/P-epigate•MOSThick-FieldTransistor.P-substrateP-epiN+N+PADESD•ESDESDinputmosgate,R1substratemosESDmosmosESDmosmossize•ESD5VCMOS,ESDSCR•SCR(silicon-controlledrectifier)ESD,SCR,CMOS,Q1PNP,nwellPSDnwellP-epi,NPNQ2nwell,P-epiNSDR1nwellR2substrateP-epiSCRQ1Q2collector-baseQ2baseQ2Q1BJTR1R2SCR2V•SCRHBMMM•CMOSSCRSCRSCRQ2basepadQ1basegroundQ1Q2R1P+sourceR2Q1Q2R1P+sourceR2ESDbaseemitterdiffusionPIN•substrateDiffusionPINESD1.baseemitterdiffusionPINBaseemitterdiffusionESDdiffusionESDdiffusiondiffusion500um2,160/sqbasediffusion2KVHBM200VMM,diffusionVCESVECSdiffusionESDPINNPNemitter2.PINNPNemitter•NPNemitterbondpadsubstratepadbondpadESDpademitter•powerNPNemittersubstratePINESDPINCMOSgate3.PINCMOSgate•CMOSgateESD•ESDESDESDgate75%ESDsubstrateESDsubstratediffusionwidth5~8um,contact6••ESD75%•CMOSESDESDSCRESDPINmoat4.PINmoat•moatESD•moat5~8VESDmoat10V,moatdiffusion500um2,2KVHBM200VMMmoatESD•moatESDESDESDmoatdiffusionVECS•moatmaskdevicesizeESDPINmoatCMOSgate5.PINmoatCMOSgate•moatPAD•moat50~200•mosgatePADgategate•moatgateESDPIN6.PIN•HBM•bondpaddiffusionnwellbondpadbondpadNmoatbondpadNmoatESDPIN7.PIN•gatediffusionemitteremitterESDPIN8.PIN••guardring(basediffusioncontact.•moatdiffusionPINmoat,guardring(basediffusioncontactESD9.substratePIN,substrate•substrate,GNDPINsubstrate,PINsubstratePIN,ESD10.bondpadPIN•bondpad11.TestPAD&ProbePAD•PADICESDESDTheAntennaEffect)•••etchgatepolygatepolygategategatepolygatepolypolysource/drain•polygatepmosnmos,gatelayoutpoly•mosM1gatepolyM2M1M2polyM1gateM1gatepolymetalM1M2GateM1•gatepolypolygatemetalgatepolygate•metalmetaldiffusiondiffsiontopmetaltopmetaldiffusionmetaldiffusionmetalgatemetaltopmetaltopmetalsizeNmoat/P-epiPmoat/nwellNmoatP-epimetalpolymetalM1M2GateMetaljumperPsubstrate